TOOLS

ion diode pumps

13 models in this family, 136 published parameters, each carrying the source key and the page it was read on.

Back to the selector, which answers across all 333 models and 14 families.

VacIon Plus 500 Diode500 l/sN2 speed, down to 1.0e-11 mbaragilent-vacion-plus-500-manual-idealvac+11 parameters

Agilent Technologies Vacuum, ion diode.

ambient temp range0 to +85 °Cagilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 43.

cathode materialTitaniumagilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 53.

element count4 countagilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 85.

inlet flange8” CFF (NW 150) AISI 304 ESRagilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 53.

magnet typeFerriteagilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 53.

mass120 kgagilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 53.

operating life at reference pressure50000 hoursagilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 53.

pumping speed n2500 l/sagilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 53. Served to the builder as 500 l/s. Export rule: published nitrogen pumping speed.

starting pressure max≤1x10-3 mbaragilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 53.

ultimate pressurestated as a boundBelow 10-11 mbaragilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 53.

voltage7000 Vdcagilent-vacion-plus-500-manual-idealvac

Read on agilent-vacion-plus-500-manual-idealvac p. 53.

IZ400360 l/sN2 speed, down to 1.0e-12 mbarleybold-iz-catalog-2010+13 parameters

Leybold, ion diode. Lifecycle: eol unsupported.

ambient humidity max< 85 %leybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

ambient temp range0 to +40 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing heater power max800 Wleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing heater voltage220 - 240 V ACleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing temp max350 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing temp with internal heater250 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

dimensions wdh560 x 296 x 372 mmleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

mass124 kgleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

operating pressure recommended< 3.0 x 10-5 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed ar190 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed n2360 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5. Served to the builder as 360 l/s. Export rule: published nitrogen pumping speed.

ultimate pressurestated as a bound< 10-12 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

voltage7.5 kVleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

VacIon Plus 300 Diode300 l/sN2 speed, down to 1.0e-11 mbaragilent-vacion-plus-300+13 parameters

Agilent Technologies Vacuum, ion diode.

ambient temp range0 to +85 °Cagilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 5.

bake temp max with magnets150 to 220 °Cagilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 36.

cathode materialTitaniumagilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 15.

element count4agilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 46.

inlet flange8" CFF (NW 150) AISI 304 ESRagilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 15.

magnet typeFerriteagilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 15.

mass69 kgagilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 15.

operating life at reference pressure50000 hoursagilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 15.

pumping speed n2300 l/sagilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 15. Served to the builder as 300 l/s. Export rule: published nitrogen pumping speed.

service intervalmaintenance free (aucun intervalle chiffre)agilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 39.

starting pressure maxd1x10-3 mbaragilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 15.

ultimate pressurestated as a boundBelow 10-11 mbaragilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 15.

voltage+7000 Vdcagilent-vacion-plus-300

Read on agilent-vacion-plus-300 p. 15.

IZ200200 l/sN2 speed, down to 1.0e-12 mbarleybold-iz-catalog-2010+13 parameters

Leybold, ion diode. Lifecycle: eol unsupported.

ambient humidity max< 85 %leybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

ambient temp range0 to +40 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing heater power max600 Wleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing heater voltage220 - 240 V ACleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing temp max350 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing temp with internal heater250 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

dimensions wdh367 x 296 x 372 mmleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

mass65 kgleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

operating pressure recommended< 3.8 x 10-5 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed ar105 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed n2200 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5. Served to the builder as 200 l/s. Export rule: published nitrogen pumping speed.

ultimate pressurestated as a bound< 10-12 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

voltage7.5 kVleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

VacIon Plus 150 Diode150 l/sN2 speed, down to 1.0e-11 mbaragilent-vacion-plus-150-manual-idealvac+10 parameters

Agilent Technologies Vacuum, ion diode.

ambient temp range0 to +85 Cagilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 4.

cathode materialTitaniumagilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 15.

element count2 countagilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 42.

magnet typeFerriteagilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 15.

mass43 kgagilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 15.

operating life at reference pressure50000 hoursagilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 15.

pumping speed n2150 l/sagilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 15. Served to the builder as 150 l/s. Export rule: published nitrogen pumping speed.

starting pressure max≤ 1 x 10^-3 mbaragilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 15.

ultimate pressurestated as a bound< 1 x 10^-11 mbaragilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 15.

voltage7000 Vdcagilent-vacion-plus-150-manual-idealvac

Read on agilent-vacion-plus-150-manual-idealvac p. 15.

