{ "attribution": "Pierre F. Ribault, pierreribault.com", "contract": { "canonical": "Printed values are the manufacturer wording, unchanged. A canonical value in mbar or l/s is added only where the reading is unambiguous. Where it is not, there is no canonical value and the reading stays out of any ranking.", "excluded": "Everything in staging. Everything inferred, anecdotal or operator-reported. Every value whose only source has not been retrieved. Everything not marked public.", "included": "Families and models with status validated. Parameters and failure modes with at least one evidence row of confidence sourced, whose source has actually been retrieved.", "sourcesNotRedistributed": "Source documents are not redistributed and quoted spans are not reproduced. Each value names its source key and page so the reader can go back to the document." }, "counts": { "failureModes": 167, "failureModesBlockedByLanguage": 125, "families": 17, "models": 333, "modelsWithServedSpeed": 302, "modelsWithoutServedSpeed": 31, "parameters": 3830, "parametersWithCanonical": 671, "sources": 168 }, "description": "Validated pump families and models, with the parameters and failure modes that carry a word-for-word verified quotation from a retrieved document. Every exported value names the source key it came from and the page it was read on.", "failureModes": [ { "detection": "Convex wear on the belt sidewalls signals pulley groove wear; heavy wear on only one side of a belt signals misalignment; uneven loading between belts points to shafts that are not parallel.", "id": "fm:booster-belt-drive-wear-and-slip", "mechanism": "On a bare-shaft machine turned by belts, pulleys that have worn and belts strung too tight can take up to half the belt life away. Let the wear go far enough for a belt to ride on the floor of the groove and it starts to slip and scorch, and with it the pump speed - and so the flow and the capacity - drops away. Pulleys out of line take their own toll on the bearing, on the belts and on the seals.", "mitigation": "Set the tension before the first run and come back to it repeatedly over the first days of operation, and confirm the alignment at the same time. Change belts as a complete set, keep dressing compounds off them, and put belts and pulleys on a six-month look-over, swapping out whatever has worn.", "occurrence": "recurrent", "onsetConditions": "Onset follows pulley groove wear or tension drift; new belts typically lose some tension during the first days of operation.", "rootCause": "wear", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "The check is a deflection-under-load reading on the belt: the tension wanted is the lowest one that still carries the peak load without giving.", "id": "fm:booster-belt-overtension-shaft-fatigue", "mechanism": "Belts strung too tight make the booster's bearings carry a load they were never meant to carry, and they put the drive shaft into bending. Push the tension far enough and the shaft ends up breaking outright, in fatigue.", "mitigation": "Take the tension figures from the belt maker rather than from feel, and read the load belt by belt: when one belt carries more than its neighbours, the drive is out of line or the shafts are not parallel.", "occurrence": "isolated", "onsetConditions": "Onset follows excessive re-tensioning, particularly when compensating for the tension loss new belts typically show during their first days of running.", "rootCause": "maintenance_omission", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Refusal to start, knocking during operation, and impeller-tip rubbing against the pump body.", "id": "fm:booster-body-distortion-pipe-strain", "mechanism": "Pipe strain, or a foundation that is not level, distorts the booster pump body. As clearances between the impellers and the body close up, the machine knocks, rubs, and can even fail to start. Across the troubleshooting guidance the remedy is the same: relieve the pipe strain or body distortion.", "mitigation": "Set the machine down on a bed that is even, unbroken and true, and check that its weight sits on all four feet. Put a flexible section between the inlet and the pipeline, and let the pipework carry itself - never the pump body.", "occurrence": "unknown", "onsetConditions": "Onset occurs when the pipework rests on the pump body, when not all four feet make contact, or when the foundation's flatness falls outside tolerance.", "rootCause": "installation", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Detection is a loss of gas flow even though the machine is running at the correct speed and in the correct direction of rotation.", "id": "fm:booster-bypass-valve-stuck-open", "mechanism": "Model 615's integral bypass valve opens during operation whenever compression produces an excessive pressure differential, bleeding part of the compressed gas back toward the inlet. If it stays open, gas recirculates within the pump and no flow reaches the outlet.", "mitigation": "Free the valve with a momentary rush of gas.", "occurrence": "unknown", "onsetConditions": "Onset occurs during operation once the valve has opened under an excessive pressure differential and failed to return to its closed position.", "rootCause": "unknown", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-615" ] }, { "detection": "Overheating of the bearings and gears, vibration, and hub noise; parallel and angular alignment measured with a straightedge and a dial indicator.", "id": "fm:booster-coupling-misalignment", "mechanism": "On direct-drive machines, the coupling transmits motor torque to the shaft. Misalignment or a worn coupling spider loads the shaft asymmetrically: bearings and gears run hot, the machine vibrates, and the hubs can be heard touching. The manual states explicitly that this misalignment damages the booster pump bearing and seals.", "mitigation": "Bring the coupling back into line, fit a fresh spider if the old one has worn, and keep the drive system under regular inspection.", "occurrence": "unknown", "onsetConditions": "It sets in after the motor has been mounted or put back, or once the polymer coupling spider has worn; the maintenance schedule calls for a coupling check every 2000 hours.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Detection: higher-than-expected discharge temperature, over-temperature cut-outs tripping, and visible fouling on the motor and drive.", "id": "fm:booster-dirty-hot-location-wear", "mechanism": "The manufacturer identifies the operating environment as a direct failure factor: ambient temperatures above the specified range raise the discharge temperature and can trigger over-temperature cut-outs, while a dirty location or the presence of oil vapour can overheat the motor, cause belt slippage, and wear the machine prematurely.", "mitigation": "Inspect and clean the equipment as needed when the machine runs in a dirty location; the maintenance schedule also calls for an annual cleaning of the motor and drive to reduce wear and promote heat transfer.", "occurrence": "recurrent", "onsetConditions": "Prolonged operation in a location hotter than the permitted ambient range, or in a dirty environment loaded with oil vapour.", "rootCause": "environment", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Refusal to start; manual check that the impellers rotate freely, and inspection of the body cavities.", "id": "fm:booster-foreign-material-blocks-rotation", "mechanism": "Foreign matter entering through the pipework lodges in the impeller cavities and blocks rotation, so the booster pump fails to start. The manual warns that foreign material causes serious damage and premature failure of internal parts.", "mitigation": "Go through the pipework and the impeller cavities for stray matter and debris before the pump is installed, and clear out whatever the system is holding.", "occurrence": "unknown", "onsetConditions": "Onset shows at start-up, following an installation or intervention during which debris could have entered via the inlet or exhaust piping.", "rootCause": "unknown", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Abnormal knocking noise during operation, excessive power draw, and vibration; inspection of the cylinder, end plates and impellers for contact marks.", "id": "fm:booster-impeller-tip-drag", "mechanism": "The two impellers turn with precisely timed clearances that limit gas back-flow. When those clearances become insufficient - through lost timing, a distorted body, or excessive operating pressure or temperature - an impeller tip drags against the other impeller or against the body. The manual warns that improper timing can cause catastrophic damage.", "mitigation": "Have the timing checked and retimed by qualified personnel (contact Edwards for service), correct the clearances, and remove the cause of excessive pressure or temperature.", "occurrence": "unknown", "onsetConditions": "Onset follows a drift in impeller timing, or as soon as running pressure or temperature exceed limits; the maintenance schedule calls for a timing check every two years.", "rootCause": "maintenance_omission", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Detection: continuous squealing during operation, oil level above the sight glass mid-point, or oil found in the pump body or in the vacuum circuit.", "id": "fm:booster-oil-overfill-seal-squeal", "mechanism": "Every bearing sits over an oil reservoir of its own, read off through a sight glass. Put too much oil into the one at the drive end and the seal takes to squealing while the pump runs; the surplus can also find its way through into the pump body, and from there into the vacuum system.", "mitigation": "Draw the level down a little and the noise goes with it. Never add oil with the machine turning: stop it and bring it back to atmosphere first.", "occurrence": "recurrent", "onsetConditions": "Onset follows a too-generous oil top-up; the level should be kept at the sight glass mid-point, reservoir by reservoir.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Detection: abnormally high body and discharge temperature; check inlet and discharge pressures against the expected values.", "id": "fm:booster-overcompression-overheat", "mechanism": "The booster pump is a single-stage volumetric machine: its two impellers trap gas against the body wall and carry it to the outlet. All of that compression is paid for in heat. Once the pressure differential across the machine exceeds the permitted maximum, the temperature rise exceeds its permitted limit and the discharge temperature climbs toward its ceiling; the machine overheats, and that heat in turn becomes a cause of impeller drag.", "mitigation": "Keep the machine inside the pressure differential its model allows, and arrange the electrical side so that the booster drops out by itself the moment the backing pump stops.", "occurrence": "unknown", "onsetConditions": "It sets in when the machine is run past the pressure differential its model allows: the booster brought into service too early in the pump-down, a discharge pressure sitting too high, or an exhaust line that restricts the flow. The manual points back to the cut-in pressure setting and to the backing pump, both of which belong to the operator's own installation.", "rootCause": "misapplication", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Detected as measured vibration on the machine itself and on the attached pipelines.", "id": "fm:booster-vibration-insufficient-support", "mechanism": "The machine is precision balanced; it is the foundation that makes it vibrate. Mounted on an insufficiently rigid base or poorly secured to the floor, it vibrates, and the vacuum pipelines attached to it can vibrate excessively if they are not properly supported. The manual is explicit: booster pump vibration is usually the result of insufficient support.", "mitigation": "Mount the machine on a sufficiently rigid base and secure it to the floor, add support wherever it is lacking to eliminate the vibration, and properly support the attached pipelines.", "occurrence": "recurrent", "onsetConditions": "Onset appears as soon as the machine runs, whenever the base is not rigid enough, the machine is not secured to the floor, or the pipelines are not supported.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Detected by measuring axial play with a dial indicator - after releasing coupling or belt tension - together with knocking, vibration, and abnormal noise during operation.", "id": "fm:booster-worn-bearings-and-gears", "mechanism": "Wear in the bearings and gears shows up as growing axial shaft play, gear backlash, vibration, knocking, and abnormal noise. Once total axial play measured with a dial indicator exceeds 0.12 mm (0.005 inch), the machine must be rebuilt.", "mitigation": "Replace worn bearings and gears; if axial play is excessive, have the machine rebuilt.", "occurrence": "systematic", "onsetConditions": "Onset builds up with running hours; the maintenance schedule requires a bearing condition check every six months and a general overhaul every six years.", "rootCause": "wear", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Watch the motor fan while applying power for two or three seconds: the arrow marked on the motor gives the correct direction.", "id": "fm:booster-wrong-rotation-direction", "mechanism": "Get the phasing of the three-phase supply wrong and the rotors will either run backwards or sit still. Either way the booster moves no gas at all, and running backwards is taken to draw excessive power.", "mitigation": "Isolate the external power supply, correct the wiring - swapping any two phase connections is enough - then re-check the direction of rotation.", "occurrence": "unknown", "onsetConditions": "Onset shows at first power-up, or after any intervention that disconnected the electrical supply.", "rootCause": "installation", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "targets": [ "pump:edwards-607", "pump:edwards-615", "pump:edwards-622" ] }, { "detection": "Without disassembly: measure the temperature of the first stage during sputtering and compare the pressure descent time after the process to that of a healthy cycle.", "id": "fm:cryo-argon-first-stage-accumulation", "manufacturerAcknowledged": true, "mechanism": "If the first stage of the cold head drops too low during argon sputtering, the argon condenses on this first stage instead of being captured at the second stage. It is then desorbed all at once at the end of the process and greatly extends the pumpdown time of the installation.", "mitigation": "Keep the first stage temperature above the threshold during argon sputtering; use a pump designed for sputtering, whose radiation shield is partially blackened so that the first stage stays somewhat warmer.", "occurrence": "recurrent", "onsetConditions": "Sputtering under argon with a first stage that is too cold, for lack of a partially blackened radiation shield or of a sufficient thermal load.", "rootCause": "misapplication", "scope": "family", "severity": "degraded", "sources": [ { "page": "21", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "21", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Poll the module for its heater fault message: it never announces it on its own, it must be polled. Then compare the warm-up target actually followed during the cycle to the normal target.", "id": "fm:cryo-board-regen-heater-fault-warmup-derating", "manufacturerAcknowledged": true, "mechanism": "The module monitors the regeneration heaters. When it detects a heater problem, it does not interrupt the cycle: it lowers the warm-up target to 285 K on its own. The pump then runs a regeneration at a reduced temperature, where the most strongly bound species are not all driven off, and the cycle ends without declaring a failure.", "mitigation": "The document attests no corrective action. It only indicates that the module does not stop the cycle and continues heating toward a lowered target, and that the fault can only be read by polling the module.", "notes": "Loss of purge gas lowers the target to the same point; the two causes are therefore not distinguished by temperature, but by which fault mask is polled.", "occurrence": "unknown", "onsetConditions": "During the warm-up phase of a full regeneration.", "rootCause": "unknown", "scope": "family", "severity": "degraded", "sources": [ { "page": "101", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "101", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Without disassembly: inspect the tubes for small dents and the base plate's mounting surface for scratches, upon receipt and before any mounting.", "id": "fm:cryo-cold-head-tube-mechanical-damage", "manufacturerAcknowledged": true, "mechanism": "The cold head tubes have very thin walls to limit thermal conduction to the cold end. An impact during handling or an excessive mass fixed to the cold surface dents or bends them, which deforms the bore in which the displacer slides and damages the cold head.", "mitigation": "Handle the cold head separately from the compressor and with extreme care, do not dent or bend the tubes, do not exceed the maximum allowable load on the heat exchangers, and notify the manufacturer as soon as a scratch or dent is observed.", "occurrence": "isolated", "onsetConditions": "During handling, and unpacking, or after mounting a heavy component on the cold surface beyond the maximum permissible load.", "rootCause": "installation", "scope": "family", "severity": "destructive", "sources": [ { "page": "10", "source": "src:cryo-cryomech-al125-gm-cryogenic-refrigerator-coldhead-compressor" }, { "page": "10", "source": "src:cryo-cryomech-al125-gm-cryogenic-refrigerator-coldhead-compressor" }, { "page": "21", "source": "src:cryo-cryomech-al125-gm-cryogenic-refrigerator-coldhead-compressor" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Without disassembly: monitor the second-stage temperature at the exact moment the valve opens. The optimal setting should produce only a very slight temperature rise followed by a rapid recovery; if the gas volume from the chamber does not raise the second stage past the limit, the crossover pressure is correct. The Cryo-Torr manual has you find this point by increasing the roughing pressure in small increments until the temperature rise is seen, then backing it off slightly.", "id": "fm:cryo-crossover-overload", "manufacturerAcknowledged": true, "mechanism": "The crossover value is the maximum quantity of gas the chamber can send at once without pushing the second stage past its operating temperature. At the switch from roughing to high-vacuum pumping, the pulse of gas and water vapor in the chamber is condensed at once on the cold arrays: if the crossover pressure exceeds the model's permissible value relative to the chamber volume, the deposited energy heats the arrays beyond the slight rise followed by rapid recovery that characterizes a correct setting, and the pump releases the gas it had already pumped.", "mitigation": "Do not load the pump beyond its crossover value: recalculate the permissible crossover pressure as the ratio of the model's crossover value to the chamber volume, and rough the chamber down further before opening the valve. Then refine by increasing the roughing pressure in steps of 15 to 20% until the temperature rise is seen, and backing it off by 10%. After a prolonged overload, restart the pump following the commissioning procedure.", "notes": "Family scope justified by three manufacturers (CTI, Leybold, SHI/Sumitomo) and three product lines (Cryo-Torr, COOLVAC, Marathon). The mechanism is not a pump failure but an operating setting: the consequence of exceeding it is described as the converse of the signature of a correct setting, without extrapolating beyond what the manuals give.", "occurrence": "recurrent", "onsetConditions": "When the isolation valve is opened while the chamber has not been roughed down to the crossover pressure, computed by dividing the model's crossover value by the chamber volume; or a chamber volume increased without recalculating the allowable crossover pressure.", "rootCause": "misapplication", "scope": "family", "severity": "degraded", "sources": [ { "page": "40", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "40", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "41", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "20", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "37", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Record the chamber base pressure and the cryopump temperature together, and keep a log of the cooldown time to 20 K, the roughing time, the time to reach base pressure, and the interval between regenerations: it is the drift of these values that signals approaching saturation. Second measurement, independent of the temperature sensor: at constant process gas flow, a doubling of the working pressure corresponds to a pumping speed halved. Caution: the CTI manufacturer's manuals do not agree on the thermal sign of this troubleshooting line: the Cryo-Torr and On-Board manuals classify capacity reached under 'high base pressure AND temperature above 20 K', the On-Board IS manuals under 'high base pressure AND temperature below 20 K'. In both cases an air-to-vacuum leak gives the same signature and must be eliminated by a leak check performed with the pump isolated, stopped, and returned to ambient temperature, since a check performed on a cold pump masks leaks -- the cryopump pumps the detection helium.", "id": "fm:cryo-cryopanel-saturation", "manufacturerAcknowledged": true, "mechanism": "The cryopump is a capture pump: it retains gases instead of exhausting them, and its capacity is finite. The second-stage array condenses nitrogen, oxygen, and argon, while the activated charcoal attached to this array adsorbs the non-condensables -- hydrogen, helium, neon. When this capacity is reached, two effects combine: the non-condensables are no longer retained and their partial pressure rises inside the pump, and the thickening layer of condensed gas increases thermal resistance and radiation absorption, so that the temperature of the pumping surfaces rises and the pumping speed drops. The chamber base pressure then rises even though the cold machine itself is operating normally.", "mitigation": "Regenerate the cryopump per the model's manual procedure: close the isolation valve, stop the pump, immediately introduce dry, hot purge gas through the purge fitting, then rough-pump and check the pressure rise before returning to cooldown. The pump is declared ready when the second-stage array is back down to 20 K or below. On On-Board IS models, apply the procedure in operation guide 8040647. Regenerate as soon as the second-stage temperature exceeds the indicated value for more than five minutes, or as soon as the ultimate vacuum degrades. Regeneration removes the frozen and trapped gases and restores the pump's full rated capacity: if it does not, the cause is not this failure mode but degradation of the charcoal.", "notes": "Saturation is the normal consumption of a finite capacity; what turns it into a failure is the absence of regeneration when it falls due. That is what separates it from charcoal degradation, where the capacity is lost and does not come back with regeneration. Family scope justified by three manufacturers (CTI, Leybold, SHI/Sumitomo) and five ranges (Cryo-Torr, On-Board including GLE and 300 mm PVD, On-Board IS, COOLVAC, Marathon).", "occurrence": "systematic", "onsetConditions": "Prolonged operation without regeneration, the faster the higher the process gas flow and the more the process brings in hydrogen, helium, or neon. The interval depends on the application: many installations run for two weeks or more before regeneration becomes necessary, and the Cryo-Torr manual gives the interval as the ratio of the pump's capacity for the pumped species to the flow rate.", "rootCause": "maintenance_omission", "scope": "family", "severity": "degraded", "sources": [ { "page": "37", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "55", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "20", "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" }, { "page": "24", "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" }, { "page": "67", "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" }, { "page": "67", "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" }, { "page": "67", "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" }, { "page": "29", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "41", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "45", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "49", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "50", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "18", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" }, { "page": "38", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" }, { "page": "33", "source": "src:cryo-cti-on-board-gle-cryopump-8040564-revaa" }, { "page": "110", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "111", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "111", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "22", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "4", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "66", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "66", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ], "timeToOnset": "Computable from the manual: duration in hours = 16.6 x the pump's capacity for the species (standard liters) / flow rate (scc/min); the example given is 474 hours for a continuous argon flow of 70 scc/min on a Cryo-Torr 10F." }, { "detection": "Without disassembly: compare the second-stage temperature reading with the pressure obtained. A correct temperature combined with an excessively high pressure signals loss of thermal contact, whereas a loss of refrigeration would raise both, and a thermal short-circuit would raise the sensor reading. First rule out the two other causes giving the same signature: read the helium return gauge -- a value within the normal range rules out a low charge -- and look for a new source of thermal radiation. The CTI troubleshooting table ranks the causes in decreasing order of probability, and places the loose array after saturation, once regeneration has been performed with no effect.", "id": "fm:cryo-cryopanel-thermal-contact-loss", "manufacturerAcknowledged": true, "mechanism": "Cold is transferred from the cold-head cooling station to the cryopanel only through a tight joint, often via a crushed indium seal. When the mounting screws loosen, when the indium seal is damaged by overheating during regeneration or bakeout, or is missing, or when the seating surface of the copper heat exchanger is scratched or dented, the thermal resistance of this interface increases: conduction no longer carries away the heat received and the panel stays hotter than the station. Because the sensor is mounted on the station and not on the panel, the temperature reading stays correct even though the pumping surface is not, and the pressure no longer drops.", "mitigation": "Warm the cryopump to ambient temperature, then retighten the arrays or cryopanels onto their cooling stations -- the CTI manuals specify 15 to 20 inch-pounds. Check for damaged or missing indium seals and replace them if necessary. Inspect the seating surfaces of the copper heat exchanger before any assembly, since scratches and dents prevent good thermal contact.", "notes": "Family scope justified by four manufacturers (CTI, SHI/Sumitomo, Leybold, Cryomech) and four product lines (Cryo-Torr, On-Board, Marathon, COOLVAC). The documents do not separate a loosened mounting from a damaged indium gasket: the Marathon manual prescribes both actions on the same line ('Tighten the cryopanels to the heat stations. Check for damaged or missing indium gaskets.', p. 67). No document attributes a cause to the loosening itself: they give only the retightening torque.", "occurrence": "recurrent", "onsetConditions": "After reassembly of the arrays or of the cryopanels, after a large number of ambient-to-cold thermal cycles (repeated regenerations), or after a regeneration or a bakeout carried beyond the allowable temperature of the pumping surfaces.", "rootCause": "maintenance_omission", "scope": "family", "severity": "degraded", "sources": [ { "page": "34", "source": "src:cryo-cryomech-al125-gm-cryogenic-refrigerator-coldhead-compressor" }, { "page": "56", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "56", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "49", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "50", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "50", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "34", "source": "src:cryo-cti-on-board-gle-cryopump-8040564-revaa" }, { "page": "26", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "67", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "67", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Without disassembly: read the machine's hour meter and compare the refrigeration capacity and the cooldown time to the original readings, while listening to the cold head's sound -- running erratically, too loud, or too quiet. Disassembly confirms the diagnosis via a streaming pattern of black particles on the displacer.", "id": "fm:cryo-displacer-and-valve-wear", "manufacturerAcknowledged": true, "mechanism": "The seal segments of the displacer and the distribution valve of the Gifford-McMahon cold head wear with the hours of operation. Gas leaks between the expansion volumes instead of doing work, the refrigeration capacity degrades slowly, and the mechanism becomes noisy or irregular.", "mitigation": "Exchange or clean the displacer; preventively replace the regenerator displacer every 9,000 hours of operation. Apply the disassembly and repair procedures from the cold head manual.", "occurrence": "systematic", "onsetConditions": "Normal wear from continuous operation; both manufacturers set a preventive replacement, 9,000 hours for the regenerator displacer with one, 13,000 hours for the valve and displacer seals with the other.", "rootCause": "wear", "scope": "family", "severity": "degraded", "sources": [ { "page": "25", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "27", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "27", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "19", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "65", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ], "timeToOnset": "PREVENTIVE replacement intervals set by the manufacturers, not measured onset times: 9,000 operating hours for the regenerator displacer, (Leybold), and 13,000 hours, i.e. 18 months, for the valve and displacer seals, (Sumitomo)." }, { "detection": "There is no way to visually inspect the inside of the cold head: diagnosis is done by ear and from the temperature curve. If the cold head runs quietly at startup and then begins to click once cold, contaminated helium is the most probable cause; monitor the second-stage temperature over several hours in parallel to spot a freeze-thaw oscillation. A full or fast regeneration does not make the noise disappear -- it returns within one to four weeks: this recurrence after regeneration is the confirming check.", "id": "fm:cryo-helium-charge-contamination", "manufacturerAcknowledged": true, "mechanism": "All gases other than helium present in the closed-circuit charge freeze in the cold head, since their freezing temperature is much higher than that of helium. The ice partially blocks the regenerator and the gas passage: the torque needed to drive the displacer increases, the drive becomes sluggish or intermittent -- the ratcheting noise --, a freeze-thaw cycle sets in, and the motor can stall or the drive can seize. The impurities come from helium of insufficient purity, from depressurizing the cold head below 30 psig during a service operation, from repeated recharges performed without locating the leak, or from impurities released after long periods of service.", "mitigation": "Apply the helium-circuit decontamination procedure: run the cold machine for one to three hours to freeze the contaminants there, disconnect the supply line first and then the return line, isolate the cold head on a maintenance manifold and warm it to 300 K, then alternate refilling to the static charge pressure and venting, never going below 30 psig, with five purges per cycle and five motor cycles, using helium of 99.999% purity and a charge line that is itself purged. Intervene as soon as ratcheting appears, to limit the mechanical load on the drive mechanism, and locate and repair the leak instead of recharging repeatedly.", "notes": "Scope raised to family on a measurement of the merged mode's sources: the same mechanism is attested by four manufacturers — CTI (Cryo-Torr and On-Board), SHI/Sumitomo (Marathon CP-20), Cryomech (AL125) and Leybold (COOLVAC) — across four distinct product lines. The root-cause category retained is that of the Cryo-Torr manual: contamination comes from a service action, impure gas or excessive depressurization, and not from the vacuum process; one of the manuals also names impurities released after long periods of service. The documents explicitly warn that a regeneration, fast or full, does not remove gaseous contamination from the helium circuit.", "occurrence": "recurrent", "onsetConditions": "After recharging with helium of lower purity than required, after repeated recharges without repairing the leak, after opening the circuit to atmosphere, after a service action that has dropped the cold-head pressure too low, or after long periods of operation. The noise does not appear at warm start-up but only once the pump has cooled down.", "rootCause": "maintenance_omission", "scope": "family", "severity": "stop", "sources": [ { "page": "18", "source": "src:cryo-cryomech-al125-gm-cryogenic-refrigerator-coldhead-compressor" }, { "page": "59", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "60", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "60", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "53", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "53", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "53", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "54", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "38", "source": "src:cryo-cti-on-board-gle-cryopump-8040564-revaa" }, { "page": "27", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "47", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "65", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "65", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "With the machine stopped and at ambient temperature, compare both helium pressure gauges to the value recorded at receipt. A leak at the flat gasket only reveals itself when the gas line is connected: check the fittings with a leak detector or soap solution.", "id": "fm:cryo-helium-charge-loss-coupling-leak", "manufacturerAcknowledged": true, "mechanism": "The flat gasket seated in the face of the Aeroquip male coupling seals the connection; when worn, missing, dirty, or stressed by the weight of the line or a sharp bend near the fitting, it lets helium leak out and the closed-circuit charge slowly drops.", "mitigation": "Check the presence and condition of the flat gasket on the male half of each fitting, clean the male and female sealing surfaces, replace the gasket if damaged or missing, keep fittings aligned during tightening. Tightening is often sufficient on a threaded joint; otherwise replace the parts. After any pressure loss, clean the components before reassembly.", "occurrence": "recurrent", "onsetConditions": "After reconnecting a coupling, displacement of the gas line, too sharp a bend near the connection, or an improperly performed coupling removal that destroys the sealing O-ring.", "rootCause": "installation", "scope": "family", "severity": "degraded", "sources": [ { "page": "21", "source": "src:cryo-cryomech-al125-gm-cryogenic-refrigerator-coldhead-compressor" }, { "page": "38", "source": "src:cryo-cryomech-al125-gm-cryogenic-refrigerator-coldhead-compressor" }, { "page": "28", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "58", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Without disassembly: look at and touch the outer shroud, which sweats or becomes abnormally cold when the vacuum insulation has been lost, then check the vacuum of the pump enclosure and search for the leak.", "id": "fm:cryo-insulating-vacuum-loss", "manufacturerAcknowledged": true, "mechanism": "A leak in the pump's vacuum enclosure, often originating from a scratch or dent on the sealing surface of the cold-head plate, lets ambient air in. The gas restores thermal conduction between the ambient and the cold surfaces: the thermal load rises sharply, cooldown no longer occurs, and moisture from the air condenses on the outside of the body.", "mitigation": "Check the operation and tightness of the vacuum system, detect the leak, and seal it. Inspect the sealing surface of the plate before mounting and report any scratch or dent to the manufacturer.", "occurrence": "recurrent", "onsetConditions": "After mounting the cold head on a scratched or marked seating surface, after flange rework, or through the gradual onset of a small vacuum-vessel leak.", "rootCause": "installation", "scope": "family", "severity": "stop", "sources": [ { "page": "34", "source": "src:cryo-cryomech-al125-gm-cryogenic-refrigerator-coldhead-compressor" }, { "page": "26", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "64", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "65", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Without disassembly: note that the ultimate vacuum remains too high after a complete regeneration even though the pumping-surface temperature is normal. On opening, oil deposits are visible on the panels.", "id": "fm:cryo-oil-backstreaming-contamination", "manufacturerAcknowledged": true, "mechanism": "Oil vapors from the roughing pump migrate back up the roughing line and deposit onto the cryopanels and the activated charcoal. The oil film does not desorb during regeneration: it coats the pumping surfaces and destroys the charcoal's adsorption capacity, so that the ultimate vacuum remains degraded.", "mitigation": "Use a dry roughing pump, or fit an in-line adsorbent trap and regenerate or replace its adsorbent regularly. Clean the pump and the cryopanels with a vacuum-grade solvent; replace the cryopanels when the activated charcoal is contaminated by oil vapors.", "occurrence": "recurrent", "onsetConditions": "Roughing by an oil-sealed pump without an upstream adsorbent trap; or roughing continued lower than necessary, the Cryo-Torr document instructing that roughing be stopped at the highest possible pressure to prevent backstreaming.", "rootCause": "process_contamination", "scope": "family", "severity": "degraded", "sources": [ { "page": "27", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "36", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "49", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Two signs, named in the same terms by four manuals from three manufacturers, both detectable without any disassembly at the very start of the regeneration cycle: crackling and popping sounds comparable to electrical arcing within the first few minutes of the cycle, and a smell in the vented gas -- like fresh air after a thunderstorm, or pungent like an arc-welding operation -- which identifies the chemical species released, something no temperature or pressure measurement does.", "id": "fm:cryo-oxygen-ozone-charcoal-reaction", "manufacturerAcknowledged": true, "mechanism": "On warming during regeneration, ozone reverts to the gas phase and can react violently with the activated charcoal lining the pumping surfaces. Explosive conditions may then exist in the pump, particularly during its warm-up.", "mitigation": "Immediately reduce the oxygen flow rate or mixture to the lowest level the process allows; shorten the time between regenerations -- daily regeneration may be necessary, the required frequency depending on flow and process conditions; purge with inert gas during regeneration at a sufficient flow rate; make sure no ignition source is operating on the cryopump side of the high-vacuum valve during warm-up or venting to atmosphere; connect an exhaust line to the safety relief valve adapter before pumping toxic, corrosive, or flammable gases; do not let a standard pump, whose surfaces are covered with activated charcoal, pump large quantities of pure oxygen, and keep the total pressure of a hydrogen-oxygen mixture below its ignition pressure. Contact the manufacturer.", "notes": "Two ancillary prescriptions from the documents are kept here: do not use fast regeneration after pumping large quantities of oxygen if the roughing-pump system is not compatible with that service, and remember that the internal surfaces can remain loaded with toxic or corrosive process materials even after a full regeneration. No warning citation from the four proposals was set aside.", "occurrence": "recurrent", "onsetConditions": "Oxygen processes and ionizing processes — sputtering, etching, glow discharge —, or cryopumping of gases whose oxygen concentration exceeds that of normal air; a change in process can increase the amount of ozone present. The risk peaks during the warming of the cryopump, and the signs appear within the first few minutes of the regeneration.", "rootCause": "process_contamination", "scope": "family", "severity": "safety", "sources": [ { "page": "16", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "16", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "16", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "16", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "17", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "13", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "13", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "13", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "13", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "24", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "24", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "24", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "24", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "24", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "10", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "20", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "35", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "35", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Without disassembly: track the first-stage temperature, which rises before the second stage's, and the lengthening of the pressure descent time. Upon opening, the deposit is visible on the baffle.", "id": "fm:cryo-process-dust-shield-loading", "manufacturerAcknowledged": true, "mechanism": "Dust produced by the process deposits on the baffle and the radiation shield. It increases the absorption coefficient of the outer surfaces, normally mirror-polished, which heats the shield, and, once it reaches the activated charcoal, it reduces its adsorption capacity for hydrogen, helium and neon.", "mitigation": "Clean the pump regularly, the only possible countermeasure; replace the activated-charcoal panels if they are contaminated. Also protect the cold head from ionizing radiation, as its plastic components cannot withstand a high dose.", "notes": "ASSUMED SCOPE DEBT (CRYO-08 lot, judge J3): family-scope mode attested by a single manufacturer and a single document (Leybold COOLVAC 800/1500/3000, GA 12.123/3.02 p. 21). The campaign's condition — two manufacturers or three ranges — is not met, but no Leybold model and no COOLVAC range exists in the reference data, so no finer fallback scope is available. To be re-arbitrated as soon as a second source on process dust loading enters the corpus. Also remove from mitigation the sentence about ionizing radiation, which concerns the X-radiation from electron-beam welding, not dust.", "occurrence": "recurrent", "onsetConditions": "Use in welding installations or any process producing large quantities of dust, in addition to thermal radiation.", "rootCause": "process_contamination", "scope": "family", "severity": "degraded", "sources": [ { "page": "21", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "21", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "21", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Read on the test display the number of cycles already completed, the last measured value, and the programmed value: the module closes the roughing valve, waits 15 seconds to stabilize, then takes a second reading 30 seconds later to calculate the rate of rise in microns per minute. Error code E indicates that the cycle limit has been reached.", "id": "fm:cryo-regen-rate-of-rise-failure", "manufacturerAcknowledged": true, "mechanism": "After roughing down to the base pressure, the module closes the roughing valve and measures the pressure rise. An air-to-vacuum leak or residual outgassing -- unsublimated ice remaining in the pump -- makes the pressure rise faster than the programmed value: the test fails, the pump is roughed again and the test repeated, until the regeneration aborts when the cycle limit is reached.", "mitigation": "The module reroughs the pump and repeats the test after each failure; the tolerated rate of rise and the number of cycles before abort can be reprogrammed from the keypad.", "notes": "Drawn from the On-Board module programming manual, which names no pump model. The factory rate-of-rise value is ten microns per minute, for a base pressure of fifty microns.", "occurrence": "unknown", "onsetConditions": "At the end of roughing, once the base pressure has been reached and the rough valve has closed.", "rootCause": "unknown", "scope": "family", "severity": "stop", "sources": [ { "page": "22", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "39", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "39", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "96", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "40", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Rough the cryopump isolated from the chamber: if the vacuum level remains poor, check the relief valve seat first before looking for a leak elsewhere. Inspect the valve's filter screen whenever the first stage is removed.", "id": "fm:cryo-relief-valve-seat-fouling", "manufacturerAcknowledged": true, "mechanism": "Dirt generated by the process, driven toward the outlet at every regeneration, deposits onto the sealing seat and the O-rings of the cryopump's relief valve. The valve no longer reseats fully and lets air in: the pump enclosure leaks continuously to atmosphere, which prevents reaching an adequate vacuum level both during roughing and in normal operation.", "mitigation": "Disassemble the valve, clean the seat and the O-rings with solvent on a lint-free cloth, replace any damaged O-rings, and establish a cleaning schedule based on pressure rise; replace the valve if it remains leaky.", "notes": "What each manufacturer attests: SHI Sumitomo, in the Marathon CP-20 manual at page 51, is the only one to name the etiology by process dirt, the cleaning schedule based on pressure rise, and inspection of the filter screen; Leybold, at page 27, attests only the leaking valve, as the cause of an excessively high ultimate pressure, with the fix 'clean or replace', without naming dust; CTI attests the component and the reseating, without the etiology. Overlap to know: the air-to-vacuum leak failure mode of cryopumps, of model-level scope across 26 of the 34 models inherited here, already names the valve, improper reseating after regeneration, and the O-ring; what this failure mode contributes on its own is the etiology by process dirt, the cleaning schedule, and the filter screen, and nothing else. Boundary not to cross: two CTI manuals in the corpus state that dust accumulation does not affect performance, with respect to the arrays and the interior surfaces of the vacuum enclosure; this failure mode covers only the tightness of the valve and a leak to atmosphere, and can in no case be used to assert that process dust degrades performance inside the enclosure of a CTI pump.", "occurrence": "unknown", "onsetConditions": "Processes that generate dust or residues; worsens with the number of regenerations, each cycle routing all released gases through the valve.", "rootCause": "process_contamination", "scope": "family", "severity": "degraded", "sources": [ { "page": "27", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "51", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" }, { "page": "51", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Read the pressure inside the cryopump chamber, high-vacuum valve closed, just before starting the compressor, and monitor it during cooldown: if it rises instead of staying low, stop the pump and return it to roughing vacuum. Time the cooldown and compare it to the duration quoted for the model.", "id": "fm:cryo-startup-residual-gas-conduction", "manufacturerAcknowledged": true, "mechanism": "The cryopump is started before its chamber has been roughed down to the prescribed starting pressure. The residual gas remaining in the chamber conducts heat between the warm wall and the cold surfaces: the refrigeration capacity is spent heating this gas instead of cooling the cryopanels, the cooldown is considerably prolonged, and the pump may never reach its operating temperature.", "mitigation": "Properly rough down both the pump AND the chamber before starting, to the prescribed starting pressure; if the pressure rises during cooldown, stop the pump and resume the evacuation phase before restarting it.", "notes": "Mechanism: thermal conduction by the residual gas is the writer's own interpolation; none of the documents states it, Leybold attests only the effect — prolonged cooldown, operating temperature possibly never reached — and Sumitomo attests only a monitoring procedure at 0.1 torr. Scope: the numeric starting pressures are specific to the COOLVAC 800, 1500 and 3000, which are absent from the catalogue, and do not hold as a threshold for the 34 inherited models; CTI prescribes for its Cryo-Torr pumps 'an initial starting pressure, usually between 50 and 100 microns' on page 47 of their installation manual, a citation to be added: it would carry the mode to three manufacturers and anchor the family scope on models actually in the database.", "occurrence": "unknown", "onsetConditions": "At startup and at the cooldown following a regeneration, when the roughing of the isolated pump is cut short; the German manufacturer requires a starting pressure that is the lower the more one pumps helium or hydrogen, or the more one aims at ultra-high vacuum.", "rootCause": "misapplication", "scope": "family", "severity": "degraded", "sources": [ { "page": "47", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "17", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "26", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "41", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Log the time of the power loss, then on power restoration jointly read the second-stage temperature and the pressure inside the pump, without any disassembly. An outage of less than ten minutes requires no action per CTI. Beyond that, the pump is judged against two thresholds: temperature compared to the power-fail-recovery set-point -- 25K by default on the On-Board IS, which decides on its own whether to cool back down or purge -- and pressure compared to the starting pressure, 8x10-2 mbar at Leybold, above which the pump will not cool down by itself.", "id": "fm:cryo-stored-gas-release-on-power-loss", "manufacturerAcknowledged": true, "mechanism": "The cryopump stores gases instead of exhausting them: everything it has pumped since the last regeneration is held only by the cold. As soon as power is lost, the compressor and the cold head stop and the production of cold ceases; the pump then survives only on its thermal inertia (coast time). Once this coast time has elapsed, the arrays warm up enough to desorb and evaporate their load -- helium and hydrogen leave the charcoal first, which shortens the coast time accordingly -- and the internal pressure rises above the starting pressure, with the volume released potentially exceeding atmospheric pressure inside the pump housing or the chamber. The pump then no longer cools back down on its own and must be regenerated before returning to service. The three manufacturers measure the same sequence with different reference points: ten minutes of outage at CTI on the Cryo-Torr pumps, two minutes of coast time on the ion-implant On-Board IS units, and a pressure threshold of 8x10-2 mbar at Leybold.", "mitigation": "Close the gate valve and all valves during the outage to isolate the pump. On power restoration, if the temperature exceeds the set-point or the pressure exceeds the starting pressure, warm up and regenerate the pump, then rough it back down before cooling it again. Never plug or modify the safety relief valve, which must remain connected to an exhaust line sized for the released load.", "notes": "Mechanism attested by three manufacturers (CTI, Leybold, SHI/Sumitomo) across four product lines (Cryo-Torr, On-Board IS, COOLVAC, Marathon): family scope is reached by measurement, not by an impression of generality. The IntelliPurge device, powered by a limited-energy uninterruptible power supply, equips only cryopumps designed for ion-implant applications, and is therefore not a family attribute: it is a manufacturer countermeasure to the mechanism, not the mechanism itself. The COOLVAC 800/1500/3000 lines have no model in the catalogue; family scope is the only support that preserves their attestation.", "occurrence": "recurrent", "onsetConditions": "Electrical power loss or compressor shutdown on a running, cold cryopump; the hold time depends on the operating temperature and on the nature of the gases pumped. The same sequence is produced by a system vacuum loss — a venting with the isolation valve partially open — or by operator error.", "rootCause": "environment", "scope": "family", "severity": "safety", "sources": [ { "page": "43", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "45", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "46", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "37", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "39", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "39", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "78", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "10", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "24", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "42", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Without disassembling the pump: apply the specified excitation current to the diode at room temperature and measure the voltage across its leads, or cross-check the reading against a second thermometer.", "id": "fm:cryo-temperature-sensor-misreading", "manufacturerAcknowledged": true, "mechanism": "The silicon diode that measures the second-stage temperature drifts, fails, is poorly mounted on the cooling station, or has its signal distorted by X-ray radiation or a magnetic field. The displayed temperature then stops representing the pump's actual state, causing a cold-head failure that does not exist to be diagnosed, or masking one that does.", "mitigation": "Replace the diode if its voltage falls outside the specified range at room temperature; cross-check the readings against a second thermometer and verify the diode's calibration. Take care with the sensor's mounting on the heat exchanger, the wiring connections, and their thermal anchoring, on which many reports of poor performance turn out to depend.", "notes": "Symptomless mode. The only observable proposed in pass 1 — the diode voltage outside the range specified at room temperature — was rejected at the mechanical check (R11) because its French wording could not be found again in the English citation of the Marathon CP-20 manual; the citation itself is kept as evidence and the check remains described under detection. No symptom is reconstructed, and this mode is not merged with an outright failed diode, which announces itself by a code, whereas this one returns a plausible and wrong value.", "occurrence": "recurrent", "onsetConditions": "Poorly made installation of the sensor or of its wiring, or an installation exposed to ionizing radiation or to a magnetic field.", "rootCause": "installation", "scope": "family", "severity": "nuisance", "sources": [ { "page": "35", "source": "src:cryo-cryomech-al125-gm-cryogenic-refrigerator-coldhead-compressor" }, { "page": "17", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "14", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "26", "source": "src:cryo-leybold-coolvac-800-1500-3000-refrigerator-cryopumps-ga12-123-3-02" }, { "page": "52", "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "targets": [ "fam:cryo-gm" ] }, { "detection": "Recognize the signature: high base pressure WITH a pump below 20 K, and therefore supposed to be pumping at its rated capacity. Check the relief valve for proper seating, then isolate the cryopump by closing the high-vacuum valve and perform a leak search on the chamber; if nothing is found, the leak is downstream of the valve, on the pump side. The leak check under the high-vacuum valve must be done with the pump STOPPED and returned to ambient temperature: while running, the cryopump absorbs the search helium and masks the leak.", "id": "fm:cryo-torr-air-to-vacuum-leak", "manufacturerAcknowledged": true, "mechanism": "An air-to-vacuum leak in the chamber, in the high-vacuum valve, or in the cryopump itself injects a permanent flow of air into the process vacuum. The culprit named first by both manuals is the vessel's relief valve, which opens at around 2-3 psig to vent gases during regeneration and does not reseat properly afterward, its O-ring being the sensitive part. The arrays stay cold and the pump works at its rated capacity, but the incoming flow imposes a high base pressure that the pump cannot overcome.", "mitigation": "Check the cryopump's relief valve for proper seating, then check the tightness of the cryopump, the vacuum chamber, and the high-vacuum valve, with the pump stopped and at ambient temperature. On the On-Board 8F pump for 300 mm PVD, keep the relief-valve seal's nitrogen purge fed, set between 40 and 80 psi.", "notes": "Merge of two readings of the same troubleshooting-table line, in the Cryo-Torr pump manual and in the On-Board pump manual: the same numeric signature at 20 K, the same first check at the relief valve, the same warning about leak-checking performed with the pump cold. The identifier retained is the one whose name covers the real breadth of the mechanism — the air-to-vacuum leak — and not the one naming only the relief valve, which is merely its most frequent case.", "occurrence": "recurrent", "onsetConditions": "After regeneration cycles, the relief valve having been actuated and its seal cooled; or after work on the chamber, on the high-vacuum valve or on the pump. The leak then reads out in the cold regime.", "rootCause": "wear", "scope": "model", "severity": "degraded", "sources": [ { "page": "55", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "56", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "49", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "49", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "50", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "19", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" }, { "page": "20", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" } ], "targets": [ "pump:cti-cryo-torr-10", "pump:cti-cryo-torr-10f", "pump:cti-cryo-torr-20hp", "pump:cti-cryo-torr-250f", "pump:cti-cryo-torr-250fh", "pump:cti-cryo-torr-400", "pump:cti-cryo-torr-4f", "pump:cti-cryo-torr-500", "pump:cti-cryo-torr-8", "pump:cti-cryo-torr-8f", "pump:cti-on-board-10", "pump:cti-on-board-10f", "pump:cti-on-board-250f", "pump:cti-on-board-250fh", "pump:cti-on-board-4", "pump:cti-on-board-400-high-capacity", "pump:cti-on-board-400-standard-capacity", "pump:cti-on-board-4f", "pump:cti-on-board-500", "pump:cti-on-board-6", "pump:cti-on-board-8", "pump:cti-on-board-8f", "pump:cti-on-board-8f-300mm-pvd", "pump:cti-on-board-enhanced-8f" ] }, { "detection": "Read the temperature controller display: a fault code instead of a numeric value points to the diode itself rather than the supply chain; the manufacturer associates one reading with an open diode and the other with a shorted diode. A continuity check at the cryopump connector pins confirms this without disassembly.", "id": "fm:cryo-torr-diode-sensor-failure", "manufacturerAcknowledged": true, "mechanism": "The silicon diode housed in the cryopump is powered by a constant current source of ten microamperes. A multimeter check that subjects it to more than five milliamperes forward current or more than 200 volts reverse bias permanently damages it: the junction ends up open or shorted. The temperature indicator then no longer displays a temperature but a fault code, and the operator loses the only indication of the pump's thermal state, including the thresholds that drive the relays.", "mitigation": "Check the diode circuit, replace the diode and, if necessary, replace the cryopump. To avoid destroying the diode, never check the diode or its connections with a meter that could exceed five milliamperes forward current or 200 volts reverse bias.", "notes": "The source document gives two distinct sets of codes for the same pair of states, one in the operating section and one in the troubleshooting table; both are reproduced as given, without arbitration between them.", "occurrence": "unknown", "onsetConditions": "During a check of the diode or its connections with an unsuitable measuring device; the damage is immediate and permanent.", "rootCause": "unknown", "scope": "model", "severity": "degraded", "sources": [ { "page": "12", "source": "src:cryo-cti-cryo-torr-temperature-indicator-instructions" }, { "page": "12", "source": "src:cryo-cti-cryo-torr-temperature-indicator-instructions" }, { "page": "12", "source": "src:cryo-cti-cryo-torr-temperature-indicator-instructions" }, { "page": "12", "source": "src:cryo-cti-cryo-torr-temperature-indicator-instructions" }, { "page": "13", "source": "src:cryo-cti-cryo-torr-temperature-indicator-instructions" }, { "page": "13", "source": "src:cryo-cti-cryo-torr-temperature-indicator-instructions" }, { "page": "9", "source": "src:cryo-cti-cryo-torr-temperature-indicator-instructions" } ], "targets": [ "pump:cti-cryo-torr-10", "pump:cti-cryo-torr-10f", "pump:cti-cryo-torr-20hp", "pump:cti-cryo-torr-250f", "pump:cti-cryo-torr-250fh", "pump:cti-cryo-torr-400", "pump:cti-cryo-torr-4f", "pump:cti-cryo-torr-500", "pump:cti-cryo-torr-8", "pump:cti-cryo-torr-8f" ] }, { "detection": "Perform the prescribed pressure rise-rate test after regeneration: rough the cryopump to between 50 and 100 microns, close the roughing valve, and observe the rise for five minutes. It must stay under 10 microns per minute; beyond that, regeneration was not complete or a leak is present.", "id": "fm:cryo-torr-incomplete-regeneration", "manufacturerAcknowledged": true, "mechanism": "A shortened regeneration, or one carried out without dry, hot purge gas, does not fully clean the adsorbing network: residual water vapor remains in the 15 K array and partial pressures of hydrogen, neon or helium persist. On cooldown, these gases immediately reload the adsorbent and the pump does not reach the expected temperature or pressure.", "mitigation": "Repurge the cryopump, check for the absence of leaks, then resume roughing and the rise-rate test. Use regeneration assisted by dry, hot inert purge gas, which reduces residual water vapor in the 15 K array and shortens roughing time.", "occurrence": "recurrent", "onsetConditions": "Unassisted regeneration, purge interrupted before the condensing arrays have reached room temperature, or roughing started too early.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": "46", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "47", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "51", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" } ], "targets": [ "pump:cti-cryo-torr-10", "pump:cti-cryo-torr-10f", "pump:cti-cryo-torr-20hp", "pump:cti-cryo-torr-250f", "pump:cti-cryo-torr-250fh", "pump:cti-cryo-torr-400", "pump:cti-cryo-torr-4f", "pump:cti-cryo-torr-500", "pump:cti-cryo-torr-8", "pump:cti-cryo-torr-8f" ] }, { "detection": "The display reports the process temperature outside its range; on dismantling, the cooling-water channels are found loaded with deposits.", "id": "fm:dryvac-claw-canaux-eau-entartres", "mechanism": "The pump's internal cooling-water channels scale up with lime and dirt; heat transfer falls away and the machine's temperature leaves its process range. Below 70 °C (158 °F), where the cooling water normally sits, such deposits build very slowly, so early clogging betrays a difficulty in how the plant is being run.", "mitigation": "Dismantle and clean the cooling-water channels, check that the water lines are connected the right way round, and check the thermostat valve setting.", "occurrence": "recurrent", "onsetConditions": "With mineral-laden cooling water, or sooner if the machine has already been running hot.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "targets": [ "pump:leybold-dryvac-100p", "pump:leybold-dryvac-100s", "pump:leybold-dryvac-25p", "pump:leybold-dryvac-50p", "pump:leybold-dryvac-50s", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "detection": "Remove the middle section of the top cover and turn the motor shaft with an Allen key: the shaft does not turn freely.", "id": "fm:dryvac-claw-grippage-declenchement-protection", "mechanism": "The pump is jammed — process deposits set hard in the stages, or bearings gone — and the motor protection trips at start-up. It is checked by turning the motor shaft by hand from above.", "mitigation": "Have the pump repaired; on particle-generating processes, follow the shutdown procedure that clears deposits before the pump stops.", "occurrence": "recurrent", "onsetConditions": "At restart after a stop caused by a particle-generating process.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "targets": [ "pump:leybold-dryvac-100p", "pump:leybold-dryvac-100s", "pump:leybold-dryvac-25p", "pump:leybold-dryvac-50p", "pump:leybold-dryvac-50s", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "detection": "A knocking noise occurs during operation, distinct from bearing noise.", "id": "fm:dryvac-claw-liquide-cogne", "mechanism": "Condensate builds up in the pumping chamber and is struck by the claw rotors: the pump knocks. An exhaust line that runs back towards the pump instead of away from it sends the liquid straight back in.", "mitigation": "Give the exhaust line a downward slope away from the pump, or fit a condensate trap. On the DRYVAC 50S/100S and DRYVAC SET 251S/501S, the manual also calls for increasing the purge-gas supply; the DRYVAC 25P/50P/100P manual does not carry that instruction.", "occurrence": "recurrent", "onsetConditions": "On condensable processes, when the exhaust line does not fall away from the pump and no condensate trap is fitted.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "targets": [ "pump:leybold-dryvac-100p", "pump:leybold-dryvac-100s", "pump:leybold-dryvac-25p", "pump:leybold-dryvac-50p", "pump:leybold-dryvac-50s", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "detection": "A low-temperature trap is inserted between the gauge and the intake port: if the ultimate pressure is then reached, liquids are indeed evaporating inside the pump.", "id": "fm:dryvac-claw-liquides-evaporants", "mechanism": "Condensed liquids remaining in the pumping chamber evaporate: their partial pressure prevents the pump from reaching its ultimate pressure, even though the pump itself is sound.", "mitigation": "Let the pump run for half an hour without process load. On the DRYVAC 50S/100S and DRYVAC SET 251S/501S, the manual additionally calls for opening the purge-gas valve; the DRYVAC 25P/50P/100P manual carries only the half-hour idle run.", "occurrence": "recurrent", "onsetConditions": "After a condensable process, or after a shutdown without an end-of-cycle purge.", "rootCause": "process_contamination", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "targets": [ "pump:leybold-dryvac-100p", "pump:leybold-dryvac-100s", "pump:leybold-dryvac-25p", "pump:leybold-dryvac-50p", "pump:leybold-dryvac-50s", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "detection": "After shutdown, the motor fan is turned by hand: resistance indicates the pump is seized. Inlet and outlet water temperatures are also compared: while the outlet stays warmer, the particle load has not cleared.", "id": "fm:dryvac-claw-particules-refroidissement-arret", "mechanism": "On a great many processes the pump takes on particles while it cools after being stopped: process gases condense in the claw stages and lock the rotors, and the pump is then hard, sometimes impossible, to start again. Forcing that cool-down worsens the condensation and wears the machine.", "mitigation": "Avoid shutdowns and keep the pump running continuously with the inlet closed; otherwise follow the shutdown procedure that purges with inert gas and briefly restarts the motor for five seconds to clear deposits, repeating until the fan turns freely.", "occurrence": "recurrent", "onsetConditions": "On every shutdown on a particle-generating process; clean processes are not affected.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "targets": [ "pump:leybold-dryvac-100p", "pump:leybold-dryvac-25p", "pump:leybold-dryvac-50p", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "detection": "The display shows the nitrogen-pressure or flow warning; if the third- and fourth-stage flow no longer matches the selected process group, the pump automatically switches to standby.", "id": "fm:dryvac-claw-perte-gaz-de-purge", "mechanism": "The inert barrier and purge gas no longer arrives in quantity: the main valve is shut or restricted, the pressure is too low, the purge valves are restricted, the nozzles are fouled, or the purge plate was refitted askew after a process conversion. The shaft seals lose their guard against dust and aggressive gases, and a pump run any length of time without purge ends up severely damaged.", "mitigation": "Reopen and set the nitrogen supply within range, clean the purge nozzles, replace any restricted valves, correctly refit the purge plate, and shut off the process gas if the fault cannot be cleared right away.", "occurrence": "recurrent", "onsetConditions": "Under aggressive process gas, when the nitrogen line becomes restricted or the nozzles get dirty.", "rootCause": "maintenance_omission", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "targets": [ "pump:leybold-dryvac-100s", "pump:leybold-dryvac-50s", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "detection": "The display first shows a lubrication warning, then a timer counts down to shutdown; the report also logs the cumulative time spent under insufficient oil pressure.", "id": "fm:dryvac-claw-pression-huile-reducteur", "mechanism": "Oil pressure in the gearbox drops below the threshold, due to reversed rotation direction, insufficient oil level, or a failed oil pump. The gears and bearings then lose lubrication, and the pump eventually shuts down.", "mitigation": "Read the level at the filler plug, check which way the pump is turning, have the oil pump repaired, then clear the timer once the repair is done.", "occurrence": "recurrent", "onsetConditions": "Right at start-up if the rotation direction is wrong; otherwise during steady running as the oil level drops or the oil pump weakens.", "rootCause": "wear", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "targets": [ "pump:leybold-dryvac-100p", "pump:leybold-dryvac-100s", "pump:leybold-dryvac-25p", "pump:leybold-dryvac-50p", "pump:leybold-dryvac-50s", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "detection": "The pump refuses to start with the shutoff indicator lit, or the shutoff-valve alarm is displayed.", "id": "fm:dryvac-claw-vanne-arret-echappement", "mechanism": "The exhaust shutoff valve, driven by compressed air, no longer reaches its position, or its position indicator fails. The control module then refuses the start or shuts the pump down, as the closed valve no longer secures the discharge protection.", "mitigation": "Restore an adequate compressed-air supply, and repair or replace the exhaust shutoff valve and its position indicator.", "occurrence": "recurrent", "onsetConditions": "When the compressed-air supply drops, even briefly, or when the valve's position indicator degrades.", "rootCause": "wear", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "targets": [ "pump:leybold-dryvac-100s", "pump:leybold-dryvac-50s", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "detection": "The display module shows the open-circuit or short-circuit fault for the sensor, without the machine actually overheating.", "id": "fm:dryvac-dv-circuit-sonde-temperature", "mechanism": "The temperature sensor circuit on the gearbox opens or short-circuits, whether in the sensor or its connection cable. The drive loses its reading, first enters a wait state, then declares the fault and lets the motor coast to a stop.", "mitigation": "Check the sensor and its connection cable, and replace them if necessary.", "occurrence": "isolated", "onsetConditions": "During operation, when the sensor cable is broken or short-circuited.", "rootCause": "wear", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" }, { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "Noise level rises sharply; the manual calls for immediate pump shutdown for these causes.", "id": "fm:dryvac-dv-degradation-roulement-engrenage", "mechanism": "A bearing or gear deteriorates; contact between moving parts becomes audible, and the machine must be shut down without delay.", "mitigation": "Shut the pump down immediately and have it repaired by the manufacturer's service.", "occurrence": "isolated", "onsetConditions": "In steady-state operation, after prolonged wear of the bearings or the gearbox.", "rootCause": "wear", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "The pump fails to start and a fault code appears on the drive's display module.", "id": "fm:dryvac-dv-grippage-refus-demarrage", "mechanism": "The pump has seized — damaged rotors, bearings, or gears — or the lubricant is too thick when cold to let the motor turn the machine over. The drive fails to start and the display module shows a fault code.", "mitigation": "Exchange the lubricant or warm up the lubricant and pump; have the manufacturer's service open the machine if it remains seized.", "occurrence": "isolated", "onsetConditions": "At startup, particularly on a cold start or after an extended shutdown.", "rootCause": "wear", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "Abnormal heating, together with rising motor load and increasing noise; opening the pump reveals a pumping chamber fouled with deposits.", "id": "fm:dryvac-dv-jeu-rotor-contamination", "mechanism": "Process deposits, or distortion of the pump from being connected under mechanical stress, reduce the clearance between the housing and the screw rotors. Friction increases: the pump overheats, its motor load rises, and its noise level increases.", "mitigation": "Clean the pumping chamber to remove the deposits, then mount and connect the pump free of mechanical stress.", "occurrence": "recurrent", "onsetConditions": "Under fouling process gas, or after an installation that puts the intake and discharge flanges under mechanical stress.", "rootCause": "process_contamination", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" }, { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "The display module shows the temperature-limiter fault, with the instruction to check the motor load and improve cooling.", "id": "fm:dryvac-dv-limiteur-temperature-moteur", "mechanism": "Motor load or degraded cooling raises the motor-side temperature. The temperature limiter crosses its threshold, the corresponding external fault is triggered, and the drive is cut immediately.", "mitigation": "Reduce the motor load if necessary and improve the machine's cooling.", "occurrence": "recurrent", "onsetConditions": "In steady-state operation, when the gas load demanded of the motor exceeds what the installed cooling can dissipate.", "rootCause": "misapplication", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "Lubricant is found in the pumping chamber, without a visible external leak.", "id": "fm:dryvac-dv-lubrifiant-en-chambre", "mechanism": "Lubricant passes into the pumping chamber: level too high, the machine not standing level, an internal leak, or defective piston rings. The oil contaminates the pumped gas and the chamber itself.", "mitigation": "Drain down to the correct level, level the pump correctly, and have the manufacturer's service address the piston rings and internal sealing.", "occurrence": "recurrent", "onsetConditions": "After an excessive lubricant top-up, or on a machine set up off the horizontal.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "A lubricant leak is visible on the machine, or a puddle appears under the motor at the degraded seal.", "id": "fm:dryvac-dv-perte-lubrifiant", "mechanism": "Lubricant escapes the housing through a leaking drain plug, a level sight glass, the gear cover, or the seal under the motor. The level drops, and lubrication to the gears and bearings degrades.", "mitigation": "Drain the lubricant, fit a new drain plug with its gasket, refill with the correct lubricant quantity, and replace the O-ring on the gear cover.", "occurrence": "recurrent", "onsetConditions": "After refitting the plug without a new gasket, or through aging of the gear-cover seals.", "rootCause": "wear", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "The display module first flags a gear-side temperature alarm, then the fault that stops the pump; opening the pressure reducer shows the filter loaded with deposits.", "id": "fm:dryvac-dv-refroidissement-eau-encrasse", "mechanism": "Water cooling degrades — insufficient supply, scaled water lines, a clogged pressure-reducer filter — and the heat of compression is no longer carried away. The temperature measured at the gear-side flange rises, the platinum sensor triggers first an alarm and then a fault, and the drive shuts the motor down.", "mitigation": "Restore a sufficient water flow, descale the water lines, clean the pressure-reducer filter, and replace its cartridge depending on water condition.", "occurrence": "recurrent", "onsetConditions": "After several months of operation with hard, lime-laden water, or as soon as the pressure-reducer filter becomes clogged.", "rootCause": "maintenance_omission", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" }, { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "The display module shows the alarm followed by the heatsink overheat fault; the heatsink is visibly dirty, or the fan has stopped.", "id": "fm:dryvac-dv-surchauffe-dissipateur-variateur", "mechanism": "The drive electronics' cooling fan stops, its heatsink becomes dusty, or the airflow is obstructed; the electronics temperature rises to the alarm level and then to the shut-off threshold.", "mitigation": "Clean the heatsink, check the electronics' cooling fan, clear the airflow path, and cool down the surroundings.", "occurrence": "recurrent", "onsetConditions": "In a hot or dusty environment, or when the heatsink is no longer cleaned.", "rootCause": "maintenance_omission", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" }, { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "The display module shows the external fault corresponding to the pressure sensor, with the instruction to check the exhaust line.", "id": "fm:dryvac-dv-surpression-echappement", "mechanism": "The discharge line becomes restricted — a blocked line, or a shut-off device left closed — and back-pressure rises beyond what the pump can tolerate. The exhaust pressure switch crosses its threshold, the corresponding external fault is triggered, and the drive is cut immediately.", "mitigation": "Clear the exhaust line, and never block or restrict the discharge flow.", "occurrence": "recurrent", "onsetConditions": "Under a process that deposits residue in the discharge line, or if a discharge shut-off device is left closed at startup.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" }, { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "Pump-down time increases; the removed intake screen is found clogged.", "id": "fm:dryvac-dv-tamis-aspiration-colmate", "mechanism": "The factory-fitted intake screen becomes loaded with particles from the process and chokes the inlet: the pump no longer reaches its pumping speed.", "mitigation": "Clean the intake screen regularly, and fit a suitable upstream filter for dust-laden processes.", "occurrence": "recurrent", "onsetConditions": "On a dust-laden process, when no upstream filter protects the intake.", "rootCause": "process_contamination", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" }, { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "detection": "Rapid pressure rise followed by a water leak, at the moment the couplers are connected or disconnected.", "id": "fm:ebara-a-series-coupler-order-water-leak", "mechanism": "The water connections are self-sealing couplers. Connecting or disconnecting in the wrong order may cause a rapid pressure rise, leading to a water leak, traps the water between two shut-off elements ... in the isolated section.", "mitigation": "First close the supply valve and then remove the supply coupler, when connecting, insert the return coupler first.", "occurrence": "isolated", "onsetConditions": "During a maintenance operation, or a disconnection, when the supply valve was not closed first or the return coupler was not connected first.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "targets": [ "pump:ebara-a07v", "pump:ebara-a10s", "pump:ebara-a25s", "pump:ebara-a30w", "pump:ebara-a70w", "pump:ebara-esa500w", "pump:ebara-esr200wn", "pump:ebara-esr20n", "pump:ebara-esr80wn" ] }, { "detection": "An OIL LEVEL LOW alarm whose cause is the pump not being level, verified, rather than the amount of oil.", "id": "fm:ebara-a-series-tilt-oil-level-alarm", "mechanism": "The oil-level switch measures the height of the oil bath in a sump that tilts along with the machine. A pump installed out of level shifts the oil bath, the switch reads a low level, even though the amount of oil is correct.", "mitigation": "Adjust the height of the feet evenly to level the pump base.", "occurrence": "recurrent", "onsetConditions": "After an installation in which the feet were not adjusted evenly, the four feet.", "rootCause": "installation", "scope": "model", "severity": "nuisance", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "targets": [ "pump:ebara-a07v", "pump:ebara-a10s", "pump:ebara-a25s", "pump:ebara-a30w", "pump:ebara-a70w" ] }, { "detection": "While the dilution flow itself is not actually at fault.", "id": "fm:ebara-drypump-n2-valve-mode-mismatch", "mechanism": "The dilution N2 selector valve located on the side of the pump, mechanical, and the dilution mode set by the dipswitch, are two independent states. When the two diverge, the pump outputs an alarm, in zero dilution mode while the selector valve is open, or the reverse, and the purge actually delivered is not the one the monitoring assumes.", "mitigation": "Bring the dilution N2 selector valve and the dipswitch setting into agreement, close it in zero dilution mode, open the valve in dilution mode.", "occurrence": "recurrent", "onsetConditions": "While running, after a change of dilution mode at the dipswitch without the corresponding action on the dilution N2 selector valve, or the reverse.", "rootCause": "controller_mismatch", "scope": "model", "severity": "nuisance", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "targets": [ "pump:ebara-a07v", "pump:ebara-a10s", "pump:ebara-a25s", "pump:ebara-a30w", "pump:ebara-a70w", "pump:ebara-esr200wn", "pump:ebara-esr20n", "pump:ebara-esr80wn" ] }, { "detection": "The manual notes that the machine has no gas leak detector fitted, and recommends fitting one at the duct's detection port, wired to the emergency-stop input.", "id": "fm:ebara-esa200w-exhaust-joint-loosening", "mechanism": "The user-supplied line connection at the pump exhaust outlet comes out or becomes loose through long-time pump operation while maintenance is neglected. The hazardous gases compressed by the pump then leak from the pump module, into the cover, from where the ventilation carries them away.", "mitigation": "Redo the exhaust connection,, fit an approved leak detector on the duct, and wire it to the pump's emergency stop.", "occurrence": "isolated", "onsetConditions": "After prolonged operation, without maintenance of the user-side exhaust connection.", "rootCause": "maintenance_omission", "scope": "model", "severity": "safety", "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" } ], "targets": [ "pump:ebara-esa200w" ] }, { "detection": "Motor current rising until the thermal relay trips,, then stalling of the booster motor;, the document groups these three signatures under the same causes.", "id": "fm:ebara-esa300w-contact-rotors-surcharge", "mechanism": "Accumulation of by-products in the pump housings,, or substance plunge,, reduces the clearance between the non-contacting rotors, until the rotors make contact:, the resisting torque increases,, the motor current rises and the thermal relay trips;, on the booster the motor eventually stalls.", "mitigation": "Replace or overhaul the pump;, check the instrumentation before concluding.", "occurrence": "recurrent", "onsetConditions": "While running on process gas,, after prolonged exposure to deposit-forming species,, or immediately after a substance plunge.", "rootCause": "process_contamination", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "targets": [ "pump:ebara-esa300w", "pump:ebara-esa300w-h" ] }, { "detection": "Water leak, at the fittings,, detected where fitted by the optional water leak alarm,, for which the document gives loose fittings as the cause.", "id": "fm:ebara-esa300w-surpression-eau-fuite", "mechanism": "The cooling water is stopped at once after the pump stops,, while the pump remains at a very high temperature:, the trapped water expands,, pressure in the cooling water piping rises, and there is a possibility of causing a water leak.", "mitigation": "Leave the cooling water on for about one (1) hour after the pump has been stopped;, tighten the fittings.", "occurrence": "recurrent", "onsetConditions": "At shutdown, when the cooling water supply is shut off at once.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "targets": [ "pump:ebara-esa300w", "pump:ebara-esa300w-h", "pump:ebara-esr200wn", "pump:ebara-esr20n", "pump:ebara-esr80wn" ] }, { "detection": "'CONTINUOUS ALARM OCCURRED!!' message indicating that 5 alarms occurred in 10 minutes,, the display not having been checked in the meantime.", "id": "fm:ebara-esa70w-continuous-alarm-lockout", "mechanism": "The onboard electronics count successive alarms. Five alarms within ten minutes, put it into a locked state that ordinary resetting no longer clears:, the earth-leakage breaker (ELB) must be switched off and the pump restarted.", "mitigation": "Switch off the earth-leakage breaker (ELB) and restart the pump, after addressing the alarm cause.", "occurrence": "recurrent", "onsetConditions": "While running, when an unaddressed alarm cause makes the alarm recur repeatedly, and the display is not being checked.", "rootCause": "design", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" } ], "targets": [ "pump:ebara-esa70w", "pump:ebara-esa70wn" ] }, { "detection": "Pumping performance decreases during the interruption, the document states that no alarm is displayed in the LCD controller for this.", "id": "fm:ebara-ev-s-microcoupure-performance", "mechanism": "During a momentary power failure, the drive is no longer supplied with power, and the pump rotor continues to be driven by inertia, pumping performance drops below the guaranteed specification, the capacitor array that supports the pump electronics, needs five minutes to recharge before it can absorb a further interruption.", "mitigation": "No operator action is required following a momentary power failure; the pump will recover automatically, space successive interruptions by the recharge time.", "occurrence": "recurrent", "onsetConditions": "During a momentary power failure, and during the minutes that follow, as long as the capacitor array has not recharged.", "rootCause": "design", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "targets": [ "pump:ebara-ev-s100", "pump:ebara-ev-s20", "pump:ebara-ev-s200", "pump:ebara-ev-s50" ] }, { "detection": "The machine gets hotter than previously observed, with the supply of cooling air found to be obstructed.", "id": "fm:ecodry-cooling-air-obstruction", "mechanism": "The EcoDry M dry piston pump has no additional cooling in normal applications, it dissipates its heat into the ambient air. If the supply of cooling air is obstructed, or if the machine is installed without the prescribed clearance around it, it gets hotter than previously observed, the manufacturer further warns that it may then exceed a surface temperature that is dangerous to touch.", "mitigation": "Install the machine with the prescribed clearance all around, when in an enclosure, make sure that there is an adequate flow of cooling air, or circulation fans.", "occurrence": "recurrent", "onsetConditions": "While running, when the machine is installed in an enclosure, or too close to other equipment, or when objects are left on its surfaces.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" }, { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "targets": [ "pump:leybold-ecodry-m-15", "pump:leybold-ecodry-m-20" ] }, { "detection": "Loud noise from the exhaust system when the machine is working at its ultimate pressure, and the pressure increasing too fast after switch-off.", "id": "fm:ecodry-exhaust-valve-leak", "mechanism": "The compressed gas exits the compression chamber through large valves. When one of these exhaust valves is leaky, a loud noise is heard from the exhaust system at ultimate pressure, and, with the machine switched off, the pressure in the system increases too fast. Repair belongs to the service department.", "mitigation": "Have the pump repaired, by the service department.", "occurrence": "isolated", "onsetConditions": "While running at ultimate pressure, and at standstill under vacuum, after prolonged service or after the passage of particles.", "rootCause": "wear", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" }, { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "targets": [ "pump:leybold-ecodry-m-15", "pump:leybold-ecodry-m-20" ] }, { "detection": "Abnormally high noise level, while the bearings and the deposits are ruled out as the cause.", "id": "fm:ecodry-silencer-defect-noise", "mechanism": "The silencer fitted at the exhaust becomes defective and the machine becomes extremely loud. The same symptom appears with high gas throughput and the exhaust port open, without an exhaust line or a silencer.", "mitigation": "Repair the silencer, or install an exhaust line or a silencer when the gas throughput is high.", "occurrence": "isolated", "onsetConditions": "While running, once the silencer has become defective, or when the machine is running at high gas throughput with the exhaust port open.", "rootCause": "wear", "scope": "model", "severity": "nuisance", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "targets": [ "pump:leybold-ecodry-m-15", "pump:leybold-ecodry-m-20" ] }, { "detection": "Abnormally loud noise while running, distinct from bearing noise, with thick deposits found when the machine is opened.", "id": "fm:ecodry-thick-particulate-deposits-noise", "mechanism": "Thick particulate deposits build up in the machine and make it extremely loud, dry piston machine, here the remedy is not cleaning by the operator but repair by the service department. The manufacturer moreover prohibits applications that produce abrasive or adhesive substances, and condensable vapours that can leave adhesive or high viscosity deposits, and calls for even the formation of thicker deposits to be avoided.", "mitigation": "Have the pump repaired by the service department, do not use the machine for applications that produce abrasive or adhesive substances, and fit a separator selected with the manufacturer if the process requires it.", "occurrence": "recurrent", "onsetConditions": "Under a process that produces substances or condensable vapours that leave deposits, including when these thicken, slowly.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" }, { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "targets": [ "pump:leybold-ecodry-m-15", "pump:leybold-ecodry-m-20" ] }, { "detection": "The EXC controller triggers Fail during speed run-up, before 50% speed is reached.", "id": "fm:ext255h-inadequate-cooling-mode-overheat", "manufacturerAcknowledged": true, "mechanism": "Forced-air cooling (instead of the required water cooling) under operating conditions that exceed the specified thresholds overheats the pump, risking damage to the bearing lubricant; the EXC controller detects the overheating and triggers a Fail during speed run-up (before 50% speed).", "mitigation": "Switch to water cooling (or increase cooling water flow / decrease water temperature) as soon as the thresholds are exceeded.", "occurrence": "unknown", "onsetConditions": "Air cooling alone while one of the following conditions is present: backing pressure > 10 mbar (1000 Pa); OR backing pressure > 8 mbar with interstage flow > 30 sccm; OR backing pressure > 5 mbar with interstage flow > 80 sccm; OR ambient temperature > 35 °C; OR use of a bakeout jacket.", "rootCause": "misapplication", "scope": "model", "severity": "stop", "sources": [ { "page": "27", "source": "src:tf-edwards-ext255h-manual" }, { "page": "27", "source": "src:tf-edwards-ext255h-manual" }, { "page": "35", "source": "src:tf-edwards-ext255h-manual" } ], "targets": [ "pump:edwards-ext255h" ] }, { "detection": "Check that the flange and safety connections absorb the resulting forces and that the vacuum chamber is secured against displacement or tipping.", "id": "fm:hipace-earthquake-external-vibration-contact", "manufacturerAcknowledged": true, "mechanism": "An earthquake or significant external vibration brings the rotor into contact with the safety bearings, or the housing wall into contact with the turbopump, producing mechanical loads that can go as far as destroying the turbopump.", "mitigation": "Ensure that all flange and safety connections absorb the resulting forces; secure the vacuum chamber against displacement or tipping.", "occurrence": "unknown", "onsetConditions": "Earthquake or significant external vibration, in particular if the flange and safety connections do not absorb the resulting forces or if the vacuum chamber is not secured against displacement or tipping.", "rootCause": "environment", "scope": "model", "severity": "destructive", "sources": [ { "page": "22", "source": "src:tf-pfeiffer-hipace-300-manual" }, { "page": "22", "source": "src:tf-pfeiffer-hipace-300-manual" } ], "targets": [ "pump:pfeiffer-hipace-300" ] }, { "detection": "Measure the pressure rise rate during venting: the maximum prescribed is 15 hPa/s. Suspect in particular a manual, uncontrolled venting of very small volumes.", "id": "fm:hipace-fast-venting-pressure-rise", "manufacturerAcknowledged": true, "mechanism": "Venting too quickly, particularly when venting very small volumes (the vacuum chamber or the turbopump itself), produces an uncontrolled pressure rise that mechanically overloads the turbopump's rotor and magnetic bearing, up to damaging it or even causing its failure.", "mitigation": "Observe the prescribed maximum pressure rise speed of 15 hPa/s; avoid manual, uncontrolled venting of very small volumes; use a Pfeiffer Vacuum venting valve if necessary.", "occurrence": "unknown", "onsetConditions": "Pressure rise speed above 15 hPa/s during venting, typically in the case of manual, uncontrolled venting of very small volumes.", "rootCause": "misapplication", "scope": "model", "severity": "destructive", "sources": [ { "page": "31", "source": "src:ptb-pfeiffer-hipace1200" }, { "page": "37", "source": "src:tf-pfeiffer-hipace-300-manual" }, { "page": "37", "source": "src:tf-pfeiffer-hipace-300-manual" }, { "page": "37", "source": "src:tf-pfeiffer-hipace-300-manual" } ], "targets": [ "pump:pfeiffer-hipace-300" ] }, { "detection": "Flatness check of the customer flange with a dial indicator before mounting.", "id": "fm:hipace-flange-flatness", "manufacturerAcknowledged": true, "mechanism": "A non-flat customer counter-flange warps the pump housing upon tightening. Leak and poor rotational behavior result.", "mitigation": "Rework of the flange, bellows between chamber and pump, compliance with the fixation kits.", "occurrence": "recurrent", "onsetConditions": "Counter-flange evenness beyond 0.05 mm over the whole surface. HV flange loaded on one side or beyond 500 N axial.