IZ100100 l/sN2 speed, down to 1.0e-11 mbarleybold-iz-catalog-2010+13 parameters

Leybold, ion diode. Lifecycle: eol unsupported.

ambient humidity max< 85 %leybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

ambient temp range0 to +40 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing heater power max320 Wleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing heater voltage220 - 240 V ACleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing temp max350 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing temp with internal heater250 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

dimensions wdh337 x 167 x 340 mmleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

mass37 kgleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

operating pressure recommended< 5.0 x 10-5 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed ar48 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed n2100 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5. Served to the builder as 100 l/s. Export rule: published nitrogen pumping speed.

ultimate pressurestated as a bound< 10-11 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

voltage7.5 kVleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

VacIon Plus 75 Diode75 l/sN2 speed, down to 1.0e-11 mbaragilent-vacion-plus-40-55-75-manual-idealvac+8 parameters

Agilent Technologies Vacuum, ion diode.

ambient temp range0 to +85 °Cagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 4.

cathode materialTitaniumagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

magnet typeFerriteagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

mass19 kgagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 17.

pumping speed n275 l/sagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16. Served to the builder as 75 l/s. Export rule: published nitrogen pumping speed.

starting pressure max1 x 10^-3 Torragilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 13.

ultimate pressurestated as a bound< 1 x 10^-11 mbaragilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

voltage7000 Vdcagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

VacIon Plus 55 Diode55 l/sN2 speed, down to 1.0e-11 mbaragilent-vacion-plus-40-55-75-manual-idealvac+8 parameters

Agilent Technologies Vacuum, ion diode.

ambient temp range0 to +85 °Cagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 4.

cathode materialTitaniumagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

magnet typeFerriteagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

mass18 kgagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 17.

pumping speed n255 l/sagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16. Served to the builder as 55 l/s. Export rule: published nitrogen pumping speed.

starting pressure max1 x 10^-3 Torragilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 13.

ultimate pressurestated as a bound< 1 x 10^-11 mbaragilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

voltage7000 Vdcagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

IZ5045 l/sN2 speed, down to 1.0e-11 mbarleybold-iz-catalog-2010+13 parameters

Leybold, ion diode. Lifecycle: eol unsupported.

ambient humidity max< 85 %leybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

ambient temp range0 to +40 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing heater power max300 Wleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing heater voltage220 - 240 V ACleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing temp max350 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing temp with internal heater250 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

dimensions wdh187 x 165 x 240 mmleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

mass12 kgleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

operating pressure recommended< 8.0 x 10-5 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed ar15 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed n245 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5. Served to the builder as 45 l/s. Export rule: published nitrogen pumping speed.

ultimate pressurestated as a bound< 10-11 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

voltage7.5 kVleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

VacIon Plus 40 Diode40 l/sN2 speed, down to 1.0e-11 mbaragilent-vacion-plus-40-55-75-manual-idealvac+8 parameters

Agilent Technologies Vacuum, ion diode.

ambient temp range0 to +85 °Cagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 4.

cathode materialTitaniumagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

magnet typeFerriteagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

mass17 kgagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 17.

pumping speed n240 l/sagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16. Served to the builder as 40 l/s. Export rule: published nitrogen pumping speed.

starting pressure max1 x 10^-3 Torragilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 13.

ultimate pressurestated as a bound< 1 x 10^-11 mbaragilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

voltage7000 Vdcagilent-vacion-plus-40-55-75-manual-idealvac

Read on agilent-vacion-plus-40-55-75-manual-idealvac p. 16.

IZ3030 l/sN2 speed, down to 1.0e-11 mbarleybold-iz-catalog-2010+10 parameters

Leybold, ion diode. Lifecycle: eol unsupported.

ambient humidity max< 85 %leybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

ambient temp range0 to +40 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

degassing temp max350 degCleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

dimensions wdh183 x 103 x 187 mmleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

mass9.5 kgleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

operating pressure recommended< 8.0 x 10-5 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed ar10 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

pumping speed n230 l/sleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5. Served to the builder as 30 l/s. Export rule: published nitrogen pumping speed.

ultimate pressurestated as a bound< 10-11 mbarleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

voltage7.5 kVleybold-iz-catalog-2010

Read on leybold-iz-catalog-2010 p. 5.

VacIon Plus 20 Diode27 l/sN2 speed, down to 1.0e-11 mbaragilent-vacion-plus-20-manual-idealvac+8 parameters

Agilent Technologies Vacuum, ion diode.

ambient temp range0 to +85 Cagilent-vacion-plus-20-manual-idealvac

Read on agilent-vacion-plus-20-manual-idealvac p. 5.

cathode materialTitaniumagilent-vacion-plus-20-manual-idealvac

Read on agilent-vacion-plus-20-manual-idealvac p. 15.

magnet typeFerrite or Sm-Coagilent-vacion-plus-20-manual-idealvac

Read on agilent-vacion-plus-20-manual-idealvac p. 15.