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": "16", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "targets": [ "pump:pfeiffer-hipace-300" ], "timeToOnset": "Immediate at mounting." }, { "detection": "Operating log: date of the last complete stop at 0 Hz.", "id": "fm:hipace-overspeed-check-yearly", "manufacturerAcknowledged": true, "mechanism": "The redundant anti-overspeed system is verified through a run-up from a complete stop. A pump that runs for years without stopping never exercises it.", "mitigation": "Complete stop and restart at least once a year, to be scheduled during machine shutdowns.", "notes": "Compliance-type line. In an accelerator, turbo pumps run for 3 years without stopping.", "occurrence": "systematic", "onsetConditions": "Pump that has not been stopped for more than a year.", "rootCause": "maintenance_omission", "scope": "model", "severity": "safety", "sources": [ { "page": "6", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "targets": [ "pump:pfeiffer-hipace-300" ], "timeToOnset": "1 an" }, { "detection": "The dry pump seizes after the cooling water supply is restored whilst the pump is in operation and has not cooled down to a safe temperature.", "id": "fm:if1800-choc-thermique-eau-grippage", "mechanism": "The cooling water has been interrupted whilst the pump is in operation. Restoring the cooling water supply before the pump has cooled down to a safe temperature may result in dry pump seizure. The manual does not state the mechanism.", "mitigation": "Do not restore the cooling until the pump has cooled down to a safe temperature.", "occurrence": "isolated", "onsetConditions": "After a cooling water interruption that occurred whilst the pump was in operation, at the moment the cooling water supply is restored.", "rootCause": "maintenance_omission", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "targets": [ "pump:edwards-if1800" ] }, { "detection": "High pressures generated in the pump cooling system after the cooling water supply is isolated while the pump has not cooled down to a safe temperature.", "id": "fm:if1800-eau-isolee-pompe-chaude", "mechanism": "The cooling water supply is disconnected or isolated before the pump has cooled down to a safe temperature, the document states that high pressures will then be generated in the pump cooling system. It does not give the causal pathway.", "mitigation": "Allow the pump to cool down to a safe temperature before disconnecting or isolating the cooling water supply, provide an isolator on the water inlet.", "occurrence": "isolated", "onsetConditions": "During maintenance work or a relocation, at the moment the cooling water supply is isolated or disconnected.", "rootCause": "maintenance_omission", "scope": "model", "severity": "safety", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "targets": [ "pump:edwards-if1800" ] }, { "detection": "The pump runs hotter than before the maintenance operation.", "id": "fm:if1800-paliers-graisse-surdosee", "mechanism": "During relubrication, an excessive amount of fluorinated grease is forced into the bearings, of the dry pump's rotor bearings, the excess grease is churned rather than carried along, and the document states that the pump will run hot.", "mitigation": "Force new grease into the bearings and do not over pack them, after removing as much of the used grease as possible with a lint-free cloth or a spatula.", "occurrence": "recurrent", "onsetConditions": "After a bearing relubrication operation, of the dry pump's rotor.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "targets": [ "pump:edwards-if1800" ] }, { "detection": "Inspect the bearings for obvious signs of wear or the presence of debris, once the used grease has been removed.", "id": "fm:if1800-paliers-uses-debris", "mechanism": "The bearings wear, or debris gets into them, of the dry pump's rotor. The document makes the visual inspection of the bearings the criterion for returning the pump to a service centre, exposed during relubrication, they are not repairable on site.", "mitigation": "If the bearings are worn, return the pump to a service centre of the manufacturer for repair.", "occurrence": "recurrent", "onsetConditions": "Discovered during the bearing relubrication operation, with the bearing covers removed.", "rootCause": "wear", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "targets": [ "pump:edwards-if1800" ] }, { "detection": "Warning indicating that the gas module mass flow transducer has drifted outside the valid range allowed for zeroing, or that the transducer cannot be zeroed because the nitrogen purge is switched on or the dry pump is on.", "id": "fm:if1800-transducteur-debit-derive", "mechanism": "The accuracy of the mass flow transducer in the gas module may drift slightly over time. When the transducer has drifted outside the valid range allowed for zeroing, the system raises a warning, the purge flow measurement is no longer reliable, and zeroing fails.", "mitigation": "Zero the transducer (that is, calibrate it for zero gas flow) once a year, using the control system software, with the purge off and the pump stopped, no physical adjustment is necessary.", "occurrence": "systematic", "onsetConditions": "Gradually, between two zeroing operations, the manual recommends one per year.", "rootCause": "wear", "scope": "model", "severity": "nuisance", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" }, { "page": null, "source": "src:drypump-edwards-if1800" } ], "targets": [ "pump:edwards-if1800" ] }, { "detection": "Warning 7801, with the message 'O RING LEAK - CHECK';, the machine keeps running.", "id": "fm:ih-secondary-seal-breach", "mechanism": "The secondary seal is breached. You are now depending on the primary seal mechanism:, the redundancy that protected the workshop from process gases is gone,, without the machine stopping.", "mitigation": "Schedule replacement of the seal without delay:, the system is now operating with the primary seal mechanism alone.", "occurrence": "isolated", "onsetConditions": "During steady-state operation,, after wear or chemical attack on the secondary O-ring.", "rootCause": "wear", "scope": "model", "severity": "safety", "sources": [ { "page": null, "source": "src:drypump-edwards-ih" } ], "targets": [ "pump:edwards-ih1000", "pump:edwards-ih600", "pump:edwards-ih80" ] }, { "detection": "Dry pump motor temperature warning,, then alarm, low water flow warning,, and the water flow status changing from OK to CHECK on the display.", "id": "fm:il-circuit-refroidissement-pompe-bouche", "mechanism": "The cooling circuit of the pump becomes blocked:, cooling water no longer flows sufficiently through the manifold block that cools the dry pump motor,, the surface temperature of the manifold block rises, and the flow read by the flow switch falls. If the manifold block temperature reaches the threshold of the safety thermal snap-switch, that switch, whose output is connected to the internal emergency stop circuit, shuts down the system.", "mitigation": "Check the cooling-water connections and check that the cooling-water supply is on and is as specified;, if the connections and supply are correct, the cooling circuit of the pump may be blocked, and must be cleared.", "occurrence": "recurrent", "onsetConditions": "During steady-state operation, after a period of running long enough for the water circuit to become fouled;, or immediately if the water has not been turned on.", "rootCause": "unknown", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" }, { "page": null, "source": "src:drypump-edwards-il70-il600" }, { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "targets": [ "pump:edwards-il600", "pump:edwards-il70" ] }, { "detection": "The electrical current and then the power consumption of the dry pump exceed the warning thresholds, then the alarm thresholds;, the displayed help message names a leak or debris and asks for the pipelines to be inspected and the pump serviced.", "id": "fm:il-debris-procede-surcharge-pompe-seche", "mechanism": "There may be process debris in the dry pump, or a leak in the system:, the electrical current and then the power consumption of the pump rise higher than normal, and the machine is shut down at the alarm threshold. On the current branch alone, this shutdown occurs even if the operator has chosen to run the machine to failure:, the manual lists as non-ignorable alarms only the dry pump current alarms 310 and 312 and the high thermistor alarm 512.", "mitigation": "Inspect the pipelines and service the pump. After a shutdown on excessive power, the manual requires checking that the shaft rotates freely before any restart.", "occurrence": "recurrent", "onsetConditions": "During steady-state operation on process gas, as deposits accumulate in the swept volume;, or immediately if a leak opens in the system.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" }, { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "targets": [ "pump:edwards-il600", "pump:edwards-il70" ] }, { "detection": "Time how long the machine takes to pump down after start-up; if this time, increased by 10 percent, exceeds the preset value, the delay is insufficient.", "id": "fm:il600-retard-demarrage-surpresseur", "mechanism": "The booster only starts after a preset delay, the time needed for the dry pump to bring the system pressure below the maximum inlet pressure the booster accepts. If this delay is not adjusted to the actual installation, -- larger pipelines, a bigger chamber, a longer pump-down time --, the booster starts while the pressure is still too high, and the machine can be damaged as soon as it is started up.", "mitigation": "Measure the pump-down time at commissioning, and set the booster start delay to that value increased by 10 percent.", "occurrence": "isolated", "onsetConditions": "At every start-up, for as long as the booster start delay has not been measured and adjusted for the installation.", "rootCause": "installation", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" }, { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "targets": [ "pump:edwards-il600" ] }, { "detection": "The pumping speed measured for hydrogen is lower than the catalogue value and improves on its own with running time; this is therefore not a failure but a run-in period, unless surface contamination keeps it low.", "id": "fm:ion-cathode-surface-contamination-h2", "mechanism": "An ion pump pumps hydrogen by dissolving it in the bulk of the titanium cathodes, but the hydrogen must first be dissociated, and this dissociation is only possible on titanium stripped of its oxide layer by sputtering. Yet hydrogen has a very low sputtering yield: if it is the leading gas, the surface cleaning process is very slow and the pumping speed for hydrogen stays, at the beginning of the operation, lower than the nominal value, then increases gradually with time. The simultaneous pumping of another gas works both ways: if the additional gas has a higher sputtering yield, the cathode cleaning is faster; but it can also contaminate the cathode surface and reduce hydrogen adsorption, and dissolved hydrogen atoms can be sputtered away from the cathode.", "mitigation": "The document prescribes no action: it notes that the nominal pumping speed is reached in a shorter time if a gas with a higher sputtering yield is pumped at the same time.", "notes": "Family scope: the document describes the hydrogen pumping mechanism of any titanium-cathode pump, without naming a repository model. This mode is none of the seven already in the database. It matters to an operator because it avoids a false diagnosis: a new pump that pumps hydrogen poorly is not necessarily failing. The contamination branch of the mechanism, however, is a lasting degradation and not a run-in; both belong to the same causal chain and the document writes them in the same paragraph.", "occurrence": "systematic", "onsetConditions": "Beginning of the operation of a new or recommissioned pump, on a system where hydrogen is the leading gas in the vacuum system. Surface contamination occurs when another species is pumped at the same time.", "scope": "family", "severity": "degraded", "sources": [ { "page": "27", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "27", "source": "src:chiggiato-vacuum-ion-sources-2014" } ], "targets": [ "fam:ion-pump" ] }, { "detection": "The pump current stops tracking pressure and rises with no pressure-related cause, then the high voltage eventually goes to short circuit. Cathode expansion and embrittlement are only visible on disassembly, but anomalous field emission and the short circuit can be observed from the power supply.", "id": "fm:ion-hydride-cathode-embrittlement", "mechanism": "Hydrogen pumped by an ion pump dissolves in the bulk of the titanium cathodes. When its concentration is higher than the solubility limit in Ti, hydride precipitates are formed: the cathodes expand and become brittle. The expansion shortens the distance between cathode and anode and can go as far as a short circuit, while the deformed surface becomes a source of anomalous field emission. Pumped water vapour also contributes to this hydrogen loading, so that a system that has never been baked contributes to it without the operator counting any hydrogen.", "mitigation": "The documents prescribe no curative remedy: they describe a design-level mitigation, the star-shaped cathode geometry increasing the rigidity of the cathode and reducing the risk of short circuits compared with the separate strips of a conventional triode. Limiting the hydrogen load by entrusting hydrogen to a companion getter is a matter of system design.", "notes": "Family scope: both documents describe the TECHNOLOGY of the titanium-cathode ion pump, not a product; no repository model is named, so family scope is the only honest attachment, and it is paid for by this absence of a model. Two independent documents attest the mechanism, one from the manufacturer side and one from the laboratory side. CAUTION on merging: the anomalous field emission is adjacent to the leakage-current mode already in the database, but there the cause is attributed to surface asperities, not to hydride swelling; here the cause is the hydrogen load, the consequence goes as far as a short circuit and the severity is destructive. This is not the same mechanism. Maccarrone's document also places, under the same short-circuit cause, complete metallization of the insulating ceramics, which is a second path to short circuit unrelated to hydrogen.", "occurrence": "recurrent", "onsetConditions": "After a large cumulative quantity of hydrogen; the document gives an order-of-magnitude concentration limit for a commercial 500 l/s pump. It therefore occurs on hydrogen-dominated installations (accelerators, ion sources, baked systems where hydrogen is the main residual species) and after several years of service.", "scope": "family", "severity": "destructive", "sources": [ { "page": "26", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "27", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "27", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "9", "source": "src:maccarrone-ion-getter-pumps-2017" } ], "targets": [ "fam:ion-pump" ] }, { "detection": "The pump will continue pumping even if affected by a leakage current (the pumping action itself is not degraded), but the pressure reading becomes biased: in the most dramatic case, pressures below the stated threshold cannot be read. The near-linearity of current versus pressure on which the use of the ion pump as a pressure gauge relies holds only at fixed cell geometry, cell count, voltage and magnetic field, -- and only as long as the leakage current remains negligible compared with the ionization current.", "id": "fm:ion-leakage-current-fee", "manufacturerAcknowledged": true, "mechanism": "A spurious current, independent of pressure, can arise in the ion pump in addition to the useful ionization current. Its main cause is Field Electron Emission (FEE) from the cathodes, by which free electrons are emitted from the titanium surface when a strong electric field is applied, -- typically from surface whiskers/asperities. External sources, such as the power supply, the connecting cable or the high-voltage feedthrough, and internal sources can also produce this leakage current.", "mitigation": "Patented anode structure (Agilent SEM element) that eliminates the interstitial cavities between adjacent cells, reducing the surface prone to field emission.", "occurrence": "unknown", "onsetConditions": "Worsens at lower pressures: the useful ionization current, proportional to pressure, becomes comparable to or lower than the leakage current.", "rootCause": "design", "scope": "family", "severity": "degraded", "sources": [ { "page": "39", "source": "src:agilent-vacion-plus-150-manual-idealvac" }, { "page": "41", "source": "src:agilent-vacion-plus-150-manual-idealvac" }, { "page": "41", "source": "src:agilent-vacion-plus-20-manual-idealvac" }, { "page": "41", "source": "src:agilent-vacion-plus-20-manual-idealvac" }, { "page": "42", "source": "src:agilent-vacion-plus-300" }, { "page": "43", "source": "src:agilent-vacion-plus-300" }, { "page": "47", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" }, { "page": "81", "source": "src:agilent-vacion-plus-500-manual-idealvac" }, { "page": "27", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "27", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "3", "source": "src:leybold-iz-catalog-2010" }, { "page": "9", "source": "src:maccarrone-ion-getter-pumps-2017" }, { "page": "9", "source": "src:maccarrone-ion-getter-pumps-2017" }, { "page": "9", "source": "src:maccarrone-ion-getter-pumps-2017" }, { "page": "9", "source": "src:maccarrone-ion-getter-pumps-2017" }, { "page": "13", "source": "src:saes-niops-03-manual" }, { "page": "15", "source": "src:seidel-accelerator-vacuum-2021" } ], "targets": [ "fam:ion-pump" ] }, { "id": "fm:ion-magnet-low-field-bakeout", "manufacturerAcknowledged": true, "mechanism": "The magnetic field of the permanent magnets must remain strong enough for the Penning cell to trap electrons and ionize the gas. Overheating of the magnets — typically during system bakeout — beyond their Curie temperature causes the magnetic field to lose its strength, and the pump stops working effectively.", "mitigation": "Observe the maximum bakeout temperature declared by the manufacturer for the model (with or without the magnets installed); some models require the magnets to be removed above a temperature threshold.", "occurrence": "unknown", "onsetConditions": "System bakeout carried to a temperature that exceeds the Curie temperature of the pump's magnets; sensitive to the choice of magnet material and to its declared temperature rating.", "rootCause": "misapplication", "scope": "family", "severity": "degraded", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" }, { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" }, { "page": "9", "source": "src:maccarrone-ion-getter-pumps-2017" }, { "page": "2", "source": "src:saes-nextorr-datasheets-2017" } ], "targets": [ "fam:ion-pump" ] }, { "detection": "Key indicator: periodicity of the pressure spikes, whose interval depends on the pressure (hence on the quantity of gas pumped).", "id": "fm:ion-noble-gas-instability", "manufacturerAcknowledged": true, "mechanism": "Noble gases are not chemisorbed: they are only implanted in the cathode. As the cathode sputtering process progresses, already implanted noble gases are released again, causing the pressure to increase by one or a few decades; the gas is then re-implanted in the cathode and the pressure decreases without need of intervention on the system, until erosion again reaches the implanted-gas front -- a cycle known as \"argon disease\" / noble gas instability.", "mitigation": "Tantalum cathode (Noble Diode) or Triode/StarCell geometry, which favors ions rebounding as energetic neutrals implanted in the anode titanium (permanent, not subject to erosion) rather than in the cathode, -- a structural prevention, not an operator procedure.", "occurrence": "unknown", "onsetConditions": "Excessive pumping of rare gas over long periods, typical of a system that is not baked or has a persistent air leak.", "rootCause": "wear", "scope": "family", "severity": "degraded", "sources": [ { "page": "26", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "26", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "3", "source": "src:leybold-iz-catalog-2010" }, { "page": "3", "source": "src:leybold-iz-catalog-2010" }, { "page": "5", "source": "src:maccarrone-ion-getter-pumps-2017" }, { "page": "5", "source": "src:maccarrone-ion-getter-pumps-2017" } ], "targets": [ "fam:ion-pump" ] }, { "detection": "The helium or argon pressure does not go down even though the active gases are being pumped properly; residual gas analysis shows the noble gas as dominant.", "id": "fm:ion-noble-gas-low-speed-titanium-cathode", "mechanism": "Noble gases are not chemisorbed by the sputtered titanium film that covers the anode: they can only be captured by physical burial beneath sputtered cathode atoms. On a titanium cathode, the probability that an ion is neutralized and returned with enough energy to be buried is low, and the pumping speed for noble gases remains very low. A standard diode pump therefore lets helium and argon accumulate while it pumps the active gases properly. Replacing a cathode plate with a heavy material such as tantalum raises the noble-gas pumping speed to a fraction of that for nitrogen -- still far lower, but enough to handle a helium leak.", "mitigation": "The documents prescribe selecting a suitable technology: a heavy-material cathode, or a triode-type and derivative geometry, which increase the probability of ions being returned as energetic neutrals.", "notes": "Family scope on the diode sub-family, because it is the diode that cathode replacement is meant to correct, and because the three documents explicitly contrast the standard diode with the noble and triode variants. No catalogue model is named by these documents. NOT to be confused with the noble-gas instability already in the database: that one is a release-and-reimplantation cycle producing periodic pressure spikes; here it is a chronically low pumping speed, with no cycle, which simply lets the noble gas accumulate. The two can coexist on the same pump. This mode is the ion-pump counterpart of the non-getterable-gas dependency already in the database on the getter side. The comparative speed tables of the two academic documents were deliberately set aside as evidence: their value rows and their column headers lie on different lines of the extracted text, and splicing them back together would have fabricated the citation.", "occurrence": "systematic", "onsetConditions": "Installations where the gas load includes a significant fraction of noble gas: sections cooled with liquid helium and therefore exposed to helium-leak risk, systems vented to atmosphere, processes using a noble gas.", "scope": "family", "severity": "degraded", "sources": [ { "page": "26", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "5", "source": "src:maccarrone-ion-getter-pumps-2017" }, { "page": "12", "source": "src:seidel-accelerator-vacuum-2021" } ], "targets": [ "fam:ion-diode" ] }, { "detection": "The effective pumping speed measured in ultra-high vacuum is markedly lower than the catalogue value, and the ratio worsens as the pressure falls; no other fault can be identified.", "id": "fm:ion-speed-collapse-below-nominal-pressure", "mechanism": "The pumping speed of an ion pump depends on the gas pressure at the pump inlet: it attains a maximum for inlet pressures of about 10-6 mbar, and this is the value given by the suppliers for the nominal pumping speed. For lower pressures, the pumping speed decreases, half of the maximum being obtained at about 10-9 mbar. An installation sized on the catalogue speed and operated in ultra-high vacuum therefore has, in steady state, only a fraction of the quoted speed available, with no component actually at fault.", "mitigation": "The document prescribes no remedy: it warns that the nominal pumping speed is the maximum value and is read from a pressure-dependence curve.", "notes": "Family scope: the document describes the characteristic of the technology and names no repository model; the reproduced curve is credited to a manufacturer, but the statement is general. This mode is the ion-pump counterpart of the non-getterable-gas dependency mode already in the database: like it, it describes not a failure but a gap between quoted and available performance, which is what the database already knows how to carry. NOT to be confused with pump saturation, which the same document and Maccarrone's also describe: saturation is the speed drop with the QUANTITY of gas already pumped, and Maccarrone explicitly writes that a saturated pump is in a stable operating mode and not at end of life; it is a normal operating state, so it has NOT been proposed as a mode.", "occurrence": "systematic", "onsetConditions": "Operation in ultra-high vacuum, that is, in the very range where the pump is supposed to serve. The gap grows as the pressure falls.", "scope": "family", "severity": "degraded", "sources": [ { "page": "27", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "28", "source": "src:chiggiato-vacuum-ion-sources-2014" } ], "targets": [ "fam:ion-pump" ] }, { "detection": "Temperature warnings and alarms on the cooling block (5511, 5512) then on the pump body (5711, 5712).", "id": "fm:ipup-e100-cooling-overheat", "mechanism": "The IPUP E100 has an integrated water circuit and an enclosed, water-cooled motor; it has no supplementary fan cooling. When the water supply fails, nothing takes over: the cooling block exceeds 80 oC then 100 oC, and the pump body exceeds 140 oC then 150 oC. The manufacturer itself states that pump damage is the risk of a cooling-water supply failure, and recommends a flow-switch on the water return line to stop the machine before this damage occurs.", "mitigation": "Install a flow-switch on the cooling-water return pipework and connect it to the control equipment to stop the pump if the water flow becomes too low.", "occurrence": "recurrent", "onsetConditions": "During operation, as soon as the cooling water stops circulating or circulates too little.", "rootCause": "environment", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" } ], "targets": [ "pump:edwards-ipup-e100l", "pump:edwards-ipup-e100l-hardwire", "pump:edwards-ipup-e100li" ] }, { "detection": "Warning 3911 then alarm 3912 for high exhaust pressure, when the exhaust pressure sensor is fitted.", "id": "fm:ipup-e100-exhaust-restriction", "mechanism": "The IPUP E100 exhaust line becomes restricted or blocked -- notably by condensate draining back from downstream in the absence of a catchpot. The pump then no longer operates correctly and may be damaged; exhaust pressure rises above 5 psi then above 8 psi when the optional sensor is fitted.", "mitigation": "Install an outlet catchpot to prevent condensate from draining back into the pump, and do not run the pump on a restricted or blocked line.", "occurrence": "recurrent", "onsetConditions": "During operation, when the exhaust piping is restricted or blocked, or when condensate drains back into the pump.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" } ], "targets": [ "pump:edwards-ipup-e100l", "pump:edwards-ipup-e100l-hardwire", "pump:edwards-ipup-e100li" ] }, { "detection": "Detected on recommissioning: the cooling circuit is damaged.", "id": "fm:iqdp-coolant-freeze-in-transit", "mechanism": "If the pump is transported or stored without first draining its cooling water, the water can freeze in the circuit and damage the pump.", "mitigation": "Remove the water connections and blow compressed air into the water inlet to clear all water from the circuit before transport.", "occurrence": "isolated", "onsetConditions": "During transport or storage in conditions where the cooling water could freeze - air freight, for example.", "rootCause": "environment", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "A warning, followed by an exhaust-pressure alarm, appears on the display module.", "id": "fm:iqdp-exhaust-line-blockage-overpressure", "mechanism": "Process debris and condensation progressively block the exhaust pipeline, the exhaust-purge line, or its restrictor. Exhaust pressure then rises; the pressure transducer shuts the system down, or, if the pressure rises quickly, the exhaust pressure-switch trips first.", "mitigation": "Clean the exhaust line and silencer, check that no valve is shut, and check the number of pumps connected to the same line.", "occurrence": "systematic", "onsetConditions": "Under process gas, through slow accumulation, or abruptly when a valve close to the exhaust check-valve is shut.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Visual inspection of the inside of the silencer body and of the sealing faces at each cleaning.", "id": "fm:iqdp-exhaust-silencer-corrosion-erosion", "mechanism": "Internal corrosion of the silencer body and erosion of its wall are found during maintenance inspection; the sealing faces of the end-cover plate and the inlet and outlet flanges degrade at the same time. The manual does not name a cause.", "mitigation": "Refinish the sealing faces if necessary; replace the silencer if the damage is excessive.", "occurrence": "unknown", "rootCause": "unknown", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Weigh the removed silencer: above 7.5 kg it must be dismantled and cleaned, whereas a new silencer weighs 5.5 kg.", "id": "fm:iqdp-exhaust-silencer-deposit-loading", "mechanism": "Solid process by-products build up inside the exhaust silencer fitted beneath the pump, and its mass rises above the 5.5 kg specification.", "mitigation": "Dismantle, empty the deposits, clean with steam or water then glass-bead blast, and replace the three O-rings.", "occurrence": "systematic", "onsetConditions": "Under process gas, through gradual accumulation.", "rootCause": "process_contamination", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Low exhaust-temperature warning, with the help message CHECK EXHAUST; inspect the sensor to see whether it is covered in deposit.", "id": "fm:iqdp-exhaust-undertemperature-deposition", "mechanism": "The exhaust temperature drops too low for the process under way: condensable by-products deposit in the exhaust line, and the exhaust temperature sensor itself becomes covered in deposit, which is understood to skew its reading.", "mitigation": "Increase the pump operating temperature for processes with condensable by-products; check the exhaust lagging and heaters; clean the sensor.", "occurrence": "recurrent", "onsetConditions": "Under process gas, when the pump operating temperature is set too low, or when the exhaust lagging or heaters are no longer working.", "rootCause": "misapplication", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Warning, then alarm, for low current appears on the display module, with the help message OPEN CIRCUIT, CHECK CONNECTION.", "id": "fm:iqdp-gearbox-coupling-failure", "mechanism": "The gearbox coupling may have failed: the current drawn by the pump falls below normal. The manual gives a competing cause: a blown fuse in the Electrics Module.", "mitigation": "First check the electrical connections; if they are correct, suspect the fuse in the Electrics Module, then the gearbox coupling.", "occurrence": "isolated", "onsetConditions": "During steady-state operation, abruptly: the pump stops pulling vacuum even though the motor keeps turning.", "rootCause": "wear", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Detected by a change in the oil's colour at the level sight-glass; water turns it white.", "id": "fm:iqdp-gearbox-oil-contamination", "mechanism": "The gearbox oil is contaminated; contamination is indicated by a change in oil colour, with water contamination turning it white. The manual then requires an oil change, and notes that filtration may be enough to remove the contaminants.", "mitigation": "Change the oil; the manual notes that filtration may be enough to remove the contaminants.", "occurrence": "recurrent", "onsetConditions": "Under process gas; if the oil is not contaminated a yearly oil change may be enough, otherwise the oil must be changed as soon as contamination is seen.", "rootCause": "unknown", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Low oil-level warning on the display module, or noticing that the gearbox needs topping up frequently.", "id": "fm:iqdp-gearbox-rapid-oil-loss", "mechanism": "The dry pump gearbox is vented and normally loses a little oil during operation. A rapid, large loss signals an internal pump fault, or a shaft-seals purge pressure set too high or too low, which is understood to force oil out of the housing.", "mitigation": "Shut the system down as soon as possible and seek the manufacturer's advice; do not simply top up the oil.", "occurrence": "isolated", "onsetConditions": "During steady-state operation: the level drops suddenly instead of declining slowly.", "rootCause": "unknown", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Warning followed by a phase-imbalance alarm on the display module.", "id": "fm:iqdp-motor-fault-phase-imbalance", "mechanism": "A phase imbalance is measured in the electrical supply to the dry pump motor. Once the external supply and the connections have been checked and found correct, the manual identifies the pump motor as the failed part.", "mitigation": "Check the supply and the connections; if they are correct, replace the pump motor.", "occurrence": "isolated", "onsetConditions": "During established operation; the imbalance persists after the supply and connections have been checked.", "rootCause": "wear", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Warning 1201 at start-up, with no consumption shown on the display module.", "id": "fm:iqdp-motor-open-circuit-at-start", "mechanism": "At start-up, the dry pump motor draws no current: the winding or its wiring is open-circuit. The manual gives a competing cause: failure of the current sensor itself.", "mitigation": "Check whether the motor is open-circuit; if not, replace the current sensor.", "occurrence": "isolated", "onsetConditions": "At the start command, before any speed ramp-up.", "rootCause": "unknown", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "High-thermistor alarm, machine stopped; no cooling or overload warning had preceded it.", "id": "fm:iqdp-motor-winding-overheat-trip", "mechanism": "The motor windings reach the thermistor trip temperature and the pump is shut down. The manual stresses that this event should never occur in isolation: either two faults coexist, or the thermistor circuit itself has failed.", "mitigation": "Contact the supplier: a trip with no prior warning indicates either two simultaneous faults or a failed thermistor circuit.", "occurrence": "isolated", "onsetConditions": "While running, following a loss of cooling or a motor overload that had not been detected beforehand.", "rootCause": "unknown", "scope": "model", "severity": "safety", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Warning for low final-stage flow or low auxiliary flow, with the help message 3/4 STAGE BLOCK, SERVICE PUMP.", "id": "fm:iqdp-purge-pipeline-blockage", "mechanism": "The purge pipeline or its restrictor is blocked, the restrictor is too small, or the variable restrictor needs adjustment; final-stage gas flow drops.", "mitigation": "Clear or replace the pipeline and the restrictor at fault; check the restrictor size and the variable restrictor setting.", "occurrence": "recurrent", "onsetConditions": "While running, on report of a low final-stage flow.", "rootCause": "unknown", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "The display is completely blank, with no message at all.", "id": "fm:iqdp-self-resetting-fuse-trip-blank-display", "mechanism": "The self-resetting fuses FS6 and FS8 in the Electrics Module trip: the display goes completely blank and the pump can no longer be controlled until the electrical supply has been switched off and back on.", "mitigation": "Switch the pump's electrical supply off and back on to reset the fuses.", "occurrence": "isolated", "onsetConditions": "During operation or at power-up, with no prior message.", "rootCause": "unknown", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Warning for high shaft-seals purge flow on the display module, with the help message SS FLOW HIGH, SERVICE PUMP.", "id": "fm:iqdp-shaft-seal-wear-purge-flow-rise", "mechanism": "The shaft-seals purge flow rate becomes too high; the manual concludes that the pump may need to be serviced. It does not state the cause.", "mitigation": "Have the pump serviced; replacing the shaft seals is not an operator task.", "occurrence": "systematic", "onsetConditions": "During steady-state operation, after long service; the drift is gradual.", "rootCause": "unknown", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "A rapid drop in pump-body temperature after an adjustment to the valve, followed by noise or seizure.", "id": "fm:iqdp-tcv-cold-shock-rotor-contact", "mechanism": "If the thermostatic control valve is turned down while the pump is hot, the cooling-water flow suddenly increases: the rotor and casing contract at different rates and the pump is damaged.", "mitigation": "Only turn down the thermostatic control valve setting when the pump is cold.", "occurrence": "isolated", "onsetConditions": "During an adjustment of the operating temperature, with the machine hot.", "rootCause": "misapplication", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "A warning, then alarm, for high pump-body temperature appears, with the help message TCV SET HIGH, ADJUST TCV.", "id": "fm:iqdp-tcv-failure-body-overtemperature", "mechanism": "The thermostatic control valve that meters cooling water to the pump body fails, or process deposits foul the pump: the pump-body temperature rises above the threshold, up to a shutdown by the safety thermo-contact.", "mitigation": "Check the thermostatic valve's setting; if the setting is correct, replace the valve or have the pump serviced.", "occurrence": "recurrent", "onsetConditions": "Under process gas, after deposits accumulate; or after the thermostatic control valve fails.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "A warning, then alarm, linked to motor temperature appears, with the help message MOTOR WATER LOW, CHECK FILTER.", "id": "fm:iqdp-tcv-manifold-filter-clogging", "mechanism": "The filter in the thermostatic control valve manifold becomes clogged with debris carried by the cooling water. Water flow to the pump motor collapses, and the motor's surface temperature rises.", "mitigation": "Check and clean the filter in the thermostatic control valve manifold; check that there is no blockage in the water pipework and the pump circuit.", "occurrence": "recurrent", "onsetConditions": "During established operation, after prolonged use without cleaning the filter.", "rootCause": "maintenance_omission", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Fracture of the bellows between the booster outlet and the dry pump inlet.", "id": "fm:iqmb-bellows-overpressure-fracture", "mechanism": "If the booster runs for more than a few seconds while the downstream dry pump is stopped, the bellows connecting the booster outlet to the dry pump inlet is pressurised and may fracture.", "mitigation": "Never run the booster on its own for more than a few seconds.", "occurrence": "isolated", "onsetConditions": "During manual operation of the booster - while fault-finding, for example - with the dry pump stopped.", "rootCause": "misapplication", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Booster current and power warnings out of range, together with a level reading at the coupling-cover sight glass, with the pump stopped and cooled.", "id": "fm:iqmb-coupling-cover-oil-level-fault", "mechanism": "The oil level in the booster's coupling cover moves out of range, and the booster's electrical consumption departs from normal. On the high side, the manual lists this cause alongside a leak, process debris, and motor failure; on the low side, alongside a blown fuse in the Electrics Module and a failed gearbox coupling.", "mitigation": "Stop the pump, let it cool, and restore the oil level in the coupling cover.", "occurrence": "recurrent", "onsetConditions": "During established operation, after a period without checking the coupling-cover oil level.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "detection": "Oil sight-glass cracked or broken, with oil spray.", "id": "fm:iqmb-nonvented-plug-sightglass-fracture", "mechanism": "If the filler plug on the booster's shaft-seal reservoir is refitted without its vent, the reservoir becomes pressurised and the oil sight-glass fractures.", "mitigation": "Refit only the original vented plug on the shaft-seal reservoir.", "occurrence": "isolated", "onsetConditions": "After an oil change on the booster, as soon as it is restarted.", "rootCause": "maintenance_omission", "scope": "model", "severity": "safety", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "targets": [ "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "id": "fm:neg-co-saturation-threshold", "manufacturerAcknowledged": true, "mechanism": "The capture probability (sticking probability) of a NEG getter depends strongly on how far its surface is already covered by previously pumped gas: the more the surface is covered, the more negligible the capture becomes. Complete saturation of a smooth NEG surface occurs at about 1e15 CO molecules adsorbed per cm2, (quantities 5 to 10 times higher for H2O and O2), -- hydrogen is an exception, because it diffuses into the bulk of the getter rather than remaining on the surface, which makes its pumping far less capacity-limited than that of the other gases.", "mitigation": "Periodic thermal reactivation (see the related failure mode on hydrogen desorption during activation), which regenerates free surface sites; a rough rather than a smooth surface, to increase the capacity per unit of geometric surface area.", "occurrence": "unknown", "onsetConditions": "Cumulative exposure to active gases (chiefly CO, strongly captured, sticking coefficient close to 1) without reactivation; exposure to air (venting to atmosphere) strongly accelerates the surface coverage.", "rootCause": "wear", "scope": "family", "severity": "degraded", "sources": [ { "page": "29", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "29", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "33", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "2", "source": "src:saes-capacitorr-d400-datasheet" }, { "page": "2", "source": "src:saes-nextorr-datasheets-2017" }, { "page": "2", "source": "src:saes-nextorr-datasheets-2017" } ], "targets": [ "fam:neg" ] }, { "detection": "Transient H2 pressure rise during the heating phase of activation and reactivation, to be distinguished from a real leak or from contamination.", "id": "fm:neg-h2-desorption-during-activation", "manufacturerAcknowledged": true, "mechanism": "Thermal activation/reactivation of a NEG, by heating for times below one hour, restores the getter's pumping capability, -- but hydrogen is an exception, which is released again into the gas phase during heating, thus requiring other pumps during the process of activation and reactivation.", "mitigation": "Provide other pumps running for the whole process of activation and reactivation, to remove the hydrogen released into the gas phase.", "occurrence": "unknown", "onsetConditions": "Every thermal activation or reactivation of a NEG that has already pumped hydrogen.", "rootCause": "design", "scope": "family", "severity": "nuisance", "sources": [ { "page": "1", "source": "src:saes-nextorr-datasheets-2017" }, { "page": "2", "source": "src:saes-nextorr-datasheets-2017" }, { "page": "13", "source": "src:seidel-accelerator-vacuum-2021" }, { "page": "14", "source": "src:seidel-accelerator-vacuum-2021" } ], "targets": [ "fam:neg" ] }, { "detection": "The pressure floor, dominated by hydrogen, rises slowly over the course of operation, with no other fault, and falls after a regeneration.", "id": "fm:neg-h2-equilibrium-pressure-rise", "mechanism": "The pumping of hydrogen by a non-evaporable getter is REVERSIBLE: owing to the high mobility of H atoms and their relatively low binding energy, hydrogen may be released by heating. Pumping and desorption reach equilibrium at a hydrogen pressure that depends on the heating temperature and on the hydrogen concentration already dissolved, the three quantities being linked by Sieverts' law. Consequence for the operator: as the getter loads with hydrogen, the pressure floor it can hold rises, and it rises all the more as the getter is kept hot. Operating a getter at higher temperature to increase its surface capacity therefore has a price, and the document says so: the hydrogen release might be an obstacle to achieve the required pressure.", "mitigation": "The document prescribes a regeneration of the getter by heating, the released gas being pumped away by a turbomolecular pump, and gives a formula for the regeneration time as a function of the getter mass, the auxiliary pump's speed and the initial and final hydrogen concentrations.", "notes": "Family scope: the document describes the thermodynamics of the hydrogen/getter-metal pair, valid for any getter form, and names no repository model; it names a commercial alloy and gives its constants. NOT to be confused with the two NEG modes already in the database: carbon-monoxide saturation bears on SURFACE COVERAGE, and the document there writes that hydrogen is an exception because it diffuses into the bulk; hydrogen desorption at activation bears on the TRANSIENT PEAK during activation heating. Here it is neither a surface coverage nor a transient: it is a permanent pressure floor, which rises with the bulk load, and which exists even without activation heating. This is the underlying limit of hydrogen pumping by getter, and none of the seven carries it.", "occurrence": "systematic", "onsetConditions": "After pumping a large quantity of hydrogen; aggravated if the getter is kept at higher temperature in operation, which is sometimes sought in order to increase its capacity.", "scope": "family", "severity": "degraded", "sources": [ { "page": "30", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "32", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "13", "source": "src:seidel-accelerator-vacuum-2021" } ], "targets": [ "fam:neg" ] }, { "id": "fm:neg-non-getterable-gas-dependency", "manufacturerAcknowledged": true, "mechanism": "A NEG getter (cartridge, thin film, or the NEG section of a combination pump) does NOT pump non-getterable gases such as argon or methane AT ALL -- unlike active gases (H2, CO, CO2, H2O, N2). In a system where a significant share of the gas load is non-getterable, the effective pumping speed of the NEG + companion ion pump assembly can drop sharply, since only the ion section handles these species, and its own speed for argon/methane is typically much lower than its speed for hydrogen.", "mitigation": "Size the companion ion section (or the separate ion pump) taking specific account of the expected non-getterable gas load, not only the hydrogen/CO load that dominates the NEG specification.", "occurrence": "unknown", "onsetConditions": "Gas load containing a significant fraction of argon or methane, (argon implantation during the sputtering of a NEG coating, a helium/argon leak, a chemical process releasing methane, etc.).", "rootCause": "design", "scope": "family", "severity": "degraded", "sources": [ { "page": "29", "source": "src:chiggiato-vacuum-ion-sources-2014" }, { "page": "21", "source": "src:neg-coating-chambers-2018" }, { "page": "21", "source": "src:neg-coating-chambers-2018" }, { "page": "21", "source": "src:neg-coating-chambers-2018" }, { "page": "1", "source": "src:saes-nextorr-datasheets-2017" }, { "page": "2", "source": "src:saes-nextorr-datasheets-2017" }, { "page": "2", "source": "src:seidel-accelerator-vacuum-2021" } ], "targets": [ "fam:neg-cartridge", "fam:neg-ion-combo" ] }, { "detection": "A reactivation no longer restores the pumping speed, whereas an earlier reactivation used to restore it. The data sheets give no other indicator, and none that would not require disassembly.", "id": "fm:neg-total-capacity-exhaustion", "mechanism": "The getter cartridge has a finite sorption capacity and, unlike surface saturation, its exhaustion is not reversible. The total capacities announced by the manufacturer are those obtained after many reactivations, with the getter fully consumed: the alloy has then chemically reacted and no further reactivation regenerates it. The capacities for the different species are not additive -- a getter fully consumed by one species no longer sorbs another species -- so that a load dominated by a single active gas exhausts the cartridge for all the others. This is the getter's end of life through consumption of the alloy.", "mitigation": "Replace the getter cartridge -- on the CapaciTorr D 400, the cartridge with its built-in heater is ordered separately from its flange. The data sheets prescribe nothing else.", "notes": "A wear-out mechanism, not an accidental failure, on the same footing as the cathode erosion already in the database. To be clearly distinguished from the carbon monoxide surface saturation mode already in the database: that one clears through reactivation, this one does not. A single manufacturer and two ranges (NEXTorr, CapaciTorr): family scope would require a second manufacturer, hence the model scope. The document gives the definition of total capacity; it does not describe any operational observation: the proposed observation is deduced from this definition and must be read as such.", "occurrence": "systematic", "onsetConditions": "After an accumulation of sorbed gas approaching the total capacity announced for the model, reached all the faster the heavier the gas load, and after numerous reactivation cycles; the D 400 cartridge's data sheet caps the number of possible sorption cycles at more than one hundred.", "scope": "model", "severity": "stop", "sources": [ { "page": "2", "source": "src:saes-capacitorr-d400-datasheet" }, { "page": "2", "source": "src:saes-nextorr-datasheets-2017" }, { "page": "2", "source": "src:saes-nextorr-datasheets-2017" }, { "page": "2", "source": "src:saes-nextorr-datasheets-2017" } ], "targets": [ "pump:saes-capacitorr-d400", "pump:saes-nextorr-d100-5", "pump:saes-nextorr-d1000-10", "pump:saes-nextorr-d200-5", "pump:saes-nextorr-d2000-10", "pump:saes-nextorr-d300-5", "pump:saes-nextorr-d500-5" ] }, { "detection": "Determine whether mercury, liquid or vapor, was pumped or came into contact with the pump. The manual prohibits this without reservation.", "id": "fm:next-mercury-vapour-rotor-corrosion", "manufacturerAcknowledged": true, "mechanism": "Mercury, whether pumped as vapor or brought into contact with the pump, chemically corrodes the rotor of the nEXT pump until failure.", "mitigation": "Never use the nEXT pump to pump mercury, nor allow mercury to come into contact with the pump.", "occurrence": "unknown", "onsetConditions": "Pumping of mercury vapour, or contact of mercury (liquid or vapour) with the pump.", "rootCause": "process_contamination", "scope": "model", "severity": "destructive", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "targets": [ "pump:edwards-next300d" ] }, { "detection": "No trace of the fault is retained once power is restored in this scenario.", "id": "fm:next-regen-power-fail-signal-loss", "manufacturerAcknowledged": true, "mechanism": "When a mains power outage is long enough for speed to fall below 50% AND the regenerative power supply ceases completely before power is restored, any fail signal that had been triggered during the regenerative power window is LOST when power is restored: the controller retains no trace of the fault condition that occurred during the outage.", "mitigation": "Do not rely on the nEXT controller's fault log to reconstruct the history of a prolonged mains power outage; consider independent external monitoring if fault traceability during an outage is critical.", "occurrence": "unknown", "onsetConditions": "Mains power cut lasting long enough for the rotation speed to drop below 50%. AND for the regenerative power supply to cease entirely before mains power returns.", "rootCause": "design", "scope": "model", "severity": "degraded", "sources": [ { "page": "73", "source": "src:ptb-edwards-next" } ], "targets": [ "pump:edwards-next300d" ] }, { "detection": "The controller counts start/stop cycles and the number remaining before service via the serial command ?V884 (Section 5.5.5, Pump cycles); bit 2 of the service status word signals 'Pump service due' when this cycle counter reaches zero.", "id": "fm:next-rotor-fatigue-cycle-limit", "manufacturerAcknowledged": true, "mechanism": "The turbomolecular rotor of nEXT pumps has a mechanical fatigue life typically of 40,000 to 50,000 full cycles of acceleration to full speed and back to a stop. As a precautionary measure, Edwards sets the major service threshold (rotor replacement) at only 20,000 cycles, or ten years of use, whichever occurs first. Distinct from bearing/oil cartridge service (~17,500h oil / ~35,000h bearing): this pertains to the number of start-stop cycles, not to continuous running hours or lubrication.", "mitigation": "Return the pump for major service (rotor replacement) after 20,000 acceleration/stop cycles or ten years of use, whichever occurs first.", "occurrence": "systematic", "onsetConditions": "Accumulation of start/stop cycles at full speed (mechanical fatigue of the rotor material), independently of continuous running hours.", "rootCause": "wear", "scope": "model", "severity": "destructive", "sources": [ { "page": "75", "source": "src:ptb-edwards-next" } ], "targets": [ "pump:edwards-next300d" ], "timeToOnset": "Typically 40,000 to 50,000 start/stop cycles before fatigue failure; preventive threshold set by Edwards at 20,000 cycles or ten years, whichever comes first." }, { "detection": "Determine whether the pump was stored other than upright, and for how long; the manual prescribes rotating it for at least eight hours every six months during storage.", "id": "fm:next-storage-nonupright-oil-drain", "manufacturerAcknowledged": true, "mechanism": "The oil reservoir that lubricates the bearing of the nEXT pump can drain by gravity if the pump is not kept upright during storage, depriving the bearing of lubricant available at restart. A mechanism distinct from progressive lubricant depletion during operation: here the loss occurs while the pump is AT REST, through mere orientation.", "mitigation": "Keep the pump upright at all times during storage; if necessary, run the pump for at least eight hours every six months.", "occurrence": "unknown", "onsetConditions": "Pump stored without being kept upright, particularly during prolonged storage.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": "85", "source": "src:ptb-edwards-next" } ], "targets": [ "pump:edwards-next300d" ] }, { "detection": "Determine whether the pump was set in rotation before being rigidly fixed, either by the inlet flange to a fixed system or by the base to a closed support.", "id": "fm:next-unsecured-mount-seizure-torque", "manufacturerAcknowledged": true, "mechanism": "If the pump is not rigidly fixed before being set in rotation and the rotor seizes during operation, the kinetic energy stored in the rotor transfers to the pump body: the unfixed pump can be subjected to sudden, violent movement, causing damage and injury.", "mitigation": "Never set the pump in rotation before it is rigidly fixed, either by the inlet flange to a fixed system or by the base to a closed support.", "occurrence": "unknown", "onsetConditions": "Pump set into rotation before being rigidly fixed, (neither inlet flange on a fixed system, nor base on a firm support). AND occurrence of a rotor seizure while it is running.", "rootCause": "installation", "scope": "model", "severity": "safety", "sources": [ { "page": "39", "source": "src:ptb-edwards-next" } ], "targets": [ "pump:edwards-next300d" ] }, { "detection": "Read the response returned after the start attempt: a refusal that names a list of pumps at fault, or a pump that answers the host with an error code instead of an acknowledgment, identifies the pump incapable of the fast cycle. The pumps are seen by the network — otherwise they would not appear in the list — so this is not a communication failure.", "id": "fm:on-board-8f-300mm-pvd-group-fastregen-mixed-capability-abort", "manufacturerAcknowledged": true, "mechanism": "A group Fast Regeneration start is all-or-nothing: it only succeeds if every pump in the group is capable of the cycle and none is already regenerating. A single pump incapable of the fast cycle — a Single Stage Cryopump, which is architecturally not capable of it, or a pre-G-version-series pump, which responds with an error code — causes the entire group start to be abandoned, including for the capable pumps. The pumps in the group remain loaded and the vacuum continues to degrade.", "mitigation": "Only group together, on the same regeneration map, pumps that are capable of the fast cycle — remove the Single Stage Cryopump from it, which can however run a full group regeneration — and only start the group once every pump has exited regeneration.", "notes": "Two batches named the same mechanism from two manuals and two causes of incapability: the Single Stage manual 8040731 for the Single Stage pump, the 300 mm PVD Network Terminal manual 8040742 for the pre-G-version pump. The identifier kept preserves the trace of the batch that produced it and does not narrow the scope. A single manufacturer and two product lines (On-Board, On-Board IS): the scope stays at `model`. This abort is distinct from the overtemperature pump lockout, which clears itself on return to cold.", "occurrence": "systematic", "onsetConditions": "Starting a group Fast Regeneration that mixes pumps of different capabilities or generations — in particular a Single Stage Cryopump left on the regeneration map — or requesting a group fast cycle while one of the group's pumps is already regenerating.", "rootCause": "misapplication", "scope": "model", "severity": "degraded", "sources": [ { "page": "63", "source": "src:cryo-cti-network-terminal-300mm-pvd-cryopump-8040742-reva" }, { "page": "64", "source": "src:cryo-cti-network-terminal-300mm-pvd-cryopump-8040742-reva" }, { "page": "114", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "114", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "105", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "120", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "120", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "120", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" } ], "targets": [ "pump:cti-on-board-8f-300mm-pvd", "pump:cti-on-board-is-8f", "pump:cti-on-board-is-single-stage" ] }, { "detection": "Read the temperature of each pump in the group at the terminal before restarting the cycle: the pump(s) above the threshold are the ones blocking the group start, while the others remain perfectly cold.", "id": "fm:on-board-8f-300mm-pvd-group-fastregen-warm-pump-lockout", "manufacturerAcknowledged": true, "mechanism": "Group start of a FastRegen cycle requires all pumps in the group to still be cold and detected by the network. A single pump warmed above the threshold is enough to cause the start to be refused for the entire group: the loss of cold in one pump propagates into blocking the FastRegen of its neighbors.", "mitigation": "Wait until all pumps in the group have returned below the 50 K threshold, and verify that they are all detected by the terminal, before restarting the group FastRegen.", "occurrence": "unknown", "onsetConditions": "Starting a Group FastRegen cycle while one of the pumps in the group has warmed up during operation, or is not detected on the network.", "rootCause": "design", "scope": "model", "severity": "degraded", "sources": [ { "page": "46", "source": "src:cryo-cti-network-terminal-300mm-pvd-cryopump-8040742-reva" }, { "page": "46", "source": "src:cryo-cti-network-terminal-300mm-pvd-cryopump-8040742-reva" } ], "targets": [ "pump:cti-on-board-8f-300mm-pvd" ] }, { "detection": "Record the address set on each module's switch and verify it is unique, check that the module panel LED is illuminated, then query the terminal for the list of pumps active on the network.", "id": "fm:on-board-8f-duplicate-address-pump-unreachable", "manufacturerAcknowledged": true, "mechanism": "Each cryopump module's address is set by a switch on the module. If two modules share the same address, or if a module has lost power, the terminal cannot find the pump on the network: no session opens with it and it is unreachable to centralized commands.", "mitigation": "Give each pump a unique address from 00 to 09 on its chain before connecting the modules together, restore power to the affected module, and check all network cable connections.", "occurrence": "unknown", "onsetConditions": "At commissioning, after replacing a module whose address switch was not reset, or after a pump loses power.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": "19", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" }, { "page": "31", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" }, { "page": "31", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" }, { "page": "37", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" } ], "targets": [ "pump:cti-on-board-8f" ] }, { "detection": "Check for a terminator on the free network connector of the last pump on each of the two chains, verify cable routing away from power cables and the total chain length, then attempt to reopen a session with the lost pump.", "id": "fm:on-board-8f-network-termination-line-noise", "manufacturerAcknowledged": true, "mechanism": "The network chain linking the cryopump modules to the terminal must be closed with a terminator on the last module of each group. Without it, if the cable is routed with power cables, or if the chain exceeds the allowed length, the line degrades from reflections and noise, and sessions with the pumps are lost.", "mitigation": "Install the two terminators supplied with the unit on the last module of each chain, do not exceed 1,000 feet of total network chain, and do not route the serial connection cables with power cables.", "occurrence": "unknown", "onsetConditions": "At network commissioning or after rewiring: a missing terminator on the last pump of a chain, a network cable routed with power cables, or a chain that is too long.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": "19", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" }, { "page": "19", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" }, { "page": "20", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" }, { "page": "31", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" } ], "targets": [ "pump:cti-on-board-8f" ] }, { "detection": "Track the progress of both cycles at the terminal: the pump in full regeneration remains at the stage preceding roughing as long as the pump in the fast cycle has not reached its cooldown setpoint.", "id": "fm:on-board-8f-rough-valve-contention-regen-stall", "manufacturerAcknowledged": true, "mechanism": "On a shared roughing manifold, only one pump at a time has exclusive use of the roughing valve. A pump undergoing full regeneration is therefore not roughed out while a neighboring pump on the same manifold is running a fast regeneration cycle and has not yet cooled back down, and its cycle stalls at this stage.", "mitigation": "Start simultaneously, as a regeneration group, all pumps on the same manifold that require a fast cycle; full regenerations, for their part, may be started individually or as a group at any time.", "occurrence": "systematic", "onsetConditions": "Two or more cryopumps on the same roughing map regenerate at the same time, with at least one of them in a fast cycle.", "rootCause": "design", "scope": "model", "severity": "degraded", "sources": [ { "page": "25", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" }, { "page": "26", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" }, { "page": "26", "source": "src:cryo-cti-on-board-network-terminal-cryopump-8040719" } ], "targets": [ "pump:cti-on-board-8f" ] }, { "detection": "Read the helium return-pressure gauge while running and compare it to the normal operating range for the product line: 60 to 85 psig (415-590 kPa) on the Cryo-Torr, 100 to 120 psig (690-827 kPa) on the On-Board. With the pump stopped, check the static charge pressure on the compressor gauge. Then check by hand that the supply and return self-sealing couplings are fully engaged. No disassembly is needed.", "id": "fm:on-board-helium-charge-insufficient", "manufacturerAcknowledged": true, "mechanism": "The closed-circuit helium charge depletes — a slow leak, a loose or disconnected self-sealing coupling, losses during work on the lines. The return pressure falls below the normal operating range: the mass of gas expanded on each cycle in the displacer-regenerator falls, the refrigeration power available at the two cold stations drops, and the pump takes too long to cool down or never reaches its 20 K operating temperature.", "mitigation": "Add gas following the procedure in the relevant compressor manual, then fully engage all the helium self-sealing couplings.", "notes": "Merge of two proposals reading the same troubleshooting-table line, one in the Cryo-Torr PUMP manual, the other in the On-Board PUMP manuals: the scope stays on the pump models, with the fix pointing to the compressor manual. The two normal return-pressure ranges differ by product line and are both carried in detection. The identifier kept is that of the proposal covering the most models; the mode holds identically for the ten Cryo-Torr.", "occurrence": "recurrent", "onsetConditions": "A slow drift during operation, or immediate onset after servicing the helium lines; typically shows up at the next cooldown.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": "56", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "50", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "51", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "51", "source": "src:cryo-cti-cryogenics-helix-cryo-torr-pump-iom-8040613-rev103-2004" }, { "page": "39", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" }, { "page": "39", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" }, { "page": "34", "source": "src:cryo-cti-on-board-gle-cryopump-8040564-revaa" } ], "targets": [ "pump:cti-cryo-torr-10", "pump:cti-cryo-torr-10f", "pump:cti-cryo-torr-20hp", "pump:cti-cryo-torr-250f", "pump:cti-cryo-torr-250fh", "pump:cti-cryo-torr-400", "pump:cti-cryo-torr-4f", "pump:cti-cryo-torr-500", "pump:cti-cryo-torr-8", "pump:cti-cryo-torr-8f", "pump:cti-on-board-10", "pump:cti-on-board-10f", "pump:cti-on-board-250f", "pump:cti-on-board-250fh", "pump:cti-on-board-4", "pump:cti-on-board-400-high-capacity", "pump:cti-on-board-400-standard-capacity", "pump:cti-on-board-4f", "pump:cti-on-board-500", "pump:cti-on-board-6", "pump:cti-on-board-8", "pump:cti-on-board-8-gle", "pump:cti-on-board-8f", "pump:cti-on-board-8f-300mm-pvd", "pump:cti-on-board-8f-gle", "pump:cti-on-board-enhanced-8f" ] }, { "detection": "The valve control screen shows ERROR; check that the valve control cable is correctly installed, then clear the gate valve error.", "id": "fm:on-board-is-implant-gate-valve-sense-mismatch", "manufacturerAcknowledged": true, "mechanism": "The pump continuously compares the sensed gate valve position to the last commanded position. If the sensors report a position different from the one commanded, the pump latches an error. And if the valve's closure cannot be confirmed when a regeneration is started, the regeneration is aborted and the pump remains on.", "mitigation": "Connect the cable and clear the gate valve error; if the error does not clear, check the voltages at the gate valve position indicators and at the cryopump.", "notes": "Gate valve integration belongs to the on-board ion implant cryopump system.", "occurrence": "recurrent", "onsetConditions": "After any disconnection of the gate valve cable, the error must be cleared regardless; it also appears with a failing position-sensing chain.", "rootCause": "installation", "scope": "model", "severity": "stop", "sources": [ { "page": "69", "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" }, { "page": "38", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "40", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "83", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" } ], "targets": [ "pump:cti-on-board-is-250f", "pump:cti-on-board-is-250fe", "pump:cti-on-board-is-320f", "pump:cti-on-board-is-320fe" ] }, { "detection": "Read the temperatures on the pump status screen: an Open reading, below 5 K, or a Short reading, above 350 K, indicates the measurement chain and not an actual thermal event.", "id": "fm:on-board-is-implant-second-stage-diode-failure", "manufacturerAcknowledged": true, "mechanism": "The second stage's temperature measurement diode fails and the pump no longer knows its temperature. Since safe operation in a hydrogen-rich atmosphere depends on this reading, the pump closes the gate valve and initiates a safety purge, which halts production even if the pump is still cold.", "mitigation": "The pump puts itself into a safe state: gate valve closure and a five-minute safety purge, with the pump purge and exhaust purge valves locked open; a safety purge triggered automatically cannot be interrupted.", "notes": "The manufacturer accepts the resulting unexpected downtime and justifies it on safety grounds.", "occurrence": "isolated", "onsetConditions": "As soon as a second stage bad diode is detected for 3 seconds.", "rootCause": "unknown", "scope": "model", "severity": "stop", "sources": [ { "page": "38", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "38", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "40", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "66", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "66", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" }, { "page": "66", "source": "src:cryo-cti-on-board-is-cryopump-system-operation-guide-8040647-reva" } ], "targets": [ "pump:cti-on-board-is-250f", "pump:cti-on-board-is-250fe", "pump:cti-on-board-is-320f", "pump:cti-on-board-is-320fe" ] }, { "detection": "Open the pump control screen and read the HFI status: the \"Trip\" entry opens the clear screen and means the circuit must be reset; the \"OK\" entry, by contrast, indicates a complete circuit that does not need to be reset.", "id": "fm:on-board-is-single-stage-hfi-trip-heater-lockout", "manufacturerAcknowledged": true, "mechanism": "The HFI protection circuit trips and the pump's heaters fail to start: the cryopump does not warm up to the regeneration target temperature, and the cycle remains stuck at its warm-up phase.", "mitigation": "Clear the HFI trip status from the pump control screen, which resets the HFI status to OK.", "occurrence": "recurrent", "onsetConditions": "At the start of a regeneration, when the HFI status is tripped.", "rootCause": "unknown", "scope": "model", "severity": "stop", "sources": [ { "page": "120", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "120", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "120", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "96", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" } ], "targets": [ "pump:cti-on-board-is-single-stage" ] }, { "detection": "Check the type of regeneration being run and the accessories declared in the pump's configuration: Sublime Regeneration requires a TC gauge; without a declared TC gauge, sublimation is impossible and the turbopump is exposed at every warm-up.", "id": "fm:on-board-is-single-stage-warmup-regen-turbopump-liquid", "manufacturerAcknowledged": true, "mechanism": "On a single-stage cryopump connected to a turbopump, a warm-up regeneration lets the pump's pressure exceed atmospheric pressure, and the accumulated frost melts instead of subliming: the liquid can flow into the turbopump and destroy it permanently. Sublimation, by contrast, keeps the pump below atmospheric pressure while it warms up.", "mitigation": "Use a Sublime Regeneration when the single-stage cryopump is connected to a turbopump, and use Shutdown by sublimation to stop it, so that no liquid drips onto other system components.", "occurrence": "unknown", "onsetConditions": "When a warmup regeneration, is initiated while the cryopump is connected to a turbopump.", "rootCause": "misapplication", "scope": "model", "severity": "destructive", "sources": [ { "page": "52", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "52", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "53", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "53", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" }, { "page": "58", "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" } ], "targets": [ "pump:cti-on-board-is-single-stage" ] }, { "detection": "Press a key and check whether the display no longer refreshes, or read the module's status LED: steady green for correct operation, blinking green for an electronics fault. A display that is completely dark instead points to a loss of power.", "id": "fm:on-board-module-electronics-lockup", "manufacturerAcknowledged": true, "mechanism": "The module's electronics lock up: the display stops updating and/or the keys stop functioning, and the cryopump is no longer either controllable or monitored even though it keeps running. On the 300 mm PVD pump's module, a blinking green status LED — as opposed to a steady green — indicates a problem with the electronics module.", "mitigation": "Reboot by turning the power off and back on, using the On-Board switch located at the compressor controller, or via the cryopump's input power. If the fault persists, replace the electronic module.", "occurrence": "unknown", "rootCause": "unknown", "scope": "model", "severity": "degraded", "sources": [ { "page": "57", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "57", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "23", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" }, { "page": "39", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" }, { "page": "35", "source": "src:cryo-cti-on-board-gle-cryopump-8040564-revaa" } ], "targets": [ "pump:cti-on-board-10", "pump:cti-on-board-10f", "pump:cti-on-board-250f", "pump:cti-on-board-250fh", "pump:cti-on-board-4", "pump:cti-on-board-400-high-capacity", "pump:cti-on-board-400-standard-capacity", "pump:cti-on-board-4f", "pump:cti-on-board-500", "pump:cti-on-board-6", "pump:cti-on-board-8", "pump:cti-on-board-8-gle", "pump:cti-on-board-8f", "pump:cti-on-board-8f-300mm-pvd", "pump:cti-on-board-8f-gle", "pump:cti-on-board-enhanced-8f" ] }, { "detection": "Without disassembling the pump, check the inside diameter of the exhaust line and manifold against the released gas load, and verify that the clearance volume around the relief valve has remained open: the regenerated gas path must be clear.", "id": "fm:on-board-regen-exhaust-flow-restriction", "manufacturerAcknowledged": true, "mechanism": "During regeneration, the cryopumped species undergo a rapid expansion inside the cryopump. If flow is restricted at the exhaust port or exhaust line — an obstructed line, an undersized manifold, a cluttered relief-valve clearance volume — the internal pressure of the cryopump rises rapidly, and this internal overpressure can propel particles or parts and cause severe injury.", "mitigation": "Size the exhaust for the released gas load: a minimum of 1/2 inch inside diameter for an enhanced On-Board 8F manifold, typically 5/8 inch for a single cryopump over about 10 feet of line. Keep the clearance volume around the relief valve open.", "occurrence": "unknown", "onsetConditions": "At every regeneration, as soon as the exhaust line or manifold is undersized or obstructed, or the clearance around the relief valve has been obstructed during installation.", "rootCause": "installation", "scope": "model", "severity": "safety", "sources": [ { "page": "14", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "14", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "51", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "51", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "29", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" } ], "targets": [ "pump:cti-on-board-10", "pump:cti-on-board-10f", "pump:cti-on-board-250f", "pump:cti-on-board-250fh", "pump:cti-on-board-4", "pump:cti-on-board-400-high-capacity", "pump:cti-on-board-400-standard-capacity", "pump:cti-on-board-4f", "pump:cti-on-board-500", "pump:cti-on-board-6", "pump:cti-on-board-8", "pump:cti-on-board-8f", "pump:cti-on-board-8f-300mm-pvd", "pump:cti-on-board-enhanced-8f" ] }, { "detection": "Query the regeneration step: module responses D, F, and G indicate a purge gas failure. Bit 02H of the regeneration flags response carries the same information. Then check the nitrogen supply to the purge valve.", "id": "fm:on-board-regen-purge-gas-loss", "manufacturerAcknowledged": true, "mechanism": "Purge nitrogen no longer reaches the purge valve during regeneration. The module detects this, refuses to turn on the heaters, and lowers the warm-up target to 285 K: the trapped gases and water vapor are no longer diluted or swept out of the pump, and the regeneration ends without having cleaned the arrays.", "mitigation": "Restore a nitrogen supply between 40 and 80 psig to the purge valve, not exceeding 80 psig, before restarting a regeneration.", "notes": "Taken from the On-Board module's programming manual, which does not name any individual model but collectively designates the 'On-Board Cryopump'; the model scope retained here is the sixteen On-Board cryopumps outside the IS range, whose three manuals (8040491, 8040564, 8040509) explicitly refer to the 'On-Board Module Programming and Operation Instructions'. Excluded are the ten Cryo-Torr units, which regenerate by manual purge without a module (8040613 p.46), the seven On-Board IS units, whose installation manual 8040596 never refers to the module manual, and the Marathon CP-20, a Sumitomo pump. The 285 K target and the heater inhibition are behaviors of the module, not of the pump.", "occurrence": "unknown", "onsetConditions": "As early as the warmup phase of a full regeneration, when the nitrogen supply to the purge valve is cut off or too low.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": "101", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "13", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "92", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "94", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" } ], "targets": [ "pump:cti-on-board-10", "pump:cti-on-board-10f", "pump:cti-on-board-250f", "pump:cti-on-board-250fh", "pump:cti-on-board-4", "pump:cti-on-board-400-high-capacity", "pump:cti-on-board-400-standard-capacity", "pump:cti-on-board-4f", "pump:cti-on-board-500", "pump:cti-on-board-6", "pump:cti-on-board-8", "pump:cti-on-board-8-gle", "pump:cti-on-board-8f", "pump:cti-on-board-8f-300mm-pvd", "pump:cti-on-board-8f-gle", "pump:cti-on-board-enhanced-8f" ] }, { "detection": "Listen to the rough valve when a regeneration command is issued: a click with no opening or closing proves that the electrical command is indeed reaching the pilot and points to a lack of air. Then measure the air pressure at the pilot inlet, without disassembling anything, and compare it to the prescribed range.", "id": "fm:on-board-rough-valve-drive-air-underpressure", "manufacturerAcknowledged": true, "mechanism": "All the valves of the multifunction valve are actuated by compressed air, except the relief valve. When the pilot air pressure falls below the prescribed minimum, the pilot switches and clicks but no longer has the energy to open or close the rough valve: the roughing phase of regeneration does not happen and the cycle cannot complete.", "mitigation": "Increase the drive air pressure into the prescribed range: 60 psig minimum, 80 psig maximum.", "notes": "Add: \"Severity `stop` inferred: the sources note that the valve clicks without opening or closing; none states that the regeneration cycle fails.\"", "occurrence": "unknown", "onsetConditions": "When the control air pressure falls below the 60 psig minimum.", "rootCause": "installation", "scope": "model", "severity": "stop", "sources": [ { "page": "57", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "57", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "39", "source": "src:cryo-cti-on-board-8f-cryopump-300mm-pvd-8040509" }, { "page": "35", "source": "src:cryo-cti-on-board-gle-cryopump-8040564-revaa" }, { "page": "112", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "112", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" }, { "page": "112", "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" } ], "targets": [ "pump:cti-on-board-10", "pump:cti-on-board-10f", "pump:cti-on-board-250f", "pump:cti-on-board-250fh", "pump:cti-on-board-4", "pump:cti-on-board-400-high-capacity", "pump:cti-on-board-400-standard-capacity", "pump:cti-on-board-4f", "pump:cti-on-board-500", "pump:cti-on-board-6", "pump:cti-on-board-8", "pump:cti-on-board-8-gle", "pump:cti-on-board-8f", "pump:cti-on-board-8f-300mm-pvd", "pump:cti-on-board-8f-gle", "pump:cti-on-board-enhanced-8f", "pump:cti-on-board-is-8f" ] }, { "detection": "Read the state of the roughing valve interlock in the regeneration parameters, then query the valve token: the response indicates whether the pump holds the token or is requesting it, which distinguishes this wait from a genuine valve fault.", "id": "fm:on-board-rough-valve-interlock-misset", "manufacturerAcknowledged": true, "mechanism": "The roughing valve interlock left active on a pump that does not belong to a roughing valve group makes the module wait for a permission that will never come: the rough valve does not open and the pump remains indefinitely in the rough-share wait mode. Regeneration no longer advances.", "mitigation": "Set the roughing valve interlock to off when the cryopump is not being operated within a roughing valve group.", "notes": "Drawn from the On-Board module programming manual. It names no pump model. Replacing a module requires reprogramming the process parameters, which is the typical occasion for this misconfiguration.", "occurrence": "unknown", "onsetConditions": "A pump operated alone, outside a roughing valve group, with the interlock left on after a change of installation or a module replacement.", "rootCause": "controller_mismatch", "scope": "model", "severity": "stop", "sources": [ { "page": "19", "source": "src:cryo-cti-brooks-on-board-cryopump-install-maintenance-8040491-revab" }, { "page": "29", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "29", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "35", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "35", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" }, { "page": "95", "source": "src:cryo-cti-on-board-cryopump-module-programming-operation-8040410-revaa" } ], "targets": [ "pump:cti-on-board-10", "pump:cti-on-board-10f", "pump:cti-on-board-250f", "pump:cti-on-board-250fh", "pump:cti-on-board-4", "pump:cti-on-board-400-high-capacity", "pump:cti-on-board-400-standard-capacity", "pump:cti-on-board-4f", "pump:cti-on-board-500", "pump:cti-on-board-6", "pump:cti-on-board-8", "pump:cti-on-board-8-gle", "pump:cti-on-board-8f", "pump:cti-on-board-8f-300mm-pvd", "pump:cti-on-board-8f-gle", "pump:cti-on-board-enhanced-8f" ] }, { "detection": "The machine heats up, and the power drawn by the motor rises with the pressure differential; the motor's temperature sensors eventually trip.", "id": "fm:roots-differential-pressure-overheat", "mechanism": "In a Roots booster, two impellers rotate in opposite directions without touching, separated from the housing by a very narrow clearance. This clearance limits the pressure differential and compression ratio that can be sustained between intake and discharge: beyond the allowable differential, the power dissipated by recompression can no longer be evacuated, and the machine heats up. The power drawn follows this pressure differential directly.", "mitigation": "Only switch on the booster at the switch-on pressure calculated from the allowable pressure differential and the compression ratio, and control it with a pressure switch so that it runs only within the allowable range.", "occurrence": "recurrent", "onsetConditions": "As soon as the pressure differential between the intake flange and the discharge flange exceeds the allowable value: pumping ratio too large with the backing pump, booster switched on at too high a pressure, or a gas load that raises the discharge pressure.", "rootCause": "misapplication", "scope": "family", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "targets": [ "fam:roots-booster" ] }, { "detection": "The pump heats up and the power drawn by the motor is too high, with no electrical cause and no pressure-related cause.", "id": "fm:ruvac-bearing-lubricant-contamination-friction", "mechanism": "Fouled bearings and contaminated lubricant raise the frictional resistance, of the shaft line. The pump heats up and the motor draws more power.", "mitigation": "Change the lubricant; have the bearings replaced by the service department if they are faulty.", "occurrence": "recurrent", "onsetConditions": "After prolonged service on a dirty process, or when dust has reached the oil chambers.", "rootCause": "process_contamination", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "The pump heats up at atmospheric startup, even though nothing obstructs the cooling.", "id": "fm:ruvac-bypass-valve-fails-to-open", "mechanism": "Stuck closed, the pressure balance line valve no longer opens when the pressure differential between the flanges becomes too large. The protection this line provides against excessive pressure differentials is lost, and the pump heats up.", "mitigation": "Clean or repair the pressure balance line valve.", "occurrence": "recurrent", "onsetConditions": "Only on the variants fitted with a pressure balance line (WAU, WSU), typically at startup at atmospheric pressure together with the backing pump, the moment at which the valve must open.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "targets": [ "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "The pump heats up and becomes noisy after installation or relocation; turning the rotor by hand reveals resistance.", "id": "fm:ruvac-casing-distortion-clearance-loss", "mechanism": "Stress or twist transmitted to the casing by badly shimmed feet, or by the piping, changes the close tolerances between the impellers and the casing. The clearance closes up on one side: the pump heats up, becomes noisy, and may be damaged.", "mitigation": "Install the pump on a flat surface, shim with washers so that no stress or twist is taken up by the casing, and fit compensation elements on the intake and discharge flanges.", "occurrence": "recurrent", "onsetConditions": "When the feet are bolted down without compensation washers, or when the intake and discharge lines are connected without compensation elements and pull on the flanges.", "rootCause": "installation", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "The oiler level drops, and needs frequent topping up, even though no oil appears under the shaft seal housing.", "id": "fm:ruvac-inner-shaft-seal-failure", "mechanism": "On the RA and the WA/WAU, the shaft feedthrough between the evacuated bearing chamber and the atmosphere is sealed by two shaft seals bathed in oil in a housing with its own separate oiler. When the inner seal fails, oil from the shaft seal housing passes into the bearing spaces and creates there an unacceptably high oil level, without any leak being visible from the outside.", "mitigation": "Stop the pump immediately and have it repaired; replace the shaft seals, the sleeve, and the O-ring with new parts.", "occurrence": "recurrent", "onsetConditions": "Wear of the shaft seals, which rub against a fitted sleeve intended to limit shaft wear. Does not apply to the WH/WHU or the WS/WSU, whose canned motor eliminates the shaft feedthrough.", "rootCause": "wear", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501" ] }, { "detection": "Pump noise increases without the impeller-to-casing clearance or the bearings being at fault; immediate shutdown is required by the manual.", "id": "fm:ruvac-integrated-oil-pump-obstruction", "mechanism": "The WA/WAU and WS/WSU carry an integrated oil pump in each of the two side chambers, tasked with supplying the bearings and gearwheels at all permitted speeds. Obstructed or failing, it shows up as abnormal noise, and immediate shutdown is prescribed.", "mitigation": "Stop the pump immediately, and hand it over to the service department.", "occurrence": "isolated", "onsetConditions": "Lubricant loaded with particles or degradation products that obstruct the integrated oil pump's circuit.", "rootCause": "process_contamination", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "targets": [ "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "Seizure or destruction of the pump; the impellers are deformed.", "id": "fm:ruvac-liquid-ingress-impeller-deformation", "mechanism": "Small quantities of liquid coming from the chamber or the piping are enough to cause liquid damage inside the pump: the impellers deform and the pump can be entirely destroyed.", "mitigation": "Provide a separator or a T-piece on the intake line, install liquid separators upstream and downstream for wet processes, and lay the discharge line sloping down and away from the pump.", "occurrence": "isolated", "onsetConditions": "Wet processes without a liquid separator upstream and downstream, or a badly sloped discharge line that lets condensed vapours flow back into the pump.", "rootCause": "installation", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "The pump heats up; the lubricant has emulsified.", "id": "fm:ruvac-lubricant-emulsification-wrong-fill", "mechanism": "Synthetic oil and PFPE, or mineral oil and PFPE, emulsify when they come into contact. A machine filled with the wrong lubricant sees its friction rise and heats up; switching from one lubricant to another requires a full cleaning by the service department before refilling.", "mitigation": "Drain the lubricant, have the pump cleaned by the service department when switching between mineral oil, ester oil and PFPE, then fill with the specified lubricant.", "occurrence": "isolated", "onsetConditions": "At an oil change, when the lubricant poured in is not the one specified for the machine; PFPE-filled pumps carry a red label.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "targets": [ "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "Lubricant appears in the pumping chamber, without the level being too high or the pump tilted; the pump leaks towards the outside.", "id": "fm:ruvac-oil-fill-port-air-leak-oil-mist-ingress", "mechanism": "The oil-fill port must be sealed air-tight. Under vacuum, an entry of air through this port carries oil-containing gas through the impeller seals into the pumping chamber.", "mitigation": "Clean the seating surface of the oil-fill port and refit the plug with a gasket in perfect condition; check the seating of the fill and drain plugs, and replace the gear cover O-ring.", "occurrence": "recurrent", "onsetConditions": "After a top-up or an oil change, when the plug has been refitted with a damaged gasket or onto a poorly cleaned seating surface.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "Lubricant is found in the pumping chamber, and the pump heats up.", "id": "fm:ruvac-oil-migration-into-pumping-chamber", "mechanism": "When the lubricant level is too high, or when the pump is not level, oil from the side chambers passes through the impeller seals, and reaches the pumping chamber; the pump may then overheat.", "mitigation": "Drain down to the correct level read at the sight glass, with the pump at standstill, and install the pump on a flat surface within the prescribed tilt limit.", "occurrence": "recurrent", "onsetConditions": "After an overly generous top-up, after tilted transport or storage, or on a pump installed on a surface that is not flat.