operating life at reference pressure50000 hoursagilent-vacion-plus-20-manual-idealvac

Read on agilent-vacion-plus-20-manual-idealvac p. 15.

pumping speed n227 l/sagilent-vacion-plus-20-manual-idealvac

Read on agilent-vacion-plus-20-manual-idealvac p. 15. Served to the builder as 27 l/s. Export rule: published nitrogen pumping speed.

starting pressure max≤ 1 x 10^-3 mbaragilent-vacion-plus-20-manual-idealvac

Read on agilent-vacion-plus-20-manual-idealvac p. 15.

ultimate pressurestated as a bound< 1 x 10^-11 mbaragilent-vacion-plus-20-manual-idealvac

Read on agilent-vacion-plus-20-manual-idealvac p. 15.

voltage7000 Vdcagilent-vacion-plus-20-manual-idealvac

Read on agilent-vacion-plus-20-manual-idealvac p. 15.

TiTan 5S CV5 l/sN2 speed, down to 1.0e-11 mbargamma-titan-5s-datasheet-highvacdepot+8 parameters

Gamma Vacuum, ion diode.

bake temp max without magnets450 °Cgamma-titan-5s-datasheet-highvacdepot

Read on gamma-titan-5s-datasheet-highvacdepot p. 2.

cathode material100% Titanium n/agamma-titan-5s-datasheet-highvacdepot

Read on gamma-titan-5s-datasheet-highvacdepot p. 2.

inlet flangeDN 35 (2.75 in.) CFR n/agamma-titan-5s-datasheet-highvacdepot

Read on gamma-titan-5s-datasheet-highvacdepot p. 2.

magnet typerare earth n/agamma-titan-5s-datasheet-highvacdepot

Read on gamma-titan-5s-datasheet-highvacdepot p. 2.

mass2.3 kggamma-titan-5s-datasheet-highvacdepot

Read on gamma-titan-5s-datasheet-highvacdepot p. 2.

operating life at reference pressure50000 hoursgamma-titan-5s-datasheet-highvacdepot

Read on gamma-titan-5s-datasheet-highvacdepot p. 2.

pumping speed n25 l/sgamma-titan-5s-datasheet-highvacdepot

Read on gamma-titan-5s-datasheet-highvacdepot p. 2. Served to the builder as 5 l/s. Export rule: published nitrogen pumping speed.

ultimate pressurestated as a bound≤ 1 x 10^-11 mbargamma-titan-5s-datasheet-highvacdepot

Read on gamma-titan-5s-datasheet-highvacdepot p. 2.

The 7 documents this family reads

agilent-vacion-plus-150-manual-idealvac VacIon Plus 150 pumps Instruction Manual (87-900-102-01 (E)) Agilent Technologies (mirror: idealvac.com) https://www.idealvac.com/files/manuals/Agilent-VacIon-150-Ion-Pumps-Manual.pdf
agilent-vacion-plus-20-manual-idealvac VacIon Plus 20 pumps User Manual (87-900-106-01 (E)) Agilent Technologies (mirror: idealvac.com) https://www.idealvac.com/files/manuals/Agilent-VacIon-Plus-20-Ion-Pumps-Manual.pdf
agilent-vacion-plus-300 VacIon Plus 300 pumps User Manual (87-900-103-01 (F), 05/2011) Agilent Technologies (mirror: idealvac.com) https://www.idealvac.com/files/manuals/Agilent-VacIon-300-Ion-Pumps-Manual.pdf
agilent-vacion-plus-40-55-75-manual-idealvac VacIon Plus 40/55/75 pumps User Manual (87-900-105-01 (E)) Agilent Technologies (mirror: idealvac.com) https://www.idealvac.com/files/manuals/Agilent-VacIon-Plus-40-55-75-Ion-Pumps-Manual.pdf
agilent-vacion-plus-500-manual-idealvac VacIon Plus 500 pumps User Manual / 87-900-104-01 (F) Agilent Technologies (mirror: idealvac.com) https://www.idealvac.com/files/ManualsII/Agilent_VacIon_Plus_500_Pumps_Manual.pdf
gamma-titan-5s-datasheet-highvacdepot TiTan 5S Ion Pump — Technical specifications & Standard options Gamma Vacuum / Edwards (mirror: highvacdepot.com) https://highvacdepot.com/wp-content/uploads/2022/03/Edwards-TiTan-5S-Ion-Pump-Datasheet.pdf
leybold-iz-catalog-2010 Sputter Ion Pumps 30 - 400 l/s (Full Line Catalog, Product Chapter C15, Edition November 2007) Leybold / Oerlikon Leybold Vacuum (mirror: idealvac.com) https://www.idealvac.com/files/literature/15_Oerlikon_Leybold_Vacuum_Catalog_2010_Sputter_Ion-Pumps.pdf