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "The pump no longer starts, or the rotor no longer turns freely by hand.", "id": "fm:ruvac-seizure-hard-deposits-foreign-objects", "mechanism": "Process gases that form hard or sticky deposits, or a foreign object ingested through the intake flange, jam the impellers. The pump seizes; a leak from the housing to atmosphere cannot then be ruled out.", "mitigation": "Prevent the ingestion of particles with suitable filters or traps; with hazardous gases, the operator must ensure that a housing leak does not create a hazard. Repair by the service department.", "occurrence": "isolated", "onsetConditions": "Process gases forming hard or sticky deposits, or ingestion of an object (screw, nut, washer, weld bead) through the intake flange.", "rootCause": "process_contamination", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "Visible corrosion on internal parts, after a prolonged shutdown.", "id": "fm:ruvac-standstill-corrosion", "mechanism": "At standstill, residues left by work under corrosive gases, or a humid storage atmosphere, attack the machine. PFPE, unlike oil, has no conserving effect: a PFPE-filled pump left exposed to air corrodes all the faster.", "mitigation": "After work under corrosive gases, let the pump run for 30 to 60 minutes without process gas, then vent it with a dry protective gas (N2); blank off the flanges, and, for PFPE-filled pumps, flood with nitrogen and seal in a gas-tight manner.", "occurrence": "recurrent", "onsetConditions": "Shutdown or storage after work under corrosive gases, or storage in a humid atmosphere without sealing or desiccation.", "rootCause": "process_contamination", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "Sudden seizure; on opening the pump, the intake screen mesh is found ruptured and pieces are found inside the pump.", "id": "fm:ruvac-wh-intake-screen-rupture-atmospheric-shock", "mechanism": "In a fast-cycling application, the pump and the foreline are under vacuum when the isolation valve opens: the gas shock stresses the intake screen fitted as standard until, over time, its metal mesh ruptures and falls into the pump. Seizure follows, with possible rupture of the housing and possible ejection of particles.", "mitigation": "Keep the intake screen only during commissioning, then remove it; if the operator wants to keep it, relocate it between the isolation valve and the chamber, away from the atmospheric shock.", "occurrence": "recurrent", "onsetConditions": "Fast-cycling applications where the chamber is connected to the pump by a long foreline fitted with an isolation valve near the chamber, and where the intake screen has been left in place after commissioning.", "rootCause": "design", "scope": "model", "severity": "safety", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "targets": [ "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000" ] }, { "detection": "The shafts turn while the pump is stopped.", "id": "fm:ruvac-wh-reverse-rotation-by-backflow", "mechanism": "A backflow of gas through the pump, or a pressure difference between intake and discharge when several units are connected, turns the shafts uncontrollably in the direction opposite to normal running. Without an isolation valve on the intake side, a power failure thus turns the pump backwards: it may be damaged, or oil may contaminate the pump chamber. The inertia of the impellers also makes this a hazard when the pump is stopped.", "mitigation": "Fit an isolation valve on the intake side; before any maintenance work, return the chamber to discharge pressure or isolate it from the pump with valves, and lock the pump against unwanted rotation.", "occurrence": "recurrent", "onsetConditions": "When stopped, during a power failure, or before any maintenance work as long as the chamber has not been returned to discharge pressure or isolated by valves.", "rootCause": "installation", "scope": "model", "severity": "safety", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "targets": [ "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000" ] }, { "detection": "The pump heats up while the pressure balance valve is open; the cycle time exceeds the one for which the pump-down value from atmosphere is given.", "id": "fm:ruvac-whu-bypass-line-not-a-thermal-protection", "mechanism": "The WHU's pressure balance line links the discharge to the intake through a spring-loaded valve that opens when the differential pressure becomes too large. It was optimised for rapid pump-downs, not to protect the machine at high pressure: kept permanently open, it does not protect against thermal overload and the pump overheats.", "mitigation": "Reserve the WHU for short cycles of less than 2 minutes; for longer pump-downs, use a WH with a frequency converter. Beyond 100,000 cycles, use evacuation of the gearbox housing.", "occurrence": "recurrent", "onsetConditions": "When a WHU is kept for long periods at high pressure, instead of the short cycles of less than 2 minutes for which its balance line is designed.", "rootCause": "misapplication", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "targets": [ "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000" ] }, { "detection": "Under vacuum, briefly run the RUVAC: the pressure should drop; if it rises or stays constant, the direction is wrong. On the WH/WHU connected to the piping, the oil level on the motor side rises by 2-3 mm when the direction is wrong, whereas it stays constant or drops slightly when it is correct.", "id": "fm:ruvac-wrong-rotation-direction", "mechanism": "Two reversed phases make the impellers turn backwards. The pump then compresses towards the intake: the pressure rises on the intake side instead of dropping, and the machine may suffer severe damage.", "mitigation": "Cut off the power supply and swap two mains phases; never let the pump run for a long time in the wrong direction or with open flanges.", "occurrence": "recurrent", "onsetConditions": "After the motor is connected and after every wiring modification.", "rootCause": "installation", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "The pump overheats while the pump motor runs normally; the fan is stopped, or its direction of rotation does not follow the pump motor's phase reversal, because it is driven by a separate motor.", "id": "fm:ruvac-ws-fan-drive-not-supplied", "mechanism": "On the WS/WSU, the cooling fan has its own single-phase motor, supplied separately from the pump motor. If it is not connected, wrongly connected, or supplied outside its voltage range— the typical case when the pump is driven by a frequency converter — the fan is damaged or does not turn, and the pump overheats.", "mitigation": "Supply the fan through a separate cable at 230 V, 50/60 Hz or 265 V/60 Hz, without exceeding 265 V/60 Hz, and fit a transformer if the voltage differs. Never connect the fan to the pump motor's terminals.", "occurrence": "recurrent", "onsetConditions": "At electrical connection, and particularly when the pump is supplied by a frequency converter: the fan must then be connected to the mains by a separate cable.", "rootCause": "installation", "scope": "model", "severity": "stop", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "targets": [ "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "detection": "Oil leaks at the drain, and oil found in the bottom trough or in the pump chamber, after the work has been carried out.", "id": "fm:screwline-gear-oil-overfill-leak", "mechanism": "Overfilling the gear chamber, during maintenance, causes leaks through the drain and oil passing into the pump chamber; on the 630 the oil also overflows into the bottom trough. The risk is worsened by filling cold, thick oil at low temperature being easily overdosed.", "mitigation": "Drain below the maximum mark with the pump at standstill, run it for at least one hour, recheck the level, wipe off the escaped oil; fill the oil at room temperature and slowly.", "occurrence": "isolated", "onsetConditions": "During draining or topping up, when the level is brought above the maximum mark with the machine at standstill.", "rootCause": "maintenance_omission", "scope": "model", "severity": "degraded", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" }, { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "targets": [ "pump:leybold-screwline-sp-250", "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "detection": "The machine no longer starts because it has seized, and the casing seal can no longer be presumed intact.", "id": "fm:screwline-rotor-seizure-casing-leak", "mechanism": "Hard deposits or foreign objects seize the rotors, or the discharge line becomes blocked. In this malfunctioning state the casing seal is no longer guaranteed and leaks to the outside cannot be ruled out; with harmful gases, it is for the operator to ensure that this malfunction cannot occur.", "mitigation": "Have the pump repaired by the service department; fit the inlet screen supplied as standard and, for ATEX use, an additional fine-mesh dust filter.", "occurrence": "unknown", "onsetConditions": "Under a process that forms hard deposits, or after a foreign object has entered through the intake; also when the discharge line is blocked.", "rootCause": "process_contamination", "scope": "model", "severity": "safety", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" }, { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "targets": [ "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "detection": "System pressure rising too quickly after the pump has been shut down under vacuum, and oil found in the pumping chamber.", "id": "fm:screwline-sp250-reverse-venting-oil-contamination", "mechanism": "In the event of a power failure without an isolating valve on the intake line, the pressure difference between inlet and outlet makes the machine run backwards. The pump may be damaged by this, or the pumping chamber may become contaminated with oil through reverse venting via the shaft seal. A pump that has been switched off will in any case rise to ambient pressure within a few seconds, vented backwards through the exhaust as well as through the shaft-seal drain.", "mitigation": "Fit an isolating valve in the intake line that closes automatically on shutdown, and a non-return valve at the exhaust to prevent reverse venting.", "occurrence": "unknown", "onsetConditions": "At power failure, or at shutdown under vacuum, when no valve closes the intake automatically.", "rootCause": "installation", "scope": "model", "severity": "destructive", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" }, { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "targets": [ "pump:leybold-screwline-sp-250" ] }, { "detection": "Establish whether the pump operated exposed to a process plasma (etch, PVD, etc.).", "id": "fm:tmp-plasma-rotor-discharge", "manufacturerAcknowledged": true, "mechanism": "During a plasma process, the pump rotor can become electrically charged and then discharge, damaging the pump's electrical components.", "occurrence": "unknown", "onsetConditions": "Pump operation exposed to a process plasma, (etch, PVD, etc.).", "rootCause": "environment", "scope": "model", "severity": "destructive", "sources": [ { "page": "5", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "targets": [ "pump:shimadzu-tmp-3203", "pump:shimadzu-tmp-3203lm" ] }, { "detection": "Establish whether the pump was vented to atmosphere after evacuating a corrosive gas, without having been kept under vacuum or purged with inert gas after shutdown.", "id": "fm:tmp-post-shutdown-moisture-corrosion", "manufacturerAcknowledged": true, "mechanism": "After evacuating a corrosive gas, if the pump is not kept under vacuum (or purged with inert gas) after shutdown, the ingress of moisture from ambient air into the pump triggers rapid corrosion/erosion of the internal parts; another section of the same manual specifies that this corrosion can damage the interior of the vacuum vessel and other components, cause pressure fluctuations, and scatter parts at the moment the pump stops.", "mitigation": "Keep the pump under vacuum, or purge its interior with inert gas, after shutdown, for as long as it has evacuated a corrosive gas, before any venting to atmosphere.", "occurrence": "recurrent", "onsetConditions": "Venting to atmosphere (loss of the internal vacuum) of a pump that has evacuated a corrosive gas, without inert gas purge, and without maintaining vacuum after shutdown.", "rootCause": "maintenance_omission", "scope": "model", "severity": "destructive", "sources": [ { "page": "45", "source": "src:ptb-shimadzu-tmp-3203-3403" }, { "page": "5", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "targets": [ "pump:shimadzu-tmp-3203", "pump:shimadzu-tmp-3203lm" ], "timeToOnset": "Rapid in the manual's own words ('rapid erosion trouble'), not precisely quantified." }, { "detection": "Verify that the floor mounting or device fixation is sized to withstand 1.5 times the rated rapid shutdown torque (59,100 N·m for the TMP-3203M/MC/LM/LMC series).", "id": "fm:tmp-rapid-shutdown-torque-mount-failure", "manufacturerAcknowledged": true, "mechanism": "An abnormal rapid shutdown of the high-speed rotor generates a large reaction torque transmitted to the pump's mounting; if the device/floor is not designed to withstand this torque with margin, the pump detaches from its fixation, causing a catastrophe.", "mitigation": "Design the floor/device mounting to withstand 1.5 times the rated rapid shutdown torque (59,100 N·m for the TMP-3203M/MC/LM/LMC series), with a safety margin for an emergency accident.", "occurrence": "unknown", "onsetConditions": "Equipment/floor mounting not sized to withstand 1.5 times the nominal rapid shutdown torque, (59,100 N·m for the TMP-3203M/MC/LM/LMC series), at the moment of an abnormal abrupt rotor stop.", "rootCause": "installation", "scope": "model", "severity": "safety", "sources": [ { "page": "34", "source": "src:ptb-shimadzu-tmp-3203-3403" }, { "page": "4", "source": "src:ptb-shimadzu-tmp-3203-3403" }, { "page": "4", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "targets": [ "pump:shimadzu-tmp-3203", "pump:shimadzu-tmp-3203lm" ], "timeToOnset": "Immediate, at the moment of the abnormal rapid rotor shutdown." }, { "detection": "Read the property code following the model designation on the nameplate, and compare it to the fitted lubricant reservoir variant (single reservoir as standard). Prescribed replacement interval: at least every 3 years.", "id": "fm:tmu261-lubricant-reservoir-variant-mismatch", "manufacturerAcknowledged": true, "mechanism": "The lubricant reservoir (TL011) that feeds the forevacuum-side ceramic ball bearing exists in two versions depending on the pump's orientation variant: the standard version uses a single reservoir, the 'Y' version (installation in any orientation) additionally incorporates 8 Porex rods that wick lubricant by capillarity against gravity. The reservoir replacement procedure therefore depends on the pump type; applying the wrong procedure (e.g., omitting the Porex rods on a Y variant, or the reverse) deprives the forevacuum bearing of proper lubricant supply.", "mitigation": "Check the property code following the model designation on the nameplate before any intervention; follow the variant-specific procedure (single reservoir as standard, insertion of the 8 Porex rods for the 'Y' variant).", "occurrence": "unknown", "onsetConditions": "During a replacement of the lubricant reservoir, (prescribed interval: at least every 3 years), carried out without first checking the pump's property code on the nameplate (standard variant vs. 'Y'), hence with the procedure/part unsuited to the actual variant.", "rootCause": "misapplication", "scope": "model", "severity": "destructive", "sources": [ { "page": "25", "source": "src:t2-tmu261p" }, { "page": "25", "source": "src:t2-tmu261p" }, { "page": "27", "source": "src:t2-tmu261p" } ], "targets": [ "pump:pfeiffer-tmu-261" ] }, { "detection": "Determine whether a corrosive or particulate-laden process gas was pumped, and whether a gas purge valve was installed with sufficient flow around the upper bearing.", "id": "fm:tv301-corrosive-particulate-bearing-damage", "manufacturerAcknowledged": true, "mechanism": "A corrosive or particulate-laden process gas moves from the chamber into the pump's upper bearings and damages them, in the absence of sufficient inert purge gas flow around the upper bearing toward the foreline.", "mitigation": "Install a gas purge valve (Varian accessory, KF16 or 7/16 ports) and circulate an inert gas (N2, Ar) around the upper bearing toward the foreline.", "occurrence": "unknown", "onsetConditions": "Pumping a corrosive or particulate-laden process gas without an inert gas purge valve installed, or with insufficient purge flow.", "rootCause": "process_contamination", "scope": "model", "severity": "destructive", "sources": [ { "page": "91", "source": "src:tf-varian-turbo-v-301-manual" }, { "page": "94", "source": "src:tf-varian-turbo-v-301-manual" } ], "targets": [ "pump:varian-turbo-v-301" ] }, { "detection": "Inspect the pump envelope at the ISO inlet flange for dents created during tightening that could come into contact with the rotor.", "id": "fm:tv301-flange-dent-rotor-lock", "manufacturerAcknowledged": true, "mechanism": "Improper tightening of the ISO inlet flange nuts and bolts creates dents (indentations) in the pump envelope; these dents contact the rotor and cause it to lock.", "mitigation": "Tighten the nuts and bolts carefully, in a sequential/cross pattern, until the flange faces meet, without creating dents in the envelope.", "occurrence": "unknown", "onsetConditions": "Tightening the flanges without a cross/sequential procedure during high-vacuum flange assembly.", "rootCause": "installation", "scope": "model", "severity": "stop", "sources": [ { "page": "93", "source": "src:tf-varian-turbo-v-301-manual" } ], "targets": [ "pump:varian-turbo-v-301" ] }, { "detection": "Check for the presence of the protective inlet screen (mod. 969-9302 ISO100 or 969-9303 ISO160) on a line liable to carry solid debris greater than 0.7 mm in diameter.", "id": "fm:tv301-fod-blade-damage", "manufacturerAcknowledged": true, "mechanism": "Solid debris greater than 0.7 mm in diameter entering through the inlet flange strikes and damages the rotor blades, in the absence of the protective inlet screen.", "mitigation": "Install the inlet screen (accessory), at the cost of an approximate 10% reduction in pumping speed.", "occurrence": "unknown", "onsetConditions": "Inlet screen (mod. 969-9302 ISO100 or 969-9303 ISO160) not installed on a line liable to carry solid debris.", "rootCause": "installation", "scope": "model", "severity": "destructive", "sources": [ { "page": "86", "source": "src:tf-varian-turbo-v-301-manual" } ], "targets": [ "pump:varian-turbo-v-301" ] }, { "detection": "Determine whether an impact, oscillation, or harsh movement was applied to the pump while it was running.", "id": "fm:tv301-mechanical-shock-bearing-damage", "manufacturerAcknowledged": true, "mechanism": "A shock, oscillation, or harsh movement applied to the pump while it is operating (rotor at high speed) damages the bearings.", "mitigation": "Avoid impacts, oscillations, or harsh movements of the pump during operation.", "occurrence": "unknown", "onsetConditions": "Impact, oscillation, or harsh movement of the pump while it is running.", "rootCause": "misapplication", "scope": "model", "severity": "degraded", "sources": [ { "page": "72", "source": "src:tf-varian-turbo-v-301-manual" }, { "page": "72", "source": "src:tf-varian-turbo-v-301-manual" } ], "targets": [ "pump:varian-turbo-v-301" ] }, { "detection": "Error Code = 2 displayed (read via the controller manual, not detailed here); immediate pump stop.", "id": "fm:twistorr-304fs-bearing-overtemp-cutout", "manufacturerAcknowledged": true, "mechanism": "The NTC thermistor mounted near the upper bearing cuts power and stops the pump when its reading exceeds 60 °C, a protection against insufficient cooling (water or air).", "mitigation": "Ensure continuous active cooling (water or air fan) before and during operation; the pump must always be cooled before startup.", "occurrence": "unknown", "onsetConditions": "Thermistor reading above 60 °C, typically from cooling that is absent, undersized or interrupted (water channel not connected, optional fan not installed or faulty).", "rootCause": "misapplication", "scope": "model", "severity": "stop", "sources": [ { "page": "247", "source": "src:tf-agilent-twistorr-304-manual" } ], "targets": [ "pump:agilent-twistorr-304-fs" ] }, { "detection": "Without disassembly: at power-up, pump voltage collapses and current pins at the control unit's short-circuit current. The discrimination step is given by the manual: disconnect the high-voltage connector FROM THE PUMP; if the voltage stays low with the connector disconnected, the short circuit is in the power supply or the cable, not in the pump. The manufacturer expressly warns that an ohmmeter check on the feedthrough may find nothing.", "id": "fm:vacion-plus-anode-cathode-short-mechanical-shock", "mechanism": "A mechanical shock to the pump displaces the internal geometry to the point of bringing the anode into contact with the cathodes, or a cathode into contact with the pump body. The clearance between the cells and the plates is then eliminated and high voltage can no longer be established: the power supply draws its short-circuit current and its voltage collapses. The Penning discharge can no longer strike, and the pump stops pumping.", "mitigation": "The manual prescribes no on-site repair: it instructs contacting the manufacturer if the pump is shorted.", "notes": "Section 'Short Circuits', attested word for word by five of the seven size manuals. This mode is NOT in the troubleshooting table — it lives in the installation section, which is why it is missed by a reading that reads only the table. Two limitations of the document: it does not say what intensity of shock is enough, and it does not say whether the short circuit is reversible. The component tag is too poor here: the document names an anode-cathode PAIR (and a cathode-to-pump-body pair), the closed list offers only a single component — the cathode was retained, being the component common to both named pairs. Scope is model and not family: a single manufacturer, a single product line.", "occurrence": "unknown", "onsetConditions": "After a shock, a fall or a sudden vibration — the manufacturer warns from unpacking onwards against any drop, any sudden impact and any shock vibration. Observed at the next power-up.", "scope": "model", "severity": "stop", "sources": [ { "page": "27", "source": "src:agilent-vacion-plus-20-manual-idealvac" }, { "page": "27", "source": "src:agilent-vacion-plus-20-manual-idealvac" }, { "page": "3", "source": "src:agilent-vacion-plus-300" }, { "page": "35", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" }, { "page": "67", "source": "src:agilent-vacion-plus-500-manual-idealvac" } ], "targets": [ "pump:agilent-vacion-plus-150-diode", "pump:agilent-vacion-plus-150-noble-diode", "pump:agilent-vacion-plus-150-starcell", "pump:agilent-vacion-plus-20-diode", "pump:agilent-vacion-plus-20-noble-diode", "pump:agilent-vacion-plus-20-starcell", "pump:agilent-vacion-plus-300-diode", "pump:agilent-vacion-plus-300-noble-diode", "pump:agilent-vacion-plus-300-starcell", "pump:agilent-vacion-plus-40-diode", "pump:agilent-vacion-plus-40-noble-diode", "pump:agilent-vacion-plus-40-starcell", "pump:agilent-vacion-plus-500-diode", "pump:agilent-vacion-plus-500-noble-diode", "pump:agilent-vacion-plus-500-starcell", "pump:agilent-vacion-plus-55-diode", "pump:agilent-vacion-plus-55-noble-diode", "pump:agilent-vacion-plus-55-starcell", "pump:agilent-vacion-plus-75-diode", "pump:agilent-vacion-plus-75-noble-diode", "pump:agilent-vacion-plus-75-starcell" ] }, { "detection": "On the power supply ammeter, during bakeout: the current exceeds the allowed value, which is specific to each pump size. The manual requires leaving the control unit on and monitoring the pressure throughout the bakeout, and permits an automatic control relay to cut the heaters on a pressure threshold.", "id": "fm:vacion-plus-bakeout-discharge-current-excursion", "mechanism": "During bakeout, the pump remains powered and continues pumping the gas that the heating strips off the surfaces. If outgassing is too violent -- heating too fast, or the pump already loaded from operation at high gas load -- the pressure in the cell rises and the discharge current rises with it beyond the bake current the manufacturer allows. Bakeout must then be interrupted and resumed only once low pressure is restored.", "mitigation": "Turn the bakeout off, then back on once low pressure is restored. Heat approximately evenly on all surfaces, otherwise the evaporated water recondenses on the colder surfaces and the bakeout remains incomplete.", "notes": "Attested by five of the seven size manuals. HONEST LIMITATION: the document gives a threshold and a corrective action but NAMES NO DAMAGE — it does not say what is risked by exceeding it. On that count this is a weak mode, and it is offered while saying so. VALUES BY SIZE, bakeout procedure: 50 mA (20, 300, 500), 15 mA (40/55/75), 25 mA (150). INTERNAL CONTRADICTION MEASURED, in the size-20 document alone: its specifications table gives 'Max baking current 10 mA' while its own bakeout procedure gives 50 mA — a factor of five, within the same document, thirty pages apart. The other four documents are consistent between their table and their procedure. No arbitration is made here: both values are delivered and the discrepancy is named. TEMPERATURE DIVERGENCE: 150 to 220 °C in four documents, 150 to 250 °C in the 40/55/75 document alone. Scope is model and not family: a single manufacturer, a single product line.", "occurrence": "recurrent", "onsetConditions": "During bakeout, with the pump energized, in particular when the temperature rise is not even across all surfaces, or when the pump has been operated under a heavy gas load.", "scope": "model", "severity": "degraded", "sources": [ { "page": "34", "source": "src:agilent-vacion-plus-150-manual-idealvac" }, { "page": "15", "source": "src:agilent-vacion-plus-20-manual-idealvac" }, { "page": "36", "source": "src:agilent-vacion-plus-20-manual-idealvac" }, { "page": "43", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" }, { "page": "43", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" }, { "page": "75", "source": "src:agilent-vacion-plus-500-manual-idealvac" } ], "targets": [ "pump:agilent-vacion-plus-150-diode", "pump:agilent-vacion-plus-150-noble-diode", "pump:agilent-vacion-plus-150-starcell", "pump:agilent-vacion-plus-20-diode", "pump:agilent-vacion-plus-20-noble-diode", "pump:agilent-vacion-plus-20-starcell", "pump:agilent-vacion-plus-300-diode", "pump:agilent-vacion-plus-300-noble-diode", "pump:agilent-vacion-plus-300-starcell", "pump:agilent-vacion-plus-40-diode", "pump:agilent-vacion-plus-40-noble-diode", "pump:agilent-vacion-plus-40-starcell", "pump:agilent-vacion-plus-500-diode", "pump:agilent-vacion-plus-500-noble-diode", "pump:agilent-vacion-plus-500-starcell", "pump:agilent-vacion-plus-55-diode", "pump:agilent-vacion-plus-55-noble-diode", "pump:agilent-vacion-plus-55-starcell", "pump:agilent-vacion-plus-75-diode", "pump:agilent-vacion-plus-75-noble-diode", "pump:agilent-vacion-plus-75-starcell" ] }, { "detection": "Without disassembly, and via two channels at once: a popping sound, and a pump current that fluctuates instead of decreasing. The healthy behaviour is given alongside in the same document: a healthy, leak-free pump sees its pressure fall to the 10^-8 mbar range -- 'within 10 minutes' in the 20, 300 and 500 manuals, 'quickly' in the 40/55/75 and 150 manuals.", "id": "fm:vacion-plus-feedthrough-arc-at-atmosphere", "mechanism": "When high voltage is applied while the inside of the pump is at or near atmospheric pressure, the dense gas no longer insulates: an arc strikes inside the high-voltage feedthrough itself. The arc makes an audible popping sound and makes the pump current unstable. The manufacturer requires turning the power off immediately.", "mitigation": "Turn the power off immediately. Then leak-check with a mass spectrometer leak detector before any installation on the system.", "notes": "Attested by five of the seven size manuals, section 'Vacuum Evaluation', item 4b. WHAT THE DOCUMENT DOES NOT SAY, and it matters: it orders an immediate switch-off but names NO damage— severity was therefore classified as a shutdown and not as destructive, for want of the document saying so. Note that this mode gives a real ACOUSTIC symptom on a pump with no rotating part: the brief announced this channel as probably silent for ion pumps; it is not silent here. Not to be confused with a feedthrough leak: here the feedthrough is intact, it is the inside of the pump that is at atmosphere. Scope is model and not family: a single manufacturer, a single product line.", "occurrence": "unknown", "onsetConditions": "At power-up of a pump whose transport seal has been lost (an opened tip-off pinch, a leak during storage), typically during the vacuum-integrity check recommended before installation, even before mounting on the vacuum vessel.", "scope": "model", "severity": "stop", "sources": [ { "page": "26", "source": "src:agilent-vacion-plus-20-manual-idealvac" }, { "page": "34", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" }, { "page": "66", "source": "src:agilent-vacion-plus-500-manual-idealvac" } ], "targets": [ "pump:agilent-vacion-plus-150-diode", "pump:agilent-vacion-plus-150-noble-diode", "pump:agilent-vacion-plus-150-starcell", "pump:agilent-vacion-plus-20-diode", "pump:agilent-vacion-plus-20-noble-diode", "pump:agilent-vacion-plus-20-starcell", "pump:agilent-vacion-plus-300-diode", "pump:agilent-vacion-plus-300-noble-diode", "pump:agilent-vacion-plus-300-starcell", "pump:agilent-vacion-plus-40-diode", "pump:agilent-vacion-plus-40-noble-diode", "pump:agilent-vacion-plus-40-starcell", "pump:agilent-vacion-plus-500-diode", "pump:agilent-vacion-plus-500-noble-diode", "pump:agilent-vacion-plus-500-starcell", "pump:agilent-vacion-plus-55-diode", "pump:agilent-vacion-plus-55-noble-diode", "pump:agilent-vacion-plus-55-starcell", "pump:agilent-vacion-plus-75-diode", "pump:agilent-vacion-plus-75-noble-diode", "pump:agilent-vacion-plus-75-starcell" ] }, { "detection": "Without disassembly: the pump's starting time lengthens from one restart to the next, with no leak or electrical anomaly appearing. The manufacturer gives the normal behaviour alongside, not to be confused with this: a slight pressure rise at the start-up of an ion pump is normal, as the internal components heat up and outgas.", "id": "fm:vacion-plus-titanium-water-hydrogen-restart-delay", "mechanism": "The sputtered titanium lining the inside of the pump forms hygroscopic deposits, and the titanium also absorbs the hydrogen it has pumped. On every exposure to air, these titanium-compound deposits absorb water vapour. At the next start-up, the pump's own heating releases this water vapour AND some of the previously pumped hydrogen: the pump must then pay off its own internal load before it can pump down, and its starting time lengthens. The mechanism is cumulative: it worsens with the pump's age.", "mitigation": "The manual prescribes three actions: vent to air with clean, dry nitrogen, to avoid water absorption on the pump surfaces and make subsequent pump-downs easier; do not use an oil-sealed mechanical pump for roughing, or else fit the line with a trap; bake out the pump and system to outgas the surfaces of their water vapour.", "notes": "Attested by five of the seven size manuals, in the 'Use' section of chapter 4, in identical terms. This is the only AGING mechanism these documents describe outside the service-life figures of the specifications table— and it is indeed a PUMP mechanism, not a chamber one: the titanium concerned is that of the pump. CHANNEL TO BE DECIDED AT THE MERGE: the start-up duration was placed on the cycle-time channel, which the brief announced as probably silent for these pumps. The reason given by the brief is the absence of a rotating part; but what is at stake here is a commissioning duration, not a rotation cycle. If the merge refuses this use, the symptom falls back to the other channel, and that is said here rather than forcing the pressure channel. WHAT THE DOCUMENT DOES NOT SAY: no figure, neither a nominal start-up duration, nor a degraded duration, nor a number of vent-to-air cycles beyond which the effect becomes noticeable. Scope is model and not family: a single manufacturer, a single product line.", "occurrence": "recurrent", "onsetConditions": "On successive start-ups, after each exposure to air, and increasingly with the age of the pump.", "scope": "model", "severity": "nuisance", "sources": [ { "page": "6", "source": "src:agilent-vacion-plus-20-manual-idealvac" }, { "page": "38", "source": "src:agilent-vacion-plus-300" }, { "page": "45", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" }, { "page": "45", "source": "src:agilent-vacion-plus-500-manual-idealvac" }, { "page": "45", "source": "src:agilent-vacion-plus-500-manual-idealvac" } ], "targets": [ "pump:agilent-vacion-plus-150-diode", "pump:agilent-vacion-plus-150-noble-diode", "pump:agilent-vacion-plus-150-starcell", "pump:agilent-vacion-plus-20-diode", "pump:agilent-vacion-plus-20-noble-diode", "pump:agilent-vacion-plus-20-starcell", "pump:agilent-vacion-plus-300-diode", "pump:agilent-vacion-plus-300-noble-diode", "pump:agilent-vacion-plus-300-starcell", "pump:agilent-vacion-plus-40-diode", "pump:agilent-vacion-plus-40-noble-diode", "pump:agilent-vacion-plus-40-starcell", "pump:agilent-vacion-plus-500-diode", "pump:agilent-vacion-plus-500-noble-diode", "pump:agilent-vacion-plus-500-starcell", "pump:agilent-vacion-plus-55-diode", "pump:agilent-vacion-plus-55-noble-diode", "pump:agilent-vacion-plus-55-starcell", "pump:agilent-vacion-plus-75-diode", "pump:agilent-vacion-plus-75-noble-diode", "pump:agilent-vacion-plus-75-starcell" ] }, { "detection": "Without disassembly: degraded pumping performance at low pressure that does not recover after a normally conducted high-temperature bakeout — this failure to recover after bakeout is what signs this failure mode and separates it from chamber outgassing modes.", "id": "fm:vacion-plus-venting-contamination-not-bakeable", "mechanism": "When the pump is vented to atmosphere in a polluted environment, atmospheric pollution and dust enter the pump body and settle there. This contamination is NOT removed by the standard high-temperature bakeout procedure: it remains in the pump and durably degrades its performance. The degradation is therefore irreversible by ordinary means.", "mitigation": "The source gives no curative remedy: only prevention. Open the pinch-off tubulation in a clean area free from smoke, dust, and pollen; vent to dry nitrogen with the pump placed under a clean polyethylene bag purged for several minutes; never open the pinch-off seal with a saw or grinder, as these methods draw metal particles into the pump through the inrushing air.", "notes": "RESTRICTED AND DELIBERATE SCOPE: the sentence that founds the irreversibility — 'This type of contamination will not be removed by the standard high temperature bake procedure and may degrade ion pump performance' — exists ONLY in the 40/55/75 manual. I searched for it in the four other documents: it is absent there, those saying only 'This avoids accumulation of dust and other undesirable materials'. I therefore target only the nine 40, 55 and 75 models of the reference database, and not the twenty-one. The warning against the saw and the grinder, for its part, is present in all five documents, but it names only the entry of metal particles without naming the consequence: I attach it as evidence of prevention and not as a separate mechanism. The document does not quantify the degradation.", "occurrence": "unknown", "onsetConditions": "When the pump is vented back to air, when the pinch-off tubulation is opened, and at every subsequent opening of the inlet flange carried out outside a clean area.", "scope": "model", "severity": "degraded", "sources": [ { "page": "37", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" }, { "page": "37", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" }, { "page": "37", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "targets": [ "pump:agilent-vacion-plus-40-diode", "pump:agilent-vacion-plus-40-noble-diode", "pump:agilent-vacion-plus-40-starcell", "pump:agilent-vacion-plus-55-diode", "pump:agilent-vacion-plus-55-noble-diode", "pump:agilent-vacion-plus-55-starcell", "pump:agilent-vacion-plus-75-diode", "pump:agilent-vacion-plus-75-noble-diode", "pump:agilent-vacion-plus-75-starcell" ] } ], "failureModesBlocked": [ { "id": "fm:cryo-ambient-overtemperature-heat-load", "scope": "family", "targets": [ "fam:cryo-gm" ] }, { "id": "fm:cryo-cold-head-magnetic-field-disturbance", "scope": "family", "targets": [ "fam:cryo-gm" ] }, { "id": "fm:cryo-cryopanel-thermal-short", "scope": "family", "targets": [ "fam:cryo-gm" ] }, { "id": "fm:cryo-frontal-array-thermal-overload", "scope": "family", "targets": [ "fam:cryo-gm" ] }, { "id": "fm:cryo-helium-lines-reversed-or-unseated", "scope": "family", "targets": [ "fam:cryo-gm" ] }, { "id": "fm:cryo-power-fail-unplanned-regen", "scope": "family", "targets": [ "fam:cryo-gm" ] }, { "id": "fm:cryo-regen-rough-out-stall", "scope": "family", "targets": [ "fam:cryo-gm" ] }, { "id": "fm:dryvac-claw-sens-rotation-inverse", "scope": "model", "targets": [ "pump:leybold-dryvac-100p", "pump:leybold-dryvac-100s", "pump:leybold-dryvac-25p", "pump:leybold-dryvac-50p", "pump:leybold-dryvac-50s", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "id": "fm:dryvac-claw-silencieux-echappement-colmate", "scope": "model", "targets": [ "pump:leybold-dryvac-100p", "pump:leybold-dryvac-100s", "pump:leybold-dryvac-25p", "pump:leybold-dryvac-50p", "pump:leybold-dryvac-50s", "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "id": "fm:dryvac-dv-huile-noircie", "scope": "model", "targets": [ "pump:leybold-dryvac-dv1200", "pump:leybold-dryvac-dv450", "pump:leybold-dryvac-dv450-r", "pump:leybold-dryvac-dv650", "pump:leybold-dryvac-dv650-r" ] }, { "id": "fm:dryvac-dv1200-rotation-inverse-vis-arretee", "scope": "model", "targets": [ "pump:leybold-dryvac-dv1200" ] }, { "id": "fm:dryvac-p-temperature-moteur-depots", "scope": "model", "targets": [ "pump:leybold-dryvac-100p", "pump:leybold-dryvac-25p", "pump:leybold-dryvac-50p" ] }, { "id": "fm:dryvac-s-alarme-azote-muette", "scope": "model", "targets": [ "pump:leybold-dryvac-100s", "pump:leybold-dryvac-50s" ] }, { "id": "fm:dryvac-set-bruit-roots", "scope": "model", "targets": [ "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "id": "fm:dryvac-set-huile-roots-en-chambre", "scope": "model", "targets": [ "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "id": "fm:dryvac-set-surchauffe-moteur-roots", "scope": "model", "targets": [ "pump:leybold-dryvac-set-251s", "pump:leybold-dryvac-set-501s" ] }, { "id": "fm:ebara-a-series-booster-no-start", "scope": "model", "targets": [ "pump:ebara-a30w", "pump:ebara-a70w" ] }, { "id": "fm:ebara-a07v-bearing-temperature", "scope": "model", "targets": [ "pump:ebara-a07v" ] }, { "id": "fm:ebara-drypump-byproduct-deposit", "scope": "model", "targets": [ "pump:ebara-a07v", "pump:ebara-a10s", "pump:ebara-a25s", "pump:ebara-a30w", "pump:ebara-a70w", "pump:ebara-esa200w", "pump:ebara-esa25-d", "pump:ebara-esa500w", "pump:ebara-esa70w", "pump:ebara-esa70wn", "pump:ebara-esr200wn", "pump:ebara-esr20n", "pump:ebara-esr80wn" ] }, { "id": "fm:ebara-drypump-dilution-n2-loss", "scope": "model", "targets": [ "pump:ebara-esa200w", "pump:ebara-esa25-d", "pump:ebara-esa500w", "pump:ebara-esa70w", "pump:ebara-esa70wn", "pump:ebara-esr200wn", "pump:ebara-esr20n", "pump:ebara-esr80wn" ] }, { "id": "fm:ebara-drypump-fault-latch-startfail", "scope": "model", "targets": [ "pump:ebara-a07v", "pump:ebara-a10s", "pump:ebara-a25s", "pump:ebara-a30w", "pump:ebara-a70w", "pump:ebara-esa200w", "pump:ebara-esa25-d", "pump:ebara-esa500w", "pump:ebara-esa70w", "pump:ebara-esa70wn", "pump:ebara-esr200wn", "pump:ebara-esr20n", "pump:ebara-esr80wn" ] }, { "id": "fm:ebara-drypump-shaft-seal-n2-loss", "scope": "model", "targets": [ "pump:ebara-a07v", "pump:ebara-a10s", "pump:ebara-a25s", "pump:ebara-a30w", "pump:ebara-a70w", "pump:ebara-esa200w", "pump:ebara-esa25-d", "pump:ebara-esa70w", "pump:ebara-esa70wn" ] }, { "id": "fm:ebara-esa-back-pressure-sensor-fault", "scope": "model", "targets": [ "pump:ebara-esa25-d", "pump:ebara-esa70w", "pump:ebara-esa70wn" ] }, { "id": "fm:ebara-esa-booster-motor-step-out", "scope": "model", "targets": [ "pump:ebara-esa200w" ] }, { "id": "fm:ebara-esa-process-gas-load-increase", "scope": "model", "targets": [ "pump:ebara-esa200w", "pump:ebara-esa25-d", "pump:ebara-esa500w", "pump:ebara-esr200wn", "pump:ebara-esr20n", "pump:ebara-esr80wn" ] }, { "id": "fm:ebara-esa25-reverse-rotation", "scope": "model", "targets": [ "pump:ebara-esa25-d" ] }, { "id": "fm:ebara-esa300w-defaut-phase", "scope": "model", "targets": [ "pump:ebara-esa300w", "pump:ebara-esa300w-h" ] }, { "id": "fm:ebara-esa300w-huile-niveau", "scope": "model", "targets": [ "pump:ebara-esa300w", "pump:ebara-esa300w-h", "pump:ebara-esa500w", "pump:ebara-esr200wn", "pump:ebara-esr20n", "pump:ebara-esr80wn" ] }, { "id": "fm:ebara-esa300w-refoulement-restreint-silencieux", "scope": "model", "targets": [ "pump:ebara-esa300w" ] }, { "id": "fm:ebara-esa70w-dilution-valve-overopened", "scope": "model", "targets": [ "pump:ebara-esa70w", "pump:ebara-esa70wn" ] }, { "id": "fm:ebara-ev-s-coffret-ambiant-chaud", "scope": "model", "targets": [ "pump:ebara-ev-s100", "pump:ebara-ev-s20", "pump:ebara-ev-s200", "pump:ebara-ev-s50" ] }, { "id": "fm:ebara-ev-s-fusible-principal", "scope": "model", "targets": [ "pump:ebara-ev-s100", "pump:ebara-ev-s20", "pump:ebara-ev-s200", "pump:ebara-ev-s50" ] }, { "id": "fm:ebara-ev-s-renversement-huile", "scope": "model", "targets": [ "pump:ebara-ev-a10", "pump:ebara-ev-s100", "pump:ebara-ev-s20", "pump:ebara-ev-s200", "pump:ebara-ev-s50" ] }, { "id": "fm:ecodry-faulty-bearing-noise", "scope": "model", "targets": [ "pump:leybold-ecodry-m-15", "pump:leybold-ecodry-m-20" ] }, { "id": "fm:ecodry-shaft-sealing-ring-defect", "scope": "model", "targets": [ "pump:leybold-ecodry-m-15", "pump:leybold-ecodry-m-20" ] }, { "id": "fm:ext255h-cooling-water-corrosion", "scope": "model", "targets": [ "pump:edwards-ext255h" ] }, { "id": "fm:ext255h-cooling-water-scale-blockage", "scope": "model", "targets": [ "pump:edwards-ext255h" ] }, { "id": "fm:ext255h-low-backing-pressure-lubricant-evaporation", "scope": "model", "targets": [ "pump:edwards-ext255h" ] }, { "id": "fm:ext255h-lubricant-oxidative-polymerisation", "scope": "model", "targets": [ "pump:edwards-ext255h" ] }, { "id": "fm:ext255h-rotor-cycle-fatigue-failure", "scope": "model", "targets": [ "pump:edwards-ext255h" ] }, { "id": "fm:hipace-fluid-shelf-life", "scope": "model", "targets": [ "pump:pfeiffer-hipace-300" ] }, { "id": "fm:hipace-splinter-shield-loose", "scope": "model", "targets": [ "pump:pfeiffer-hipace-300" ] }, { "id": "fm:if1800-avertissements-purge-haute-pression-entree", "scope": "model", "targets": [ "pump:edwards-if1800" ] }, { "id": "fm:if1800-echappement-bouche-surpression", "scope": "model", "targets": [ "pump:edwards-if1800" ] }, { "id": "fm:if1800-electrovanne-eau-surpresseur-collee", "scope": "model", "targets": [ "pump:edwards-if1800" ] }, { "id": "fm:if1800-liaison-rs485-variateur", "scope": "model", "targets": [ "pump:edwards-if1800" ] }, { "id": "fm:if1800-module-gaz-debit-azote", "scope": "model", "targets": [ "pump:edwards-if1800" ] }, { "id": "fm:if1800-perte-huile-surpresseur", "scope": "model", "targets": [ "pump:edwards-if1800" ] }, { "id": "fm:if1800-surpresseur-surchauffe-ralentissement", "scope": "model", "targets": [ "pump:edwards-if1800" ] }, { "id": "fm:if1800-variateur-arret-surpresseur", "scope": "model", "targets": [ "pump:edwards-if1800" ] }, { "id": "fm:if1800-variateur-rotor-bloque", "scope": "model", "targets": [ "pump:edwards-if1800" ] }, { "id": "fm:ih-cooling-circuit-internal-blockage", "scope": "model", "targets": [ "pump:edwards-ih1000", "pump:edwards-ih600", "pump:edwards-ih80" ] }, { "id": "fm:ih-exhaust-pipe-deposit-accumulation", "scope": "model", "targets": [ "pump:edwards-ih1000", "pump:edwards-ih600", "pump:edwards-ih80" ] }, { "id": "fm:ih-headplate-manifold-overtemperature-trip", "scope": "model", "targets": [ "pump:edwards-ih1000", "pump:edwards-ih600", "pump:edwards-ih80" ] }, { "id": "fm:ih-motor-thermistor-overheat-shutdown", "scope": "model", "targets": [ "pump:edwards-ih1000", "pump:edwards-ih160", "pump:edwards-ih1800", "pump:edwards-ih600", "pump:edwards-ih80" ] }, { "id": "fm:ih1000-booster-stator-overheat-derate", "scope": "model", "targets": [ "pump:edwards-ih1000" ] }, { "id": "fm:ih1000-rotor-lock-inverter-lowspeed", "scope": "model", "targets": [ "pump:edwards-ih1000" ] }, { "id": "fm:il-arbre-pompe-seche-non-libre", "scope": "model", "targets": [ "pump:edwards-il600", "pump:edwards-il70" ] }, { "id": "fm:il-attaque-chimique-composants-internes", "scope": "model", "targets": [ "pump:edwards-il600", "pump:edwards-il70" ] }, { "id": "fm:il-declenchement-thermistance-moteur", "scope": "model", "targets": [ "pump:edwards-il600", "pump:edwards-il70" ] }, { "id": "fm:il-echappement-bouche-depots", "scope": "model", "targets": [ "pump:edwards-il600", "pump:edwards-il70" ] }, { "id": "fm:il-fusible-module-electrique-fondu", "scope": "model", "targets": [ "pump:edwards-il600", "pump:edwards-il70" ] }, { "id": "fm:il-if-run-til-crash-degats", "scope": "model", "targets": [ "pump:edwards-if1800", "pump:edwards-il600", "pump:edwards-il70" ] }, { "id": "fm:il-if-terminal-box-cablage-inverse", "scope": "model", "targets": [ "pump:edwards-if1800", "pump:edwards-il600", "pump:edwards-il70" ] }, { "id": "fm:il-niveau-huile-incorrect", "scope": "model", "targets": [ "pump:edwards-il600", "pump:edwards-il70" ] }, { "id": "fm:il-regulateur-purge-joints-arbre", "scope": "model", "targets": [ "pump:edwards-il600", "pump:edwards-il70" ] }, { "id": "fm:il600-perte-huile-surpresseur", "scope": "model", "targets": [ "pump:edwards-il600" ] }, { "id": "fm:il600-surpresseur-surchauffe-pression-entree", "scope": "model", "targets": [ "pump:edwards-il600" ] }, { "id": "fm:ion-cathode-erosion-eol", "scope": "family", "targets": [ "fam:ion-pump" ] }, { "id": "fm:ion-thermal-runaway-discharge", "scope": "family", "targets": [ "fam:ion-pump" ] }, { "id": "fm:iqdp-module-adc-converter-fault", "scope": "model", "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "id": "fm:iqdp-motor-thermistor-short-circuit", "scope": "model", "targets": [ "pump:edwards-iqdp40", "pump:edwards-iqdp40-iqmb250", "pump:edwards-iqdp40-iqmb500", "pump:edwards-iqdp80", "pump:edwards-iqdp80-iqmb1200", "pump:edwards-iqdp80-iqmb250", "pump:edwards-iqdp80-iqmb500" ] }, { "id": "fm:maglev-touchdown-count", "scope": "family", "targets": [ "fam:tmp-maglev" ] }, { "id": "fm:marathon-cp-20-cold-head-cable-open-circuit", "scope": "model", "targets": [ "pump:sumitomo-marathon-cp-20" ] }, { "id": "fm:marathon-cp-20-second-stage-charcoal-degradation", "scope": "model", "targets": [ "pump:sumitomo-marathon-cp-20" ] }, { "id": "fm:neg-pyrophoric-heated-in-air", "scope": "family", "targets": [ "fam:neg" ] }, { "id": "fm:next-power-loss-silent-freespin", "scope": "model", "targets": [ "pump:edwards-next300d" ] }, { "id": "fm:next-water-cooling-mineral-corrosion", "scope": "model", "targets": [ "pump:edwards-next300d" ] }, { "id": "fm:on-board-is-8f-regen-heater-failure", "scope": "model", "targets": [ "pump:cti-on-board-is-8f" ] }, { "id": "fm:ruvac-air-cooling-path-fouling", "scope": "model", "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "id": "fm:ruvac-bearing-and-gear-damage", "scope": "model", "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "id": "fm:ruvac-bypass-valve-fails-to-close", "scope": "model", "targets": [ "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "id": "fm:ruvac-centrifugal-lubricator-contact", "scope": "model", "targets": [ "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "id": "fm:ruvac-intake-screen-clogged", "scope": "model", "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "id": "fm:ruvac-oil-acidification-corrosive-vapours", "scope": "model", "targets": [ "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "id": "fm:ruvac-oil-thermal-ageing-darkening", "scope": "model", "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "id": "fm:ruvac-outer-shaft-seal-failure", "scope": "model", "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501" ] }, { "id": "fm:ruvac-overspeed-differential-pressure-loss", "scope": "model", "targets": [ "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "id": "fm:ruvac-pumping-chamber-deposits-clearance-loss", "scope": "model", "targets": [ "pump:leybold-ruvac-ra-13000", "pump:leybold-ruvac-ra-3001", "pump:leybold-ruvac-ra-5001", "pump:leybold-ruvac-ra-7001", "pump:leybold-ruvac-ra-9001", "pump:leybold-ruvac-wa-1001", "pump:leybold-ruvac-wa-151", "pump:leybold-ruvac-wa-2001", "pump:leybold-ruvac-wa-251", "pump:leybold-ruvac-wa-501", "pump:leybold-ruvac-wau-1001", "pump:leybold-ruvac-wau-151", "pump:leybold-ruvac-wau-2001", "pump:leybold-ruvac-wau-251", "pump:leybold-ruvac-wau-501", "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000", "pump:leybold-ruvac-ws-1001", "pump:leybold-ruvac-ws-2001", "pump:leybold-ruvac-ws-251", "pump:leybold-ruvac-ws-501", "pump:leybold-ruvac-wsu-1001", "pump:leybold-ruvac-wsu-2001", "pump:leybold-ruvac-wsu-251", "pump:leybold-ruvac-wsu-501" ] }, { "id": "fm:ruvac-wh-cooling-water-circuit-insufficient", "scope": "model", "targets": [ "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000" ] }, { "id": "fm:ruvac-wh-dust-into-oil-chambers-via-piston-rings", "scope": "model", "targets": [ "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000" ] }, { "id": "fm:ruvac-wh-thermal-shock-rotor-crash", "scope": "model", "targets": [ "pump:leybold-ruvac-wh-2500", "pump:leybold-ruvac-wh-4400", "pump:leybold-ruvac-wh-7000", "pump:leybold-ruvac-whu-2500", "pump:leybold-ruvac-whu-4400", "pump:leybold-ruvac-whu-7000" ] }, { "id": "fm:screw-slot-clearance-internal-leak", "scope": "family", "targets": [ "fam:screw" ] }, { "id": "fm:screwline-bearing-damage-noise", "scope": "model", "targets": [ "pump:leybold-screwline-sp-250", "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-cold-oil-startup-noise", "scope": "model", "targets": [ "pump:leybold-screwline-sp-250", "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-exhaust-blocked-overpressure", "scope": "model", "targets": [ "pump:leybold-screwline-sp-250", "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-oil-cooler-fouling", "scope": "model", "targets": [ "pump:leybold-screwline-sp-250", "pump:leybold-screwline-sp-630" ] }, { "id": "fm:screwline-particle-deposits-noise", "scope": "model", "targets": [ "pump:leybold-screwline-sp-250", "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-process-contamination-ultimate-pressure", "scope": "model", "targets": [ "pump:leybold-screwline-sp-250", "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-sp250-exhaust-underpressure-oil-ingress", "scope": "model", "targets": [ "pump:leybold-screwline-sp-250" ] }, { "id": "fm:screwline-sp250-oil-overtemp-pt100", "scope": "model", "targets": [ "pump:leybold-screwline-sp-250" ] }, { "id": "fm:screwline-sp630-chamber-fouling-motor-trip", "scope": "model", "targets": [ "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-sp630-deposits-vibration-trip", "scope": "model", "targets": [ "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-sp630-gear-oil-level-loss", "scope": "model", "targets": [ "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-sp630-purge-gas-loss", "scope": "model", "targets": [ "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-sp630-shaft-seal-gas-exchange", "scope": "model", "targets": [ "pump:leybold-screwline-sp-630", "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:screwline-sp630f-heat-exchanger-scaling", "scope": "model", "targets": [ "pump:leybold-screwline-sp-630-f" ] }, { "id": "fm:tmp-air-inrush-crash", "scope": "family", "targets": [ "fam:turbomolecular" ] }, { "id": "fm:tmp-bearing-wear", "scope": "family", "targets": [ "fam:tmp-classic", "fam:tmp-hybrid" ] }, { "id": "fm:tmp-converter-live-disconnect-damage", "scope": "model", "targets": [ "pump:leybold-turbovac-350i" ] }, { "id": "fm:tmp-converter-unfused-shared-supply-damage", "scope": "model", "targets": [ "pump:leybold-turbovac-350i" ] }, { "id": "fm:tmp-drag-stage-deposit", "scope": "family", "targets": [ "fam:tmp-hybrid" ] }, { "id": "fm:tmp-h2-limited-base-pressure", "scope": "family", "targets": [ "fam:turbomolecular" ] }, { "id": "fm:tmp-onboard-electronics-heat", "scope": "family", "targets": [ "fam:tmp-hybrid" ] }, { "id": "fm:tmp-overload-speed-decay-shutdown", "scope": "model", "targets": [ "pump:leybold-turbovac-350i" ] }, { "id": "fm:tmp-purge-gas-filter-clog", "scope": "model", "targets": [ "pump:leybold-turbovac-350i" ] }, { "id": "fm:tmp-rotor-blade-corrosive-cracking", "scope": "model", "targets": [ "pump:shimadzu-tmp-3203", "pump:shimadzu-tmp-3203lm" ] }, { "id": "fm:tmp-stray-field-heating", "scope": "family", "targets": [ "fam:turbomolecular" ] }, { "id": "fm:tmp-vent-purge-flange-swap-shock-venting", "scope": "model", "targets": [ "pump:leybold-turbovac-350i" ] }, { "id": "fm:tmu261-bakeout-overheat-no-water-cooling", "scope": "model", "targets": [ "pump:pfeiffer-tmu-261" ] }, { "id": "fm:tmu261-highload-gas-cooling-loss", "scope": "model", "targets": [ "pump:pfeiffer-tmu-261" ] }, { "id": "fm:turbovac350i-converter-contamination-grime", "scope": "model", "targets": [ "pump:leybold-turbovac-350i" ] }, { "id": "fm:twistorr-304fs-bearing-undertemp-cutout", "scope": "model", "targets": [ "pump:agilent-twistorr-304-fs" ] }, { "id": "fm:twistorr-304fs-corrosive-gas-bearing-attack", "scope": "model", "targets": [ "pump:agilent-twistorr-304-fs" ] }, { "id": "fm:twistorr-304fs-temp-sensor-disconnect-no-start", "scope": "model", "targets": [ "pump:agilent-twistorr-304-fs" ] } ], "families": [ { "id": "fam:claw", "tier": "primary" }, { "id": "fam:cryo-gm", "parent": "fam:cryopump", "tier": "capture" }, { "id": "fam:ion-diode", "parent": "fam:ion-pump", "tier": "capture" }, { "id": "fam:ion-noble-diode", "parent": "fam:ion-pump", "tier": "capture" }, { "id": "fam:ion-pump", "tier": "capture" }, { "id": "fam:ion-star", "parent": "fam:ion-pump", "tier": "capture" }, { "id": "fam:multistage-roots", "tier": "primary" }, { "id": "fam:neg", "tier": "capture" }, { "id": "fam:neg-cartridge", "parent": "fam:neg", "tier": "capture" }, { "id": "fam:neg-ion-combo", "parent": "fam:neg", "tier": "capture" }, { "id": "fam:piston-dry", "tier": "primary" }, { "id": "fam:roots-booster", "tier": "booster" }, { "id": "fam:screw", "tier": "primary" }, { "id": "fam:tmp-classic", "parent": "fam:turbomolecular", "tier": "secondary_hv" }, { "id": "fam:tmp-hybrid", "parent": "fam:turbomolecular", "tier": "secondary_hv" }, { "id": "fam:tmp-maglev", "parent": "fam:turbomolecular", "tier": "secondary_hv" }, { "id": "fam:turbomolecular", "tier": "secondary_hv" } ], "license": "CC BY 4.0", "licenseUrl": "https://creativecommons.org/licenses/by/4.0/", "models": [ { "brand": "Agilent Technologies Vacuum", "brandId": "brand:agilent", "family": "fam:tmp-hybrid", "generation": "FS", "id": "pump:agilent-twistorr-304-fs", "lifecycleState": "active", "name": "TwisTorr 304 FS", "parameters": [ { "canonical": { "q": 250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "247/304 (Tab. 3 Technical Specification)", "source": "src:tf-agilent-twistorr-304-manual" } ], "unitPrinted": "l/s", "value": "250" } ], "series": "TwisTorr", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "250", "q": 250, "rule": "published nitrogen pumping speed", "sources": [ { "page": "247/304 (Tab. 3 Technical Specification)", "source": "src:tf-agilent-twistorr-304-manual" } ], "species": 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"unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "l/s", "value": "75" }, { "key": "starting_pressure_max", "sources": [ { "page": "13", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Torr", "value": "1 x 10^-3" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-11" }, { "key": "voltage", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Vdc", "value": "7000" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "75", "q": 75, "rule": "published nitrogen pumping speed", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Agilent Technologies Vacuum", "brandId": "brand:agilent", "family": "fam:ion-noble-diode", "id": "pump:agilent-vacion-plus-75-noble-diode", "lifecycleState": "unknown", "name": "VacIon Plus 75 Noble Diode", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "°C", "value": "0 to +85" }, { "key": "cathode_material", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "text", "value": "Titanium/Tantalum" }, { "key": "magnet_type", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "text", "value": "Ferrite" }, { "key": "mass", "sources": [ { "page": "17", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "kg", "value": "19" }, { "canonical": { "q": 68, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "l/s", "value": "68" }, { "key": "starting_pressure_max", "sources": [ { "page": "13", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Torr", "value": "1 x 10^-3" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-11" }, { "key": "voltage", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Vdc", "value": "7000" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "68", "q": 68, "rule": "published nitrogen pumping speed", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Agilent Technologies Vacuum", "brandId": "brand:agilent", "family": "fam:ion-star", "id": "pump:agilent-vacion-plus-75-starcell", "lifecycleState": "unknown", "name": "VacIon Plus 75 StarCell", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "°C", "value": "0 to +85" }, { "key": "cathode_material", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "text", "value": "Titanium" }, { "key": "magnet_type", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "text", "value": "Ferrite" }, { "key": "mass", "sources": [ { "page": "17", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "kg", "value": "19" }, { "canonical": { "q": 65, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "l/s", "value": "65" }, { "key": "starting_pressure_max", "sources": [ { "page": "13", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Torr", "value": "5 x 10^-2" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-11" }, { "key": "voltage", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Vdc", "value": "-7000" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "65", "q": 65, "rule": "published nitrogen pumping speed", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-hybrid", "id": "pump:balzers-tmh-520", "lifecycleState": "eol_unsupported", "name": "TMH 520", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "value": "Standard: water cooling. Alternative: air cooling (accessory)." }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "kg", "value": "12.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar", "value": "16" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar l/s", "value": "3" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "W", "value": "10.5" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "1/min", "value": "50000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t3-tmh520tmu" } ], "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar", "value": "< 1·10^-8 mbar" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "300", "q": 300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-hybrid", "id": "pump:balzers-tmu-261-p", "lifecycleState": "eol_supported", "name": "TMU 261 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "8", "source": "src:t2-tmu261p" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C (up to +35 °C with air cooling)" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:t2-tmu261p" } ], "value": "ceramic ball bearing (fore-vacuum side)" }, { "key": "compression_he", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "3·10^5" }, { "key": "compression_n2", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": ">1·10^9" }, { "key": "cooling", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "Water, air" }, { "key": "inlet_flange", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "TL011" }, { "key": "magnetic_field_max", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "kg", "value": "8.1" }, { "key": "max_foreline_pressure", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "mbar l/s", "value": "7" }, { "key": "noise_level", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "dB(A)", "value": "50" }, { "key": "power_max", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "W", "value": "200" }, { "canonical": { "q": 175, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "l/s", "value": "175" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "rotation_speed", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:t2-tmu261p" } ], "value": "3 years" }, { "key": "startup_time", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "min", "value": "1.6" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "mbar", "value": "< 5·10-10 mbar" }, { "key": "venting_flange", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "G 1/8''" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "210", "q": 210, "rule": "published nitrogen pumping speed", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-hybrid", "id": "pump:balzers-tmu-520", "lifecycleState": "eol_unsupported", "name": "TMU 520", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "value": "Standard: water cooling. Alternative: air cooling (accessory)." }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "kg", "value": "12.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar", "value": "16" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar l/s", "value": "3" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "W", "value": "10.5" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "1/min", "value": "50000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t3-tmh520tmu" } ], "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 4.9999999999999995e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar", "value": "< 5·10^-11 mbar" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "300", "q": 300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-hybrid", "id": "pump:balzers-tph-062", "lifecycleState": "eol_unsupported", "name": "TPH 062", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "ratio", "value": "6 x 10^2" }, { "key": "compression_he", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "ratio", "value": "7 x 10^3" }, { "key": "compression_n2", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "ratio", "value": "1 x 10^8" }, { "key": "cooling", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "text", "value": "Konvektion / Convection" }, { "key": "inlet_flange", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "text", "value": "DN 40 ISO-KF" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t3-tphu6255" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "kg", "value": "3.6" }, { "key": "mounting_orientation", "sources": [ { "page": "3", "source": "src:t3-tphu6255" } ], "unitPrinted": "text", "value": "vertikal bis horizontal / vertical to horizontal" }, { "canonical": { "q": 34, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "l/s", "value": "34" }, { "canonical": { "q": 40, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "l/s", "value": "40" }, { "canonical": { "q": 30, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "l/s", "value": "30" }, { "key": "rotation_speed", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "startup_time", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "min", "value": "2" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "mbar", "value": "<1 x 10^-10" } ], "series": "TPH/TPU", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "30", "q": 30, "rule": "published nitrogen pumping speed", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-classic", "id": "pump:balzers-tph-2200", "lifecycleState": "eol_unsupported", "name": "TPH 2200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "°C", "value": "0–50" }, { "key": "compression_h2", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": "2·10^3" }, { "key": "compression_he", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": "4·10^4" }, { "key": "compression_n2", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": "10^8" }, { "key": "cooling", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], 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exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "700 L/min @ 50 Hz, 840 L/min @ 60 Hz", "q": 14, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 840, "unit": "L/min" }, "sources": [ { "page": "6", "source": "src:drypump-ebara-a-series-rev3b" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-a10s", "lifecycleState": "unknown", "name": "A10S", "parameters": [ { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "text", "value": "NW40" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "6", "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "L/min", "value": "1000 L/min @ 50 Hz, 1200 L/min @ 60 Hz" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "Pa", "value": "5.3 / 4.0" } ], "series": "A", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "1000 L/min @ 50 Hz, 1200 L/min @ 60 Hz", "q": 20, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 1200, "unit": "L/min" }, "sources": [ { "page": "6", "source": "src:drypump-ebara-a-series-rev3b" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-a25s", "lifecycleState": "unknown", "name": "A25S", "parameters": [ { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "text", "value": "NW50" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "6", "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "L/min", "value": "2500 L/min @ 50 Hz, 3000 L/min @ 60 Hz" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "Pa", "value": "5.3 / 4.0" } ], "series": "A", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "2500 L/min @ 50 Hz, 3000 L/min @ 60 Hz", "q": 50, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 3000, "unit": "L/min" }, "sources": [ { "page": "6", "source": "src:drypump-ebara-a-series-rev3b" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-a30w", "lifecycleState": "unknown", "name": "A30W", "parameters": [ { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "text", "value": "NW50" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "5", "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "L/min", "value": "3000 L/min @ 50 Hz, 3600 L/min @ 60 Hz" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "Pa", "value": "0.4 / 0.27" } ], "series": "A", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "3000 L/min @ 50 Hz, 3600 L/min @ 60 Hz", "q": 60, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 3600, "unit": "L/min" }, "sources": [ { "page": "5", "source": "src:drypump-ebara-a-series-rev3b" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-a70w", "lifecycleState": "unknown", "name": "A70W", "parameters": [ { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "text", "value": "NW50" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "5", "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "L/min", "value": "7000 L/min @ 50 Hz, 8400 L/min @ 60 Hz" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ], "unitPrinted": "Pa", "value": "0.27 / 0.13" } ], "series": "A", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "7000 L/min @ 50 Hz, 8400 L/min @ 60 Hz", "q": 140, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 8400, "unit": "L/min" }, "sources": [ { "page": "5", "source": "src:drypump-ebara-a-series-rev3b" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" }, { "page": null, "source": "src:drypump-ebara-a-series-rev3b" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esa200w", "lifecycleState": "unknown", "name": "ESA200W", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" } ], "unitPrinted": "text", "value": "30 degrees of centigrade of lower" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" } ], "unitPrinted": "text", "value": "NW80" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" } ], "unitPrinted": "kg", "value": "410" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" } ], "unitPrinted": "text", "value": "64" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" } ], "unitPrinted": "L/min", "value": "20000" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" } ], "unitPrinted": "Pa m3/s", "value": "17 - 20" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" } ], "unitPrinted": "Pa", "value": "0.53" } ], "series": "ESA", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "20000", "q": 333.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 20000, "unit": "L/min" }, "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-esa200w" }, { "page": null, "source": "src:drypump-ebara-esa200w" }, { "page": null, "source": "src:drypump-ebara-esa200w" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esa25-d", "lifecycleState": "unknown", "name": "ESA25-D", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-esa25" } ], "unitPrinted": "text", "value": "30 degrees of centigrade of lower" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esa25" } ], "unitPrinted": "text", "value": "NW50" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esa25" } ], "unitPrinted": "kg", "value": "240" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-ebara-esa25" } ], "unitPrinted": "text", "value": "63" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "9", "source": "src:drypump-ebara-esa25" } ], "unitPrinted": "L/min", "value": "2500 L/min @ 50 Hz, 3000 L/min @ 60 Hz" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-ebara-esa25" } ], "unitPrinted": "Pa m3/s", "value": "17 - 20" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esa25" } ], "unitPrinted": "Pa", "value": "5.3/4.0" } ], "series": "ESA", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "2500 L/min @ 50 Hz, 3000 L/min @ 60 Hz", "q": 50, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 3000, "unit": "L/min" }, "sources": [ { "page": "9", "source": "src:drypump-ebara-esa25" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-esa25" }, { "page": null, "source": "src:drypump-ebara-esa25" }, { "page": null, "source": "src:drypump-ebara-esa25" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esa300w", "lifecycleState": "unknown", "name": "ESA300W", "parameters": [ { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "text", "value": "ISO100" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "kg", "value": "700" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "kW", "value": "19.5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "17", "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "L/min", "value": "28000 L/min @ 50 Hz, 30000 L/min @ 60 Hz" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "Pa", "value": "0.53" } ], "series": "ESA", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "28000 L/min @ 50 Hz, 30000 L/min @ 60 Hz", "q": 500, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 30000, "unit": "L/min" }, "sources": [ { "page": "17", "source": "src:drypump-ebara-esa300w" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" }, { "page": null, "source": "src:drypump-ebara-esa300w" }, { "page": null, "source": "src:drypump-ebara-esa300w" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esa300w-h", "lifecycleState": "unknown", "name": "ESA300W-H", "parameters": [ { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "text", "value": "ISO100" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "kg", "value": "700" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "kW", "value": "19.5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "17", "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "L/min", "value": "28000 L/min @ 50 Hz, 30000 L/min @ 60 Hz" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" } ], "unitPrinted": "Pa", "value": "1.3" } ], "series": "ESA", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "28000 L/min @ 50 Hz, 30000 L/min @ 60 Hz", "q": 500, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 30000, "unit": "L/min" }, "sources": [ { "page": "17", "source": "src:drypump-ebara-esa300w" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-esa300w" }, { "page": null, "source": "src:drypump-ebara-esa300w" }, { "page": null, "source": "src:drypump-ebara-esa300w" }, { "page": null, "source": "src:drypump-ebara-esa300w" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esa500w", "lifecycleState": "unknown", "name": "ESA500W", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-esa500w" } ], "unitPrinted": "text", "value": "30 degrees of centigrade of lower" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esa500w" } ], "unitPrinted": "text", "value": "ISO160" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esa500w" } ], "unitPrinted": "kg", "value": "750" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-esa500w" } ], "unitPrinted": "kW", "value": "33.2" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "7", "source": "src:drypump-ebara-esa500w" } ], "unitPrinted": "L/min", "value": "47000 L/min @ 50 Hz, 50000 L/min @ 60 Hz" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-ebara-esa500w" } ], "unitPrinted": "text", "value": "8.5 ～ 11.0 Pa m3/s" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esa500w" } ], "unitPrinted": "Pa", "value": "1.0" } ], "series": "ESA", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "47000 L/min @ 50 Hz, 50000 L/min @ 60 Hz", "q": 833.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 50000, "unit": "L/min" }, "sources": [ { "page": "7", "source": "src:drypump-ebara-esa500w" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-esa500w" }, { "page": null, "source": "src:drypump-ebara-esa500w" }, { "page": null, "source": "src:drypump-ebara-esa500w" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esa70w", "lifecycleState": "unknown", "name": "ESA70W", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "text", "value": "30 degrees centigrade of lower" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "text", "value": "NW50" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "kg", "value": "380" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "7", "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "L/min", "value": "7000 L/min @ 50 Hz, 8400 L/min @ 60 Hz" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "Pa", "value": "0.27 / 0.13" } ], "series": "ESA", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "7000 L/min @ 50 Hz, 8400 L/min @ 60 Hz", "q": 140, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 8400, "unit": "L/min" }, "sources": [ { "page": "7", "source": "src:drypump-ebara-esa70w" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" }, { "page": null, "source": "src:drypump-ebara-esa70w" }, { "page": null, "source": "src:drypump-ebara-esa70w" }, { "page": null, "source": "src:drypump-ebara-esa70w" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esa70wn", "lifecycleState": "unknown", "name": "ESA70WN", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "text", "value": "30 degrees centigrade of lower" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "text", "value": "NW50" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "kg", "value": "380" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "7", "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "L/min", "value": "7000 L/min @ 50 Hz, 8400 L/min @ 60 Hz" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" } ], "unitPrinted": "Pa", "value": "0.4 / 0.27" } ], "series": "ESA", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "7000 L/min @ 50 Hz, 8400 L/min @ 60 Hz", "q": 140, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 8400, "unit": "L/min" }, "sources": [ { "page": "7", "source": "src:drypump-ebara-esa70w" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-esa70w" }, { "page": null, "source": "src:drypump-ebara-esa70w" }, { "page": null, "source": "src:drypump-ebara-esa70w" }, { "page": null, "source": "src:drypump-ebara-esa70w" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esr200wn", "lifecycleState": "unknown", "name": "ESR200WN", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "not exceeding 30℃" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "NW100" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "kg", "value": "250" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "kW", "value": "5.0" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "6", "source": "src:drypump-ebara-esr" } ], "unitPrinted": "L/min", "value": "10000 - 20000" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "N2" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "Pa", "value": "0.13" } ], "series": "ESR", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" }, { "page": null, "source": "src:drypump-ebara-esr" }, { "page": null, "source": "src:drypump-ebara-esr" } ], "speedGap": { "availableKeys": [ "pumping_speed_nominal" ], "plage": true, "reason": "the published value is a range, not a per-frequency reading: the manufacturer prints no 50/60 Hz bound for this key" } }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esr20n", "lifecycleState": "unknown", "name": "ESR20N", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "not exceeding 30℃" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "NW40" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "kg", "value": "90" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "kW", "value": "2.5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "6", "source": "src:drypump-ebara-esr" } ], "unitPrinted": "L/min", "value": "1300 - 2000" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "N2" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "2.0 Pa (2000 L/min) / 2.7 Pa (1300 L/min)" } ], "series": "ESR", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" }, { "page": null, "source": "src:drypump-ebara-esr" }, { "page": null, "source": "src:drypump-ebara-esr" } ], "speedGap": { "availableKeys": [ "pumping_speed_nominal" ], "plage": true, "reason": "the published value is a range, not a per-frequency reading: the manufacturer prints no 50/60 Hz bound for this key" } }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-esr80wn", "lifecycleState": "unknown", "name": "ESR80WN", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "not exceeding 30℃" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "NW50" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "kg", "value": "180" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "kW", "value": "4.5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "6", "source": "src:drypump-ebara-esr" } ], "unitPrinted": "L/min", "value": "4000 - 8500" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "text", "value": "N2" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" } ], "unitPrinted": "Pa", "value": "0.2" } ], "series": "ESR", "sources": [ { "page": null, "source": "src:drypump-ebara-esr" }, { "page": null, "source": "src:drypump-ebara-esr" }, { "page": null, "source": "src:drypump-ebara-esr" } ], "speedGap": { "availableKeys": [ "pumping_speed_nominal" ], "plage": true, "reason": "the published value is a range, not a per-frequency reading: the manufacturer prints no 50/60 Hz bound for this key" } }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-ev-a03", "lifecycleState": "unknown", "name": "EV-A03", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" } ], "unitPrinted": "text", "value": "15 to 30 deg. C" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" } ], "unitPrinted": "text", "value": "3 kPa or less" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" } ], "unitPrinted": "text", "value": "NW25 (Quick Flange)" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" } ], "unitPrinted": "text", "value": "Approx. 23 kg" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" } ], "unitPrinted": "text", "value": "Atmospheric pressure" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" } ], "unitPrinted": "L/min", "value": "250" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" } ], "unitPrinted": "text", "value": "Every 3 years" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" } ], "unitPrinted": "Pa", "value": "1.0" } ], "series": "EV-A", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "250", "q": 4.167, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 250, "unit": "L/min" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a03" }, { "page": null, "source": "src:drypump-ebara-ev-a03" }, { "page": null, "source": "src:drypump-ebara-ev-a03" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-ev-a06", "lifecycleState": "unknown", "name": "EV-A06", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" } ], "unitPrinted": "text", "value": "15 to 30 deg. C" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" } ], "unitPrinted": "text", "value": "3 kPa or less" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" } ], "unitPrinted": "text", "value": "NW40 (Quick Flange)" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" } ], "unitPrinted": "text", "value": "Approx. 54 kg" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" } ], "unitPrinted": "text", "value": "Atmospheric pressure" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" } ], "unitPrinted": "L/min", "value": "600" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" } ], "unitPrinted": "text", "value": "Every 3 years" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" } ], "unitPrinted": "Pa", "value": "1.0" } ], "series": "EV-A", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "600", "q": 10, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 600, "unit": "L/min" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a06" }, { "page": null, "source": "src:drypump-ebara-ev-a06" }, { "page": null, "source": "src:drypump-ebara-ev-a06" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-ev-a10", "lifecycleState": "unknown", "name": "EV-A10", "parameters": [], "series": "EV-A", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-a10" }, { "page": null, "source": "src:drypump-ebara-ev-a10" }, { "page": null, "source": "src:drypump-ebara-ev-a10" }, { "page": null, "source": "src:drypump-ebara-ev-a10" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-ev-s100", "lifecycleState": "unknown", "name": "EV-S100", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "not exceeding 30°C" }, { "key": "corrosive_variant", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "N" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "NW80" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "kg", "value": "120" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "kW", "value": "4.6" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "L/min", "value": "10000" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "Pa", "value": "0.5" } ], "series": "EV-S", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "10000", "q": 166.667, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 10000, "unit": "L/min" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" }, { "page": null, "source": "src:drypump-ebara-ev-s" }, { "page": null, "source": "src:drypump-ebara-ev-s" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-ev-s20", "lifecycleState": "unknown", "name": "EV-S20", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "not exceeding 30°C" }, { "key": "corrosive_variant", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "N" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "NW50" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "kg", "value": "60" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "kW", "value": "2.2" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "L/min", "value": "1670" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "Pa", "value": "3.0" } ], "series": "EV-S", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "1670", "q": 27.833, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 1670, "unit": "L/min" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" }, { "page": null, "source": "src:drypump-ebara-ev-s" }, { "page": null, "source": "src:drypump-ebara-ev-s" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-ev-s200", "lifecycleState": "unknown", "name": "EV-S200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "not exceeding 30°C" }, { "key": "corrosive_variant", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "N" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "NW100" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "kg", "value": "170" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "kW", "value": "5.1" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "L/min", "value": "20000" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "Pa", "value": "0.5" } ], "series": "EV-S", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "20000", "q": 333.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 20000, "unit": "L/min" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" }, { "page": null, "source": "src:drypump-ebara-ev-s" }, { "page": null, "source": "src:drypump-ebara-ev-s" } ] }, { "brand": "Ebara Corporation", "brandId": "brand:ebara", "family": "fam:multistage-roots", "id": "pump:ebara-ev-s50", "lifecycleState": "unknown", "name": "EV-S50", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "not exceeding 30°C" }, { "key": "corrosive_variant", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "N" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "text", "value": "NW50" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "kg", "value": "100" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "kW", "value": "3.6" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "L/min", "value": "5000" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "unitPrinted": "Pa", "value": "0.5" } ], "series": "EV-S", "servedSpeed": { "conversion": "l/min to l/s, exact factor 1/60", "fromKey": "pumping_speed_nominal", "printedUnit": "L/min", "printedValue": "5000", "q": 83.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 5000, "unit": "L/min" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-ebara-ev-s" }, { "page": null, "source": "src:drypump-ebara-ev-s" }, { "page": null, "source": "src:drypump-ebara-ev-s" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-607", "lifecycleState": "unknown", "name": "607", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "12 to 40 ºC (54 to104 ºF)" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "Pa", "value": "5.06 x 104" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "ASA 6 inches" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "< 85 dB(A)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "6 Inch Booster", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "speedGap": { "heldBackKeys": [ "pumping_speed_nominal" ], "reason": "a pumping speed is published in the base but held back by an export gate: pumping_speed_nominal (the published value carries French prose and the site is lang=\"en\")" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-615", "lifecycleState": "unknown", "name": "615", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "12 to 40 ºC (54 to104 ºF)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "optional" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "Pa", "value": "5.06 x 104" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "ASA 8 inches" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "< 85 dB(A)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "6 Inch Booster", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "speedGap": { "heldBackKeys": [ "pumping_speed_nominal" ], "reason": "a pumping speed is published in the base but held back by an export gate: pumping_speed_nominal (the published value carries French prose and the site is lang=\"en\")" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-622", "lifecycleState": "unknown", "name": "622", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "12 to 40 ºC (54 to104 ºF)" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "Pa", "value": "3.33 x 104" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "ASA 8 inches" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "< 85 dB(A)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "6 Inch Booster", "sources": [ { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" }, { "page": null, "source": "src:drypump-edwards-booster" } ], "speedGap": { "heldBackKeys": [ "pumping_speed_nominal" ], "reason": "a pumping speed is published in the base but held back by an export gate: pumping_speed_nominal (the published value carries French prose and the site is lang=\"en\")" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-eh1200", "lifecycleState": "unknown", "name": "EH1200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "5 °C to 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "at least 1/10th of volumetric capacity of the booster pump" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "none required" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "0 to 90 mbar at 50 Hz electrical supply, 0 to 75 mbar at 60 Hz electrical supply" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "ISO160" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kg", "value": "151" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kW", "value": "3" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "EH", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-eh250", "lifecycleState": "unknown", "name": "EH250", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "5 °C to 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "at least 1/10th of volumetric capacity of the booster pump" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "none required" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "0 to 180 mbar at 50 Hz electrical supply, 0 to 150 mbar at 60 Hz electrical supply" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "ISO63" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kg", "value": "63" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kW", "value": "2.2" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "EH", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-eh2600", "lifecycleState": "unknown", "name": "EH2600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "5 °C to 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "at least 1/10th of volumetric capacity of the booster pump" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "none required" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "0 to 120 mbar at 50 Hz electrical supply, 0 to 67 mbar at 60 Hz electrical supply" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "ISO160" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kg", "value": "405" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kW", "value": "11" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "EH", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-eh2600fx", "lifecycleState": "unknown", "name": "EH2600FX", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "5 °C to 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "at least 1/10th of volumetric capacity of the booster pump" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "none required" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "0 to 80 mbar at 50 Hz electrical supply, 0 to 67 mbar at 60 Hz electrical supply" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kg", "value": "405" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "EH", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-eh4200", "lifecycleState": "unknown", "name": "EH4200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "5 °C to 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "at least 1/10th of volumetric capacity of the booster pump" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "none required" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "0 to 70 mbar at 50 Hz electrical supply, 0 to 50 mbar at 60 Hz electrical supply" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "ISO250" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kg", "value": "485" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kW", "value": "11" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "EH", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-eh4200fx", "lifecycleState": "unknown", "name": "EH4200FX", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "5 °C to 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "at least 1/10th of volumetric capacity of the booster pump" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "none required" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "0 to 60 mbar at 50 Hz electrical supply, 0 to 50 mbar at 60 Hz electrical supply" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kg", "value": "485" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "EH", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-eh500", "lifecycleState": "unknown", "name": "EH500", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "5 °C to 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "at least 1/10th of volumetric capacity of the booster pump" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "none required" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "0 to 110 mbar at 50 Hz electrical supply, 0 to 90 mbar at 60 Hz electrical supply" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "ISO100" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kg", "value": "100" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "kW", "value": "2.2" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" } ], "unitPrinted": "text", "value": "6 yearly" } ], "series": "EH", "sources": [ { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" }, { "page": null, "source": "src:drypump-edwards-eh" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-ext-200-h", "lifecycleState": "eol_supported", "name": "EXT 200 H", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "unitPrinted": "°C", "value": "0 - 35 °C" }, { "key": "compression_h2", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "ratio", "value": "3.5 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "ratio", "value": "1 x 10^6" }, { "key": "compression_n2", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "ratio", "value": ">5 x 10^7" }, { "key": "cooling", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "value": "Forced-air/water" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "value": "DN100ISO" }, { "key": "lubricant", "sources": [ { "page": "15", "source": "src:t2-ext200h" } ], "value": "hydrocarbon lubricant" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "kg", "value": "9 kg (7.5 kg†)" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-ext200h" } ], "unitPrinted": "mbar", "value": "12.6 mbar (1260 Pa)" }, { "key": "mounting_orientation", "sources": [ { "page": "13", "source": "src:t2-ext200h" } ], "value": "Vertical and upright through to horizontal ±2°" }, { "key": "noise_level", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "unitPrinted": "dB(A)", "value": "< 50 dB(A)" }, { "key": "power_max", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "unitPrinted": "VA", "value": "250" }, { "canonical": { "q": 163, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "l/s", "value": "163" }, { "canonical": { "q": 190, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "l/s", "value": "190" }, { "canonical": { "q": 177, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "l/s", "value": "177" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-ext200h" } ], "unitPrinted": "r/min", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t2-ext200h" } ], "unitPrinted": "hours", "value": "typically more than 20000 hours" }, { "key": "startup_time", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "unitPrinted": "sec", "value": "110" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "value": "1/8 inch BSP" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "177", "q": 177, "rule": "published nitrogen pumping speed", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-ext-250-m", "lifecycleState": "eol_supported", "name": "EXT250M", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "C", "value": "0 - 35 C" }, { "key": "bake_temp_max", "sources": [ { "page": "12", "source": "src:t2-ext250m" } ], "unitPrinted": "C", "value": "100" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "frictionless passive magnetic bearings (radial, both shaft ends) + active electromagnetic bearing (axial)" }, { "key": "compression_h2", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "1500" }, { "key": "compression_he", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "2 x 10^4" }, { "key": "compression_n2", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": ">1 x 10^8" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "free convection / forced air / water" }, { "key": "inlet_flange", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "DN100CF/DN100ISO-K" }, { "key": "lubricant", "sources": [ { "page": "17", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "oil-free" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-ext250m" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "kg", "value": "11 kg (DN100CF)/8.5 kg (DN100ISO-K)" }, { "key": "mounting_orientation", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "any orientation" }, { "key": "noise_level", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "dBA", "value": "< 50 dBA" }, { "canonical": { "q": 190, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "l/s", "value": "190" }, { "canonical": { "q": 250, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "l/s", "value": "250" }, { "canonical": { "q": 240, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "l/s", "value": "240" }, { "key": "purge_flange", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "NW10" }, { "key": "rotation_speed", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "r/min", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "32", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "no routine maintenance" }, { "key": "standby_power", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "W", "value": "15" }, { "key": "startup_time", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "s", "value": "90" }, { "canonical": { "bound": "less_than", "q": 5e-9, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "mbar", "value": "<5 x 10-9 mbar, <5 x 10-7 Pa" }, { "key": "venting_flange", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "1/8-inch BSP female" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "240", "q": 240, "rule": "published nitrogen pumping speed", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-ext-70", "lifecycleState": "eol_supported", "name": "EXT70", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "°C", "value": "0-35" }, { "key": "bearing_type", "sources": [ { "page": "2", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Hybrid bearing arrangement: permanent-magnet upper bearing, oil or grease lubricated ceramic lower bearing" }, { "key": "compression_h2", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "500" }, { "key": "compression_he", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "6000" }, { "key": "compression_n2", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": ">1×10^8" }, { "key": "cooling", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Free convection or forced air, or water" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "DN40NW, DN50NW, DN63CF or DN63ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "kg", "value": "1.5" }, { "key": "mounting_orientation", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Vertical and upright, through to horizontal" }, { "key": "noise_level", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "dB(A)", "value": "<50" }, { "key": "power_max", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "W", "value": "10" }, { "canonical": { "q": 50, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "50" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "60" }, { "canonical": { "q": 65, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "65" }, { "key": "rotation_speed", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "rpm", "value": "90000" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "s", "value": "90" }, { "canonical": { "bound": "less_than", "q": 5e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "mbar", "value": "<5×10-9" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "65", "q": 65, "rule": "published nitrogen pumping speed", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-ext-75dx", "lifecycleState": "eol_supported", "name": "EXT75DX", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "°C", "value": "5-35" }, { "key": "bearing_type", "sources": [ { "page": "2", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Hybrid bearing arrangement: permanent-magnet upper bearing, oil or grease lubricated ceramic lower bearing" }, { "key": "compression_h2", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "5×10^4" }, { "key": "compression_he", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "1×10^6" }, { "key": "compression_n2", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": ">1×10^11" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Forced air / water" }, { "key": "inlet_flange", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "DN63ISO-K, DN63CF or DN40NW" }, { "key": "magnetic_field_max", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "kg", "value": "3" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Vertical and upright, through to horizontal" }, { "key": "noise_level", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "dB(A)", "value": "<50" }, { "key": "power_max", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "W", "value": "10" }, { "canonical": { "q": 53, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "53" }, { "canonical": { "q": 57, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "57" }, { "canonical": { "q": 61, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "61" }, { "key": "rotation_speed", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "rpm", "value": "90000" }, { "key": "startup_time", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "s", "value": "110" }, { "canonical": { "bound": "less_than", "q": 5e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "mbar", "value": "<5×10-9" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "61", "q": 61, "rule": "published nitrogen pumping speed", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-ext255h", "lifecycleState": "eol_supported", "name": "EXT255H", "parameters": [ { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "Page 10 (Table 1 - Technical data, colonne EXT255H)", "source": "src:tf-edwards-ext255h-manual" } ], "unitPrinted": "l s-1", "value": "220" } ], "series": "EXT", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l s-1", "printedValue": "220", "q": 220, "rule": "published nitrogen pumping speed", "sources": [ { "page": "Page 10 (Table 1 - Technical data, colonne EXT255H)", "source": "src:tf-edwards-ext255h-manual" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:tf-edwards-ext255h-manual" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:claw", "id": "pump:edwards-gv260", "lifecycleState": "unknown", "name": "GV260", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "41 to 104°F (5 to 40°C)" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "1.15 bar absolute, 1.15 x 105 Pa" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "ISO100" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "8", "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "m3h-1", "value": "240 m³/h @ 50 Hz, 320 m³/h @ 60 Hz" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "0.41 to 0.54 bar above exhaust back-pressure" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "Every 6 years (overhaul)" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "four stage" } ], "series": "GV", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3h-1", "printedValue": "240 m³/h @ 50 Hz, 320 m³/h @ 60 Hz", "q": 88.889, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 320, "unit": "m3h-1" }, "sources": [ { "page": "8", "source": "src:drypump-edwards-gv-drystar" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" }, { "page": null, "source": "src:drypump-edwards-gv-drystar" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:claw", "id": "pump:edwards-gv410", "lifecycleState": "unknown", "name": "GV410", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "41 to 104°F (5 to 40°C)" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "1.15 bar absolute, 1.15 x 105 Pa" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "ISO100" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "8", "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "m3h-1", "value": "380 m³/h @ 50 Hz, 460 m³/h @ 60 Hz" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "0.41 to 0.54 bar above exhaust back-pressure" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "Every 6 years (overhaul)" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "four stage" } ], "series": "GV", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3h-1", "printedValue": "380 m³/h @ 50 Hz, 460 m³/h @ 60 Hz", "q": 127.778, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 460, "unit": "m3h-1" }, "sources": [ { "page": "8", "source": "src:drypump-edwards-gv-drystar" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" }, { "page": null, "source": "src:drypump-edwards-gv-drystar" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:claw", "id": "pump:edwards-gv600", "lifecycleState": "unknown", "name": "GV600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "41 to 104°F (5 to 40°C)" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "1.15 bar absolute, 1.15 x 105 Pa" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "ISO100" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "8", "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "m3h-1", "value": "560 m³/h @ 50 Hz, 540 m³/h @ 60 Hz" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "0.41 to 0.54 bar above exhaust back-pressure" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "Every 6 years (overhaul)" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" } ], "unitPrinted": "text", "value": "four stage" } ], "series": "GV", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3h-1", "printedValue": "560 m³/h @ 50 Hz, 540 m³/h @ 60 Hz", "q": 150, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 540, "unit": "m3h-1" }, "sources": [ { "page": "8", "source": "src:drypump-edwards-gv-drystar" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-gv-drystar" }, { "page": null, "source": "src:drypump-edwards-gv-drystar" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:screw", "id": "pump:edwards-if1800", "lifecycleState": "unknown", "name": "iF1800", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "unitPrinted": "text", "value": "5 to 40 °C" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "unitPrinted": "kg", "value": "585" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "unitPrinted": "text", "value": "Atmospheric" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "unitPrinted": "text", "value": "<64 dB(A) (50Hz), <69 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "unitPrinted": "text", "value": "11.4 kW (200-208 V 50 Hz), 12.1 kW (200-208 V 60 Hz), 12.1 kW (440V" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "19", "source": "src:drypump-edwards-if1800" } ], "unitPrinted": "m3 h-1", "value": "1720 m3 h-1 @ 50 Hz, 1800 m3 h-1 @ 60 Hz" }, { "canonical": { "q": 0.0008, "restatedInSource": { "count": 1, "spread": 1.6 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" } ], "unitPrinted": "text", "value": "8 x 10-4 mbar (50Hz), 5 x 10-4 mbar" } ], "series": "iF", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 h-1", "printedValue": "1720 m3 h-1 @ 50 Hz, 1800 m3 h-1 @ 60 Hz", "q": 500, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 1800, "unit": "m3 h-1" }, "sources": [ { "page": "19", "source": "src:drypump-edwards-if1800" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-if1800" }, { "page": null, "source": "src:drypump-edwards-if1800" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-ih1000", "lifecycleState": "unknown", "name": "iH1000", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "5 to 40 °C" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "ISO100" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "kg", "value": "430" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "Atmospheric" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "< 69 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "7", "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "m3 h-1", "value": "950 m3 h-1 @ 50 Hz, 1000 m3 h-1 @ 60 Hz" }, { "canonical": { "q": 0.002, "restatedInSource": { "count": 1, "spread": 2 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "2 x 10-3/ 1 x 10-3 mbar (50 Hz / 60 Hz), shaft seal purge only" } ], "series": "iH", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 h-1", "printedValue": "950 m3 h-1 @ 50 Hz, 1000 m3 h-1 @ 60 Hz", "q": 277.778, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 1000, "unit": "m3 h-1" }, "sources": [ { "page": "7", "source": "src:drypump-edwards-ih-1800" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ih" }, { "page": null, "source": "src:drypump-edwards-ih" }, { "page": null, "source": "src:drypump-edwards-ih-1800" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-ih160", "lifecycleState": "unknown", "name": "iH160", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "5 to 40 °C" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "ISO63" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "kg", "value": "244" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "Atmospheric" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "<64 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "165 m3 h-1" }, { "canonical": { "q": 0.01, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "1x10-2 mbar, shaft seal purge only" } ], "series": "iH", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "165 m3 h-1", "q": 45.833, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 165, "unit": "m3 h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" }, { "page": null, "source": "src:drypump-edwards-ih-1800" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-ih1800", "lifecycleState": "unknown", "name": "iH1800", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "5 to 40 °C" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "ISO160" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "kg", "value": "502" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "Atmospheric" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "<69 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "1800 m3 h-1" }, { "canonical": { "q": 0.001, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "1x10-3 mbar, shaft seal purge only" } ], "series": "iH", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "1800 m3 h-1", "q": 500, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 1800, "unit": "m3 h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" }, { "page": null, "source": "src:drypump-edwards-ih-1800" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-ih600", "lifecycleState": "unknown", "name": "iH600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "5 to 40 °C" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "ISO100" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "kg", "value": "415" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "< 67 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "7", "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "m3 h-1", "value": "518 m3 h-1 @ 50 Hz, 600 m3 h-1 @ 60 Hz" }, { "canonical": { "q": 0.002, "restatedInSource": { "count": 1, "spread": 2.857 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "2 x 10-3/ 7 x 10-4 mbar (50 Hz / 60 Hz), shaft seal purge only" } ], "series": "iH", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 h-1", "printedValue": "518 m3 h-1 @ 50 Hz, 600 m3 h-1 @ 60 Hz", "q": 166.667, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 600, "unit": "m3 h-1" }, "sources": [ { "page": "7", "source": "src:drypump-edwards-ih-1800" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ih" }, { "page": null, "source": "src:drypump-edwards-ih" }, { "page": null, "source": "src:drypump-edwards-ih-1800" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-ih80", "lifecycleState": "unknown", "name": "iH80", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "5 to 40 °C" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "ISO63" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "kg", "value": "240" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "Atmospheric" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "< 64 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "7", "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "m3 h-1", "value": "86 m3 h-1 @ 50 Hz" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-edwards-ih" } ], "unitPrinted": "text", "value": "5" }, { "canonical": { "q": 0.03, "restatedInSource": { "count": 1, "spread": 3 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-ih-1800" } ], "unitPrinted": "text", "value": "3 x 10-2/ 1 x 10-2 mbar (50 Hz / 60 Hz), shaft seal purge only" } ], "series": "iH", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 h-1", "printedValue": "86 m3 h-1 @ 50 Hz", "q": 23.889, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 86, "unit": "m3 h-1" }, "sources": [ { "page": "7", "source": "src:drypump-edwards-ih-1800" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ih" }, { "page": null, "source": "src:drypump-edwards-ih" }, { "page": null, "source": "src:drypump-edwards-ih-1800" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-il600", "lifecycleState": "unknown", "name": "iL600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "3 p.s.i. (0.207 bar, 2.07 x 104Pa)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "ISO100 bolted" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "kg", "value": "395" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "< 62 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "518 m3h-1" }, { "canonical": { "bound": "less_than", "q": 0.003, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "< 3 x 10-3 mbar (< 3 x 10-1 Pa)," } ], "series": "iL", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "518 m3h-1", "q": 143.889, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 518, "unit": "m3h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" }, { "page": null, "source": "src:drypump-edwards-il70-il600" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-il70", "lifecycleState": "unknown", "name": "iL70", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "3 p.s.i. (0.207 bar, 2.07 x 104Pa)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "ISO63 bolted" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "kg", "value": "230" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "< 62 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "70 m3h-1" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "5" }, { "canonical": { "bound": "less_than", "q": 0.05, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "unitPrinted": "text", "value": "< 5 x 10-2 mbar (< 5 Pa)," } ], "series": "iL", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "70 m3h-1", "q": 19.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 70, "unit": "m3h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-il70-il600" }, { "page": null, "source": "src:drypump-edwards-il70-il600" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:screw", "id": "pump:edwards-ipup-e100l", "lifecycleState": "unknown", "name": "IPUP E100L", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "5 to 50 oC" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "kg", "value": "112" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "<56 dBA" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "kW", "value": "2.8" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "105 m3/hr" }, { "canonical": { "q": 0.0066661184210526315, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "5x10-3 (3.75 x 10-3 torr) mbar" } ], "series": "IPUP E100", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "105 m3/hr", "q": 29.167, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 105, "unit": "m3/hr" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:screw", "id": "pump:edwards-ipup-e100l-hardwire", "lifecycleState": "unknown", "name": "IPUP E100L (Hardwire)", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "5 to 50 oC" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "kg", "value": "112" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "<56 dBA" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "kW", "value": "2.8" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "105 m3/hr" }, { "canonical": { "q": 0.0066661184210526315, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "5x10-3 (3.75 x 10-3 torr) mbar" } ], "series": "IPUP E100", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "105 m3/hr", "q": 29.167, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 105, "unit": "m3/hr" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:screw", "id": "pump:edwards-ipup-e100li", "lifecycleState": "unknown", "name": "IPUP E100Li", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "5 to 50 oC" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "kg", "value": "112" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "<56 dBA" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "kW", "value": "2.8" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "105 m3/hr" }, { "canonical": { "q": 0.0066661184210526315, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "unitPrinted": "text", "value": "5x10-3 (3.75 x 10-3 torr) mbar" } ], "series": "IPUP E100", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "105 m3/hr", "q": 29.167, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 105, "unit": "m3/hr" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" }, { "page": null, "source": "src:drypump-edwards-ipup" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-iqdp40", "lifecycleState": "unknown", "name": "iQDP40", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "ISO40 bolted" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "kg", "value": "186" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "1 x 103 mbar (1 x 105 Pa)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "< 70 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "44 m3 h-1" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "4" }, { "canonical": { "q": 0.05, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "5 x 10-2 mbar (5 Pa), 50 Hz, shaft-seals purge only" } ], "series": "iQ", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "44 m3 h-1", "q": 12.222, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 44, "unit": "m3 h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-iqdp40-iqmb250", "lifecycleState": "unknown", "name": "iQDP40/iQMB250", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "ISO63 bolted" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "20 mbar (2 x 103 Pa)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "235 m3 h-1" }, { "canonical": { "q": 0.0025, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "2.5 x 10-3 mbar (2.5 x 10-1 Pa), 50 Hz, shaft-seals purge only" } ], "series": "iQ", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "235 m3 h-1", "q": 65.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 235, "unit": "m3 h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-iqdp40-iqmb500", "lifecycleState": "unknown", "name": "iQDP40/iQMB500", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "ISO100 bolted" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "20 mbar (2 x 103 Pa)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "350 m3 h-1" }, { "canonical": { "q": 0.0025, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "2.5 x 10-3 mbar (2.5 x 10-1 Pa), 50 Hz, shaft-seals purge only" } ], "series": "iQ", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "350 m3 h-1", "q": 97.222, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 350, "unit": "m3 h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-iqdp80", "lifecycleState": "unknown", "name": "iQDP80", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "ISO63 bolted" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "kg", "value": "216" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "1 x 103 mbar (1 x 105 Pa)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "< 70 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "80 m3 h-1" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "4" }, { "canonical": { "q": 0.03, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "3 x 10-2 mbar (3 Pa), 50 Hz, shaft-seals purge only" } ], "series": "iQ", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "80 m3 h-1", "q": 22.222, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 80, "unit": "m3 h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-iqdp80-iqmb1200", "lifecycleState": "unknown", "name": "iQDP80/iQMB1200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "ISO 160 bolted" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "450 kg (frame mounted)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "1 mbar (1 x 102 Pa)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "815 m3 h-1" }, { "canonical": { "q": 0.002, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "2.0 x 10-3 mbar (2.0 x 10-1 Pa), 50 Hz, shaft-seals purge only" } ], "series": "iQ", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "815 m3 h-1", "q": 226.389, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 815, "unit": "m3 h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-iqdp80-iqmb250", "lifecycleState": "unknown", "name": "iQDP80/iQMB250", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "ISO63 bolted" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "20 mbar (2 x 103 Pa)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "260 m3 h-1" }, { "canonical": { "q": 0.002, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "2.0 x 10-3 mbar (2.0 x 10-1 Pa), 50 Hz, shaft-seals purge only" } ], "series": "iQ", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "260 m3 h-1", "q": 72.222, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 260, "unit": "m3 h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:multistage-roots", "id": "pump:edwards-iqdp80-iqmb500", "lifecycleState": "unknown", "name": "iQDP80/iQMB500", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "ISO100 bolted" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "20 mbar (2 x 103 Pa)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "390 m3 h-1" }, { "canonical": { "q": 0.002, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "unitPrinted": "text", "value": "2.0 x 10-3 mbar (2.0 x 10-1 Pa), 50 Hz, shaft-seals purge only" } ], "series": "iQ", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "390 m3 h-1", "q": 108.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 390, "unit": "m3 h-1" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-edwards-iqdp" }, { "page": null, "source": "src:drypump-edwards-iqdp" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-next-240", "lifecycleState": "active", "name": "nEXT 240", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "36", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "5 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "75" }, { "key": "compression_h2", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "1 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "3 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "> 1 x 10^11" }, { "key": "inlet_flange", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "DN100 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "unitPrinted": "kg", "value": "5.7" }, { "key": "max_foreline_pressure", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mbar", "value": "9.5" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "sccm", "value": "45" }, { "key": "noise_level", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "dB(A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "11", "source": "src:ptb-edwards-next" } ], "unitPrinted": "W", "value": "200" }, { "canonical": { "q": 165, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "165" }, { "canonical": { "q": 230, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "230" }, { "canonical": { "q": 240, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "240" }, { "key": "purge_flange", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" }, { "key": "rotation_speed", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "75", "source": "src:ptb-edwards-next" } ], "unitPrinted": "hours", "value": "35000" }, { "key": "startup_time", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "sec", "value": "115" }, { "canonical": { "bound": "less_than", "q": 6.000000000000001e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mbar", "value": "< 6 x 10^-8" }, { "key": "venting_flange", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "240", "q": 240, "rule": "published nitrogen pumping speed", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-next-300", "lifecycleState": "active", "name": "nEXT 300", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "36", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "5 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "80" }, { "key": "compression_h2", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "5 x 104" }, { "key": "compression_he", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "1 x 106" }, { "key": "compression_n2", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": ">1 x 1011" }, { "key": "inlet_flange", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "DN100ISO-K" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:ptb-edwards-next" } ], "value": "hydrocarbon lubricant" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "kg", "value": "5.7" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "sccm", "value": "95" }, { "key": "mounting_orientation", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "value": "vertical a horizontal ± 2°" }, { "key": "noise_level", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "dB(A)", "value": "<45" }, { "key": "power_max", "sources": [ { "page": "59", "source": "src:ptb-edwards-next" } ], "unitPrinted": "W", "value": "200" }, { "canonical": { "q": 280, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "280" }, { "canonical": { "q": 340, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "340" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "purge_flange", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" }, { "key": "rotation_speed", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "75", "source": "src:ptb-edwards-next" } ], "unitPrinted": "h", "value": ">17500" }, { "key": "startup_time", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "s", "value": "155" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mbar", "value": "<5 x 10-10" }, { "key": "venting_flange", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "300", "q": 300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-next-400", "lifecycleState": "active", "name": "nEXT 400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "36", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "5 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "70" }, { "key": "compression_h2", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "5 x 105" }, { "key": "compression_he", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "1 x 108" }, { "key": "compression_n2", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": ">1 x 1011" }, { "key": "inlet_flange", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "DN160ISO-K" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:ptb-edwards-next" } ], "value": "hydrocarbon lubricant" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "kg", "value": "6.5" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "sccm", "value": "105" }, { "key": "mounting_orientation", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "value": "vertical a horizontal ± 2°" }, { "key": "noise_level", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "dB(A)", "value": "<45" }, { "key": "power_max", "sources": [ { "page": "59", "source": "src:ptb-edwards-next" } ], "unitPrinted": "W", "value": "200" }, { "canonical": { "q": 325, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "325" }, { "canonical": { "q": 390, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "390" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "400" }, { "key": "purge_flange", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" }, { "key": "rotation_speed", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "75", "source": "src:ptb-edwards-next" } ], "unitPrinted": "h", "value": ">17500" }, { "key": "startup_time", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "s", "value": "175" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mbar", "value": "<1 x 10-10" }, { "key": "venting_flange", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "400", "q": 400, "rule": "published nitrogen pumping speed", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-next300d", "lifecycleState": "active", "name": "nEXT300D", "parameters": [ { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "11", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "300" } ], "series": "nEXT", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "300", "q": 300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "11", "source": "src:ptb-edwards-next" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:ptb-edwards-next" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-qmb1200f", "lifecycleState": "unknown", "name": "QMB1200F", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "text", "value": "0 to 90 mbar" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "text", "value": "ISO160 bolted" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "kg", "value": "157" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "dB(A)", "value": "70" }, { "canonical": { "q": 0.0008, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "mbar", "value": "8 x 10-4" } ], "series": "QMB", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-qmb250f", "lifecycleState": "unknown", "name": "QMB250F", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "text", "value": "0 to 180 mbar" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "text", "value": "ISO63 bolted" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "kg", "value": "65" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "dB(A)", "value": "66" }, { "canonical": { "q": 0.0008, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "mbar", "value": "8 x 10-4" } ], "series": "QMB", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:roots-booster", "id": "pump:edwards-qmb500f", "lifecycleState": "unknown", "name": "QMB500F", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "text", "value": "5 to 40 oC" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "text", "value": "0 to 110 mbar" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "text", "value": "ISO100 bolted" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "kg", "value": "78" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "dB(A)", "value": "66" }, { "canonical": { "q": 0.0008, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" } ], "unitPrinted": "mbar", "value": "8 x 10-4" } ], "series": "QMB", "sources": [ { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" }, { "page": null, "source": "src:drypump-edwards-qmb" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-301", "lifecycleState": "eol_supported", "name": "STP-301", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "20", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "2 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "5 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "10^8" }, { "key": "cooling", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Natural air cooling (Water/air cooling: for baking/gas suction)" }, { "key": "inlet_flange", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "ICF152/VG100/ISO10" }, { "key": "lubricant", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "25", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "15 mT (150 G) axial, 3 mT (30 G) radial" }, { "key": "mass", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "kg", "value": "11" }, { "key": "max_foreline_pressure", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "13 Pa (0.1 Torr)" }, { "key": "mounting_orientation", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 280, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "280" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "rotation_speed", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "rpm", "value": "25,000 to 48,000" }, { "key": "startup_time", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "min", "value": "3" }, { "canonical": { "q": 1e-10, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "10^-8 Pa (10^-10 Torr)" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "300", "q": 300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-451", "lifecycleState": "eol_supported", "name": "STP-451", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "20", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "2 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "5 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "10^8" }, { "key": "cooling", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Natural air cooling (Water/air cooling: for baking/gas suction)" }, { "key": "inlet_flange", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "ICF203/VG150/ISO16" }, { "key": "lubricant", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "25", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "15 mT (150 G) axial, 3 mT (30 G) radial" }, { "key": "mass", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "kg", "value": "12" }, { "key": "max_foreline_pressure", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "13 Pa (0.1 Torr)" }, { "key": "mounting_orientation", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 460, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "460" }, { "canonical": { "q": 460, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "460" }, { "canonical": { "q": 480, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "480" }, { "key": "rotation_speed", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "rpm", "value": "25,000 to 48,000" }, { "key": "startup_time", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "min", "value": "3" }, { "canonical": { "q": 1e-10, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "10^-8 Pa (10^-10 Torr)" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "480", "q": 480, "rule": "published nitrogen pumping speed", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-a1303", "lifecycleState": "active", "name": "STP-A1303", "parameters": [], "series": "STP", "sources": [ { "page": "1", "source": "src:tf-edwards-stp-a1303-manual" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-a1603c", "lifecycleState": "active", "name": "STP-A1603C", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "°C", "value": "< 120" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:ptb-edwards-stpa1603c" } ], "value": "magnetic bearing" }, { "key": "compression_h2", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "7×103" }, { "key": "cooling", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "ISO200F/VG200/ICF253" }, { "key": "lubricant", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "kg", "value": "35" }, { "key": "max_foreline_pressure", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "Pa", "value": "266" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "Pa·m3/s", "value": "4.2" }, { "key": "mounting_orientation", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 1200, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "L/s", "value": "1200" }, { "canonical": { "q": 1600, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "L/s", "value": "1600" }, { "key": "purge_flange", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "Pa·m3/s", "value": "3.4×10-2 to 8.4×10-2" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "rpm", "value": "36500" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "min", "value": "7" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "Pa", "value": "10-7" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "L/s", "printedValue": "1600", "q": 1600, "rule": "published nitrogen pumping speed", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-f2203c", "lifecycleState": "active", "name": "STP-F2203C", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "°C", "value": "< 120" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": "magnetic bearing" }, { "key": "cooling", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": "Water cooling" }, { "key": "lubricant", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "kg", "value": "61" }, { "key": "max_foreline_pressure", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "Pa", "value": "500" }, { "key": "mounting_orientation", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 1200, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "L/s", "value": "1200" }, { "canonical": { "q": 2200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "L/s", "value": "2200" }, { "key": "purge_flange", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "Pa·m3/s", "value": "3.4×10-2 to 8.4×10-2" }, { "key": "rotation_speed", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "startup_time", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "min", "value": "7" }, { "canonical": { "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "Pa", "value": "10-6" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "L/s", "printedValue": "2200", "q": 2200, "rule": "published nitrogen pumping speed", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-ix455", "lifecycleState": "active", "name": "STP-iX455", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "°C", "value": "< 120" }, { "key": "bearing_type", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "5 axis free-controlled magnetic bearing" }, { "key": "compression_h2", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "1×104" }, { "key": "cooling", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "Natural air cooling" }, { "key": "lubricant", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "mGauss", "value": "≦100" }, { "key": "mass", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "kg", "value": "16" }, { "key": "max_foreline_pressure", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "Pa", "value": "67" }, { "key": "mounting_orientation", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "dB", "value": "<50" }, { "key": "power_max", "sources": [ { "page": "128", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "A", "value": "5" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "L/s", "value": "300" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "L/s", "value": "300" }, { "key": "rotation_speed", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "rpm", "value": "55000" }, { "key": "startup_time", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "min", "value": "≦6" }, { "canonical": { "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "Pa", "value": "10-8" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "L/s", "printedValue": "300", "q": 300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Gamma Vacuum", "brandId": "brand:gamma-vacuum", "family": "fam:ion-diode", "id": "pump:gamma-titan-5s", "lifecycleState": "unknown", "name": "TiTan 5S CV", "parameters": [ { "key": "bake_temp_max_without_magnets", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "°C", "value": "450" }, { "key": "cathode_material", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "100% Titanium" }, { "key": "inlet_flange", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "DN 35 (2.75 in.) CFR" }, { "key": "magnet_type", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "rare earth" }, { "key": "mass", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "kg", "value": "2.3" }, { "key": "operating_life_at_reference_pressure", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "hours", "value": "50000" }, { "canonical": { "q": 5, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "l/s", "value": "5" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "mbar", "value": "≤ 1 x 10^-11" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "5", "q": 5, "rule": "published nitrogen pumping speed", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Gamma Vacuum", "brandId": "brand:gamma-vacuum", "family": "fam:ion-noble-diode", "id": "pump:gamma-titan-5s-di", "lifecycleState": "unknown", "name": "TiTan 5S DI", "parameters": [ { "key": "bake_temp_max_without_magnets", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "°C", "value": "450" }, { "key": "cathode_material", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "50% Titanium / 50% Tantalum" }, { "key": "inlet_flange", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "DN 35 (2.75 in.) CFR" }, { "key": "magnet_type", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "rare earth" }, { "key": "mass", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "kg", "value": "2.3" }, { "key": "operating_life_at_reference_pressure", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "hours", "value": "50000" }, { "canonical": { "q": 2, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "l/s", "value": "2" }, { "key": "starting_pressure_max", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "mbar", "value": "0.0001" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "mbar", "value": "≤ 1 x 10^-11" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "2", "q": 2, "rule": "published nitrogen pumping speed", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:claw", "id": "pump:leybold-dryvac-100p", "lifecycleState": "unknown", "name": "DRYVAC 100P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "40ºC (104ºF)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "210 kg (463 lbs)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "150 mbar (112 Torr)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "dB(A)", "value": "68" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "4.0 kW (5.4 hp)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "50 Hz operation: 100 m 3 · h -1 (59 cfm); 60 Hz operation: 100 m 3 · h -1 (59 cfm)" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "4" }, { "canonical": { "q": 0.015, "restatedInSource": { "count": 3, "spread": 1.023 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "50 Hz operation: 1.5·10-2 mbar (1.1x10 -2 Torr); 60 Hz operation: 1.5·10-2 mbar (1.1x10 -2 Torr), with purge-control plate set to “ETCH”" } ], "series": "DRYVAC P", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "50 Hz operation: 100 m 3 · h -1 (59 cfm); 60 Hz operation: 100 m 3 · h -1 (59 cfm)", "q": 27.778, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 100, "unit": "m 3 · h -1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-p" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:claw", "id": "pump:leybold-dryvac-100s", "lifecycleState": "unknown", "name": "DRYVAC 100S", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "40°C (104°F)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "220 kg (485 lb)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "150 mbar (112 Torr)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "dB(A)", "value": "68" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "4.0 kW (5.4 hp)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "60 Hz operation: 100 m 3 · h -1 (59 cfm); 50 Hz operation: 100 m 3 · h -1 (59 cfm)" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "4" }, { "canonical": { "q": 0.015, "restatedInSource": { "count": 3, "spread": 1.023 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "60 Hz operation: ≤1.5 · 10-2 mbar (1.1 x 10 -2 Torr); 50 Hz operation: ≤1.5 · 10-2 mbar (1.1 x 10 -2 Torr)" } ], "series": "DRYVAC S", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "60 Hz operation: 100 m 3 · h -1 (59 cfm); 50 Hz operation: 100 m 3 · h -1 (59 cfm)", "q": 27.778, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 100, "unit": "m 3 · h -1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:claw", "id": "pump:leybold-dryvac-25p", "lifecycleState": "unknown", "name": "DRYVAC 25P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "40ºC (104ºF)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "170 kg (375 lbs)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "1000 mbar (750 Torr)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "dB(A)", "value": "62" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "2.8 kW (3.8 hp)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "50 Hz operation: 25 m3 · h -1 (14.7 cfm); 60 Hz operation: 30 m3 · h -1 (17.7 cfm)" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "4" }, { "canonical": { "q": 0.04, "restatedInSource": { "count": 3, "spread": 1.6 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "50 Hz operation: 4·10-2 mbar (3x10 -2 Torr); 60 Hz operation: 2.5·10-2 mbar (1.9x10 -2 Torr), with purge-control plate set to “ETCH”" } ], "series": "DRYVAC P", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "50 Hz operation: 25 m3 · h -1 (14.7 cfm); 60 Hz operation: 30 m3 · h -1 (17.7 cfm)", "q": 8.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 30, "unit": "m3 · h -1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-p" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:claw", "id": "pump:leybold-dryvac-50p", "lifecycleState": "unknown", "name": "DRYVAC 50P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "40ºC (104ºF)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "180 kg (397 lbs)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "300 mbar (225 Torr)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "dB(A)", "value": "62" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "2.8 kW (3.8 hp)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "50 Hz operation: 45 m 3 · h -1 (26.5 cfm); 60 Hz operation: 55 m 3 · h -1 (32.4 cfm)" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "4" }, { "canonical": { "q": 0.04, "restatedInSource": { "count": 3, "spread": 1.6 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "unitPrinted": "text", "value": "50 Hz operation: 4·10-2 mbar (3x10 -2 Torr); 60 Hz operation: 2.5·10-2 mbar (1.9x10 -2 Torr), with purge-control plate set to “ETCH”" } ], "series": "DRYVAC P", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "50 Hz operation: 45 m 3 · h -1 (26.5 cfm); 60 Hz operation: 55 m 3 · h -1 (32.4 cfm)", "q": 15.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 55, "unit": "m 3 · h -1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-p" }, { "page": null, "source": "src:drypump-leybold-dryvac-p" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:claw", "id": "pump:leybold-dryvac-50s", "lifecycleState": "unknown", "name": "DRYVAC 50S", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "40°C (104°F)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "190 kg (419 lb)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "500 mbar (375 Torr)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "dB(A)", "value": "64" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "3 kW (4 hp)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "60 Hz operation: 55 m 3 · h -1 (32 cfm); 50 Hz operation: 45 m 3 · h -1 (26 cfm)" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "4" }, { "canonical": { "q": 0.025, "restatedInSource": { "count": 3, "spread": 1.6 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "unitPrinted": "text", "value": "60 Hz operation: ≤2.5 · 10-2 mbar (1.9 x 10 -2 Torr); 50 Hz operation: ≤4 · 10-2 mbar (3 x 10 -2 Torr)" } ], "series": "DRYVAC S", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "60 Hz operation: 55 m 3 · h -1 (32 cfm); 50 Hz operation: 45 m 3 · h -1 (26 cfm)", "q": 15.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 55, "unit": "m 3 · h -1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-s" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" }, { "page": null, "source": "src:drypump-leybold-dryvac-s" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:screw", "id": "pump:leybold-dryvac-dv1200", "lifecycleState": "unknown", "name": "DRYVAC DV 1200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], 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choose", "selected": { "q": 1250, "unit": "m3/h" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" }, { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:screw", "id": "pump:leybold-dryvac-dv450", "lifecycleState": "unknown", "name": "DRYVAC DV 450", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "text", "value": "+5 to +50 °C" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "text", "value": "+200 mbar" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "text", "value": "DN 100 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"unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "kg", "value": "550" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "mbar", "value": "1,050" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "dB(A)", "value": "67" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "kW", "value": "15" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "m3/h", "value": "650" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "text", "value": "1 year" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "text", "value": "1" }, { "canonical": { "bound": "less_than", "q": 0.005, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "unitPrinted": "text", "value": "< 5 x 10-3 mbar" } ], "series": "DRYVAC DV", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3/h", "printedValue": "650", "q": 180.556, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 650, "unit": "m3/h" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" }, { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" }, { "page": null, "source": "src:drypump-leybold-dryvac-dv450-1200" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:claw", "id": "pump:leybold-dryvac-set-251s", "lifecycleState": "unknown", "name": "DRYVAC SET 251S", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "40°C (104°F)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "290 kg (640 lb)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "5 mbar (4 Torr)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "dB(A)", "value": "65" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "3.9 kW (5.3 hp)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "60 Hz operation: 250 m3 · h -1 (147 cfm); 50 Hz operation: 210 m3 · h -1 (124 cfm)" }, { "canonical": { "q": 0.002, "restatedInSource": { "count": 3, "spread": 1.5 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "60 Hz operation: ≤2 · 10-3 mbar (1.5 x 10 -3 Torr); 50 Hz operation: ≤3 · 10-3 mbar (2 x 10 -3 Torr), with purge-control plate set for \"ETCH\"" } ], "series": "DRYVAC SET", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "60 Hz operation: 250 m3 · h -1 (147 cfm); 50 Hz operation: 210 m3 · h -1 (124 cfm)", "q": 69.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 250, "unit": "m3 · h -1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:claw", "id": "pump:leybold-dryvac-set-501s", "lifecycleState": "unknown", "name": "DRYVAC SET 501S", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "40°C (104°F)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "360 kg (795 lb)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "5 mbar (4 Torr)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "dB(A)", "value": "70" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "6.2 kW (8.4 hp)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "60 Hz operation: 480 m3 · h -1 (283 cfm); 50 Hz operation: 400 m3 · h -1 (236 cfm)" }, { "canonical": { "q": 0.002, "restatedInSource": { "count": 3, "spread": 1.5 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "unitPrinted": "text", "value": "60 Hz operation: ≤2 · 10-3 mbar (1.5 x 10 -3 Torr); 50 Hz operation: ≤3 · 10-3 mbar (2 x 10 -3 Torr), with purge-control plate set for \"ETCH\"" } ], "series": "DRYVAC SET", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "60 Hz operation: 480 m3 · h -1 (283 cfm); 50 Hz operation: 400 m3 · h -1 (236 cfm)", "q": 133.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 480, "unit": "m3 · h -1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" }, { "page": null, "source": "src:drypump-leybold-dryvac-pck" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:piston-dry", "id": "pump:leybold-ecodry-l", "lifecycleState": "unknown", "name": "EcoDry-L", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "text", "value": "< 50 (122 °F) °C" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "text", "value": "DN 40 KF" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "text", "value": "~ 95 kg" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "mbar", "value": "30" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "dB (A)", "value": "64" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "text", "value": "500 W at ultimate pressure" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "m3 · h-1", "value": "48 (at 60 Hz) - 38 (at 50 Hz)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "text", "value": "maintenance-free continuous operation for up to 2 years" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "text", "value": "4 (Four stages of gas compression)" }, { "canonical": { "q": 0.03, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "unitPrinted": "text", "value": "3·10-2 (60 Hz) - 4·10-2 (50 Hz) mbar" } ], "series": "EcoDry", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 · h-1", "printedValue": "48 (at 60 Hz) - 38 (at 50 Hz)", "q": 13.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 48, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-l" }, { "page": null, "source": "src:drypump-leybold-ecodry-l" }, { "page": null, "source": "src:drypump-leybold-ecodry-l" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:piston-dry", "id": "pump:leybold-ecodry-m-15", "lifecycleState": "unknown", "name": "EcoDry M 15", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "0 - 50 / 32 - 122 °C/°F" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "DN 25 KF or G 3/4”" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "38/84 kg/lbs (with three phase motor)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "mbar", "value": "100" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "< 59 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "300 W at inlet pressures < 20 mbar (15 Torr)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "7", "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "m3 · h-1", "value": "14 m3 · h-1 @ 50 Hz, 16 m3 · h-1 @ 60 Hz" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "operating continuously for a period of two years without any maintenance" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "3 (M 15 column of the specification table)" }, { "canonical": { "q": 0.03, "restatedInSource": { "count": 1, "spread": 1.304 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "3 · 10-2 / 2.3 · 10-2 mbar/Torr at 50 Hz (M 15 = first column)" } ], "series": "EcoDry M", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 · h-1", "printedValue": "14 m3 · h-1 @ 50 Hz, 16 m3 · h-1 @ 60 Hz", "q": 4.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 16, "unit": "m3 · h-1" }, "sources": [ { "page": "7", "source": "src:drypump-leybold-ecodry-m-15-20" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" }, { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" }, { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:piston-dry", "id": "pump:leybold-ecodry-m-20", "lifecycleState": "unknown", "name": "EcoDry M 20", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "0 - 50 / 32 - 122 °C/°F" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "DN 25 KF or G 3/4”" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "38/84 kg/lbs (with three phase motor)" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "mbar", "value": "100" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "< 59 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "300 W at inlet pressures < 20 mbar (15 Torr)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "7", "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "m3 · h-1", "value": "19 m3 · h-1 @ 50 Hz, 22 m3 · h-1 @ 60 Hz" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "operating continuously for a period of two years without any maintenance" }, { "key": "stages", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "2 (M 20 column of the specification table)" }, { "canonical": { "q": 0.5, "restatedInSource": { "count": 1, "spread": 1.316 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ], "unitPrinted": "text", "value": "5 · 10-1 / 3.8 · 10-1 mbar/Torr at 50 Hz (M 20 = second column)" } ], "series": "EcoDry M", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 · h-1", "printedValue": "19 m3 · h-1 @ 50 Hz, 22 m3 · h-1 @ 60 Hz", "q": 6.111, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 22, "unit": "m3 · h-1" }, "sources": [ { "page": "7", "source": "src:drypump-leybold-ecodry-m-15-20" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" }, { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" }, { "page": null, "source": "src:drypump-leybold-ecodry-m-15-20" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:ion-diode", "id": "pump:leybold-iz-100", "lifecycleState": "eol_unsupported", "name": "IZ100", "parameters": [ { "key": "ambient_humidity_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "%", "value": "< 85" }, { "key": "ambient_temp_range", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "0 to +40" }, { "key": "degassing_heater_power_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "W", "value": "320" }, { "key": "degassing_heater_voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "V AC", "value": "220 - 240" }, { "key": "degassing_temp_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "350" }, { "key": "degassing_temp_with_internal_heater", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "250" }, { "key": "dimensions_wdh", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mm", "value": "337 x 167 x 340" }, { "key": "mass", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kg", "value": "37" }, { "key": "operating_pressure_recommended", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 5.0 x 10-5" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 100, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "100" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 10-11" }, { "key": "voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kV", "value": "7.5" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "100", "q": 100, "rule": "published nitrogen pumping speed", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:ion-diode", "id": "pump:leybold-iz-200", "lifecycleState": "eol_unsupported", "name": "IZ200", "parameters": [ { "key": "ambient_humidity_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "%", "value": "< 85" }, { "key": "ambient_temp_range", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "0 to +40" }, { "key": "degassing_heater_power_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "W", "value": "600" }, { "key": "degassing_heater_voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "V AC", "value": "220 - 240" }, { "key": "degassing_temp_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "350" }, { "key": "degassing_temp_with_internal_heater", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "250" }, { "key": "dimensions_wdh", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mm", "value": "367 x 296 x 372" }, { "key": "mass", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kg", "value": "65" }, { "key": "operating_pressure_recommended", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 3.8 x 10-5" }, { "canonical": { "q": 105, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "105" }, { "canonical": { "q": 200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "200" }, { "canonical": { "bound": "less_than", "q": 1e-12, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 10-12" }, { "key": "voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kV", "value": "7.5" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "200", "q": 200, "rule": "published nitrogen pumping speed", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:ion-diode", "id": "pump:leybold-iz-30", "lifecycleState": "eol_unsupported", "name": "IZ30", "parameters": [ { "key": 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"Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ra-3001", "lifecycleState": "unknown", "name": "RUVAC RA 3001", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0650 m3/h (0383 cfm)" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "mbar", "value": "53" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "text", "value": "DN 200" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "kg", "value": "620" }, { "key": "noise_level", "sources": [ { "page": null, "source": 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0.04, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 mbar" } ], "series": "RUVAC RA", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "5550 m3 · h-1", "q": 1541.667, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 5550, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ra-7001", "lifecycleState": "unknown", "name": "RUVAC RA 7001", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "1250 m3/h (0736 cfm)" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "mbar", "value": "53" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "text", "value": "DN 250" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "kg", "value": "870" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "dB (A)", "value": "79" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "kW", "value": "18,5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "text", "value": "7470 m3 · h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "text", "value": "3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.04, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 mbar" } ], "series": "RUVAC RA", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "7470 m3 · h-1", "q": 2075, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 7470, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" }, { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ra-9001", "lifecycleState": "unknown", "name": "RUVAC RA 9001", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "3240 m3/h (1907 cfm)" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": "mbar", "value": "66" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-ra" } ], "unitPrinted": 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"page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wa-251", "lifecycleState": "unknown", "name": "RUVAC WA 251", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "12 – 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0050 m3/h (0029 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "mbar", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": 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}, { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wau-151", "lifecycleState": "unknown", "name": "RUVAC WAU 151", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "12 – 40 °C" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "mbar", "value": "130" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "63 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "kg", "value": "84" }, { "key": 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"page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wau-2001", "lifecycleState": "unknown", "name": "RUVAC WAU 2001", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "12 – 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0410 m3/h (0241 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "mbar", "value": "50" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "160 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "kg", "value": "406" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "< 80 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "kW", "value": "7.5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "m3 x h-1", "value": "2050" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.04, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 (< 3 x 10-2) mbar (Torr)" } ], "series": "RUVAC WAU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 x h-1", "printedValue": "2050", "q": 569.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 2050, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wau-251", "lifecycleState": "unknown", "name": "RUVAC WAU 251", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "12 – 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0050 m3/h (0029 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "mbar", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "63 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "kg", "value": "89" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "< 64 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "kW", "value": "1.1" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "m3 x h-1", "value": "253" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.0008, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 8 x 10-4 (< 6 x 10-4) mbar (Torr)" } ], "series": "RUVAC WAU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 x h-1", "printedValue": "253", "q": 70.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 253, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wau-501", "lifecycleState": "unknown", "name": "RUVAC WAU 501", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "12 – 40 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0100 m3/h (0059 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "mbar", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "63 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "kg", "value": "133" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "< 67 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "kW", "value": "2.2" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "m3 x h-1", "value": "505" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.04, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 (< 3 x 10-2) mbar (Torr)" } ], "series": "RUVAC WAU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 x h-1", "printedValue": "505", "q": 140.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 505, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-wau" }, { "page": null, "source": "src:drypump-leybold-ruvac-wau" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wh-2500", "lifecycleState": "unknown", "name": "RUVAC WH 2500", "parameters": [ { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "mbar", "value": "50-75" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "250 ISO-K" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "2500 m3 . h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "Oil change for LVO 210 1 year" } ], "series": "RUVAC WH", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "2500 m3 . h-1", "q": 694.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 2500, "unit": "m3 . h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wh-4400", "lifecycleState": "unknown", "name": "RUVAC WH 4400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "+12 to +40 (+54 to +104) °C (°F)" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0880 m3/h (0518 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "30 to 45 mbar" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "250 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "590 (1301) kg (lbs)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 63 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "4400 (2592) m3 x h-1 (cfm)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "Oil change for LVO 210 1 year" } ], "series": "RUVAC WH", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "4400 (2592) m3 x h-1 (cfm)", "q": 1222.222, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 4400, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wh-700", "lifecycleState": "unknown", "name": "RUVAC WH 700", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "+12 to +45 °C" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0140 m3/h (0082 cfm)" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "mbar", "value": "75.0" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "100 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "125 (276) kg (lbs)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 65 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "710 (418) m3 x h-1 (cfm)" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4-2 (< 3-2) mbar (Torr)" } ], "series": "RUVAC WH", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "710 (418) m3 x h-1 (cfm)", "q": 197.222, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 710, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" }, { "page": null, "source": "src:drypump-leybold-ruvac" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wh-7000", "lifecycleState": "unknown", "name": "RUVAC WH 7000", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "+12 to +40 (+54 to +104) °C (°F)" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "1400 m3/h (0824 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "20 to 30 mbar" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "320 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "650 (1433) kg (lbs)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 63 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "7000 (4123) m3 x h-1 (cfm)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "Oil change for LVO 210 1 year" } ], "series": "RUVAC WH", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "7000 (4123) m3 x h-1 (cfm)", "q": 1944.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 7000, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wh-702", "lifecycleState": "unknown", "name": "RUVAC WH 702", "parameters": [ { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0140 m3/h (0082 cfm)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "100 ISO-K" } ], "series": "RUVAC WH", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" }, { "page": null, "source": "src:drypump-leybold-ruvac" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-whu-2500", "lifecycleState": "unknown", "name": "RUVAC WHU 2500", "parameters": [ { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "mbar", "value": "90" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "250 ISO-K" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "2500 m3 . h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "Oil change for LVO 210 1 year" } ], "series": "RUVAC WHU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "2500 m3 . h-1", "q": 694.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 2500, "unit": "m3 . h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-whu-4400", "lifecycleState": "unknown", "name": "RUVAC WHU 4400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "+12 to +40 (+54 to +104) °C (°F)" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0880 m3/h (0518 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "mbar", "value": "90" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "250 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "590 (1301) kg (lbs)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 63 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "4400 (2592) m3 x h-1 (cfm)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "Oil change for LVO 210 1 year" } ], "series": "RUVAC WHU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "4400 (2592) m3 x h-1 (cfm)", "q": 1222.222, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 4400, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-whu-7000", "lifecycleState": "unknown", "name": "RUVAC WHU 7000", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "+12 to +40 (+54 to +104) °C (°F)" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "1400 m3/h (0824 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "mbar", "value": "70" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "320 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "650 (1433) kg (lbs)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 63 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "7000 (4123) m3 x h-1 (cfm)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ], "unitPrinted": "text", "value": "Oil change for LVO 210 1 year" } ], "series": "RUVAC WHU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "7000 (4123) m3 x h-1 (cfm)", "q": 1944.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 7000, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac-whu" }, { "page": null, "source": "src:drypump-leybold-ruvac-whu" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ws-1001", "lifecycleState": "unknown", "name": "RUVAC WS 1001", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0200 m3/h (0118 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "mbar", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "100 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kg", "value": "228" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "< 68 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kW", "value": "4,0" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "1000 m3 · h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.04, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 (< 3 x 10-2) mbar (Torr)" } ], "series": "RUVAC WS", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "1000 m3 · h-1", "q": 277.778, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 1000, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ws-1001-w", "lifecycleState": "unknown", "name": "RUVAC WS 1001 W", "parameters": [ { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "80.0 (60.0) mbar (Torr)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "100 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "kg", "value": "228.0" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 68 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "kW", "value": "4.0/4.4" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "1000 (589) m3 x h-1 (cfm)" }, { "canonical": { "bound": "less_than", "q": 0.001, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 1 x 10-3 mbar" } ], "series": "RUVAC WS", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "1000 (589) m3 x h-1 (cfm)", "q": 277.778, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 1000, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" }, { "page": null, "source": "src:drypump-leybold-ruvac" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ws-2001", "lifecycleState": "unknown", "name": "RUVAC WS 2001", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0410 m3/h (0241 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "mbar", "value": "50" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "160 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kg", "value": "458" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "< 72 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kW", "value": "7,5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "2050 m3 · h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.04, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 (< 3 x 10-2) mbar (Torr)" } ], "series": "RUVAC WS", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "2050 m3 · h-1", "q": 569.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 2050, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ws-2001-w", "lifecycleState": "unknown", "name": "RUVAC WS 2001 W", "parameters": [ { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "50.0 (37.5) mbar (Torr)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "160 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "kg", "value": "458.0" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 72 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "kW", "value": "7.5 /8.5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "2050 (1207.5) m3 x h-1 (cfm)" }, { "canonical": { "bound": "less_than", "q": 0.001, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 1 x 10-3 mbar" } ], "series": "RUVAC WS", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "2050 (1207.5) m3 x h-1 (cfm)", "q": 569.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 2050, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" }, { "page": null, "source": "src:drypump-leybold-ruvac" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ws-251", "lifecycleState": "unknown", "name": "RUVAC WS 251", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0050 m3/h (0029 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "mbar", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "63 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kg", "value": "90" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "< 63 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kW", "value": "1,1" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "253 m3 · h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.0008, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 8 x 10-4 (< 6 x 10-4) mbar (Torr)" } ], "series": "RUVAC WS", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "253 m3 · h-1", "q": 70.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 253, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ws-501", "lifecycleState": "unknown", "name": "RUVAC WS 501", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0100 m3/h (0059 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "mbar", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "63 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kg", "value": "130" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "< 63 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kW", "value": "2,2" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "505 m3 · h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.04, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 (< 3 x 10-2) mbar (Torr)" } ], "series": "RUVAC WS", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "505 m3 · h-1", "q": 140.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 505, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-ws-501-w", "lifecycleState": "unknown", "name": "RUVAC WS 501 W", "parameters": [ { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "no" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "80 (60) mbar (Torr)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "63 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "130.0 (286.7) kg (lbs)" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 63 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "2.2 (3.0)/2.4 (3.3) kW (hp)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "505.0 (297.4) m3 x h-1 (cfm)" }, { "canonical": { "bound": "less_than", "q": 0.04, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 (< 3 x 10-2) mbar (Torr)" } ], "series": "RUVAC WS", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "505.0 (297.4) m3 x h-1 (cfm)", "q": 140.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 505, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" }, { "page": null, "source": "src:drypump-leybold-ruvac" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wslf-1001", "lifecycleState": "unknown", "name": "RUVAC WSLF 1001", "parameters": [ { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "80 (60) mbar (Torr)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "DN 100" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "275 (606.4) kg (lbs)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "7.5 (10.2) kW (hp)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "1000 (589) m3 x h-1 (cfm)" } ], "series": "RUVAC WSLF", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "1000 (589) m3 x h-1 (cfm)", "q": 277.778, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 1000, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" }, { "page": null, "source": "src:drypump-leybold-ruvac" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wsu-1001", "lifecycleState": "unknown", "name": "RUVAC WSU 1001", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0200 m3/h (0118 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "mbar", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "100 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kg", "value": "233" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "< 68 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kW", "value": "4,0" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "1000 m3 · h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.04, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 (< 3 x 10-2) mbar (Torr)" } ], "series": "RUVAC WSU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "1000 m3 · h-1", "q": 277.778, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 1000, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wsu-1001-w", "lifecycleState": "unknown", "name": "RUVAC WSU 1001 W", "parameters": [ { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "80.0 (60.0) mbar (Torr)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "100 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "kg", "value": "233.0" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 68 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "kW", "value": "4.0/4.4" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "1000 (589) m3 x h-1 (cfm)" }, { "canonical": { "bound": "less_than", "q": 0.001, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 1 x 10-3 mbar" } ], "series": "RUVAC WSU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "1000 (589) m3 x h-1 (cfm)", "q": 277.778, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 1000, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" }, { "page": null, "source": "src:drypump-leybold-ruvac" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wsu-2001", "lifecycleState": "unknown", "name": "RUVAC WSU 2001", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0410 m3/h (0241 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "mbar", "value": "50" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "160 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kg", "value": "465" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "< 72 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kW", "value": "7,5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "2050 m3 · h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.04, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 (< 3 x 10-2) mbar (Torr)" } ], "series": "RUVAC WSU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "2050 m3 · h-1", "q": 569.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 2050, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wsu-2001-w", "lifecycleState": "unknown", "name": "RUVAC WSU 2001 W", "parameters": [ { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "50.0 (37.5) mbar (Torr)" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "160 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "kg", "value": "465.0" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 72 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "kW", "value": "7.5 /8.5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "2050 (1207.5) m3 x h-1 (cfm)" }, { "canonical": { "bound": "less_than", "q": 0.001, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 1 x 10-3 mbar" } ], "series": "RUVAC WSU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "2050 (1207.5) m3 x h-1 (cfm)", "q": 569.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 2050, "unit": "m3 x h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" }, { "page": null, "source": "src:drypump-leybold-ruvac" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wsu-251", "lifecycleState": "unknown", "name": "RUVAC WSU 251", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0050 m3/h (0029 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "mbar", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "63 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kg", "value": "95" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "< 63 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kW", "value": "1,1" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "253 m3 · h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.0008, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 8 x 10-4 (< 6 x 10-4) mbar (Torr)" } ], "series": "RUVAC WSU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "253 m3 · h-1", "q": 70.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 253, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:roots-booster", "id": "pump:leybold-ruvac-wsu-501", "lifecycleState": "unknown", "name": "RUVAC WSU 501", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "°C", "value": "12 - 40" }, { "key": "backing_pump_min_speed", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "0100 m3/h (0059 cfm)" }, { "key": "bypass_valve", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "yes" }, { "key": "differential_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "mbar", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "63 ISO - K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kg", "value": "135" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "< 63 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "kW", "value": "2,2" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "505 m3 · h-1" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "unitPrinted": "text", "value": "after every 3,000 hours of operation" }, { "canonical": { "bound": "less_than", "q": 0.04, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-ruvac" } ], "unitPrinted": "text", "value": "< 4 x 10-2 (< 3 x 10-2) mbar (Torr)" } ], "series": "RUVAC WSU", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "505 m3 · h-1", "q": 140.278, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 505, "unit": "m3 · h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-ruvacws" }, { "page": null, "source": "src:drypump-leybold-ruvacws" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:screw", "id": "pump:leybold-screwline-sp-250", "lifecycleState": "unknown", "name": "ScrewLine SP 250", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "text", "value": "10 to 40 °C" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "text", "value": "+ 200 mbar/- 50 mbar with reference to atmospheric pressure" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "kg", "value": "450" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "mbar", "value": "1030" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "text", "value": "≤ 75 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "text", "value": "7.5 kW (50 Hz), 12 kW" }, { "key": "pumping_speed_nominal", "sources": [ { "page": "13", "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "m3 x h-1", "value": "270 m3 x h-1 @ 50 Hz, 330 m3 x h-1 @ 60 Hz" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "text", "value": "no (standard applications)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "text", "value": "Oil change and oil filter change (once per year)" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" } ], "unitPrinted": "text", "value": "≤ 0.01 mbar (50 Hz), ≤ 0.005 mbar" } ], "series": "ScrewLine", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3 x h-1", "printedValue": "270 m3 x h-1 @ 50 Hz, 330 m3 x h-1 @ 60 Hz", "q": 91.667, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 330, "unit": "m3 x h-1" }, "sources": [ { "page": "13", "source": "src:drypump-leybold-screwline-250" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-250" }, { "page": null, "source": "src:drypump-leybold-screwline-250" }, { "page": null, "source": "src:drypump-leybold-screwline-250" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:screw", "id": "pump:leybold-screwline-sp-630", "lifecycleState": "unknown", "name": "SCREWLINE SP 630", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "text", "value": "10 to 40 °C" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "text", "value": "The pressure in the discharge line must not exceed atmospheric pressure by 200 mbar max." }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "text", "value": "EN 1092-2 - PN 6 - DN 100" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "kg", "value": "530" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "text", "value": "pamb +55 mbar" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "text", "value": "≤ 72 dB (A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "kW", "value": "15" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "text", "value": "630 m3·h-1 (±10 %)" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "text", "value": "no (standard applications)" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "text", "value": "Oil change and oil filter change: at the latest after 20,000 h or 2.5 years" }, { "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "text", "value": "≤ 0.01 mbar" } ], "series": "SCREWLINE", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "text", "printedValue": "630 m3·h-1 (±10 %)", "q": 175, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 630, "unit": "m3·h-1" }, "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" }, { "page": null, "source": "src:drypump-leybold-screwline-630" }, { "page": null, "source": "src:drypump-leybold-screwline-630" }, { "page": null, "source": "src:drypump-leybold-screwline-630" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:screw", "id": "pump:leybold-screwline-sp-630-f", "lifecycleState": "unknown", "name": "SCREWLINE SP 630 F", "parameters": [ { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "unitPrinted": "kW", "value": "15" } ], "series": "SCREWLINE", "sources": [ { "page": null, "source": "src:drypump-leybold-screwline-630" }, { "page": null, "source": "src:drypump-leybold-screwline-630" }, { "page": null, "source": "src:drypump-leybold-screwline-630" }, { "page": null, "source": "src:drypump-leybold-screwline-630" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-classic", "id": "pump:leybold-turbovac-1100", "lifecycleState": "eol_unsupported", "name": "TURBOVAC 1100 C", "parameters": [ { "key": "bearing_type", "sources": [ { "page": "1", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "grease-lubricated bearings" }, { "key": "cooling", "sources": [ { "page": "19", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "DN 250/200/160 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "1", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "grease" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-t1100" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "kg", "value": "22" }, { "key": "max_foreline_pressure", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "mbar", "value": "1 x 10^-1" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "mbar", "value": "1 x 10^-2" }, { "key": "mounting_orientation", "sources": [ { "page": "18", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "18", "source": "src:t3-t1100" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "key": "outlet_flange", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "l/s", "value": "1050" }, { "key": "purge_flange", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "10 or 16 mm KF" }, { "key": "rotation_speed", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "r.p.m.", "value": "30000" }, { "key": "service_interval", "sources": [ { "page": "23", "source": "src:t3-t1100" } ], "unitPrinted": "h", "value": "10000" }, { "key": "startup_time", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "min", "value": "9" }, { "key": "venting_flange", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "DN 10 or 16 KF" } ], "series": "TURBOVAC", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1050", "q": 1050, "rule": "published nitrogen pumping speed", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t3-t1100" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-340-m", "lifecycleState": "legacy_in_service", "name": "TURBOVAC 340 M", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "°C", "value": "up to 45" }, { "key": "compression_h2", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "2.5·10^3" }, { "key": "compression_he", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "6.4·10^4" }, { "key": "compression_n2", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "> 10^9" }, { "key": "cooling", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "not required" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "DN 100 ISO-K" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "kg", "value": "16" }, { "key": "max_foreline_pressure", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "mbar", "value": "5·10^-1" }, { "key": "mounting_orientation", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "10", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 340, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "l/s", "value": "340" }, { "canonical": { "q": 370, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "l/s", "value": "370" }, { "canonical": { "q": 270, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "l/s", "value": "270" }, { "key": "purge_flange", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "DN 10 KF" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "min-1", "value": "51600" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:ptb-leybold-turbovac340" } ], "value": "not_applicable" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "min", "value": "3.5" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "mbar", "value": "< 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "DN 10 KF" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "270", "q": 270, "rule": "published nitrogen pumping speed", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-350i", "lifecycleState": "active", "name": "TURBOVAC 350 i", "parameters": [ { "canonical": { "q": 290, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "Description (colonnes TURBOVAC 350 i(X) et T 350 i(X))", "source": "src:tf-leybold-turbovac-350i-manual" } ], "unitPrinted": "l · s-1", "value": "290" } ], "series": "TURBOVAC i", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l · s-1", "printedValue": "290", "q": 290, "rule": "published nitrogen pumping speed", "sources": [ { "page": "Description (colonnes TURBOVAC 350 i(X) et T 350 i(X))", "source": "src:tf-leybold-turbovac-350i-manual" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "10", "source": "src:tf-leybold-turbovac-350i-manual" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-classic", "id": "pump:leybold-turbovac-360", "lifecycleState": "legacy_in_service", "name": "TURBOVAC 360", "parameters": [], "series": "TURBOVAC", "sources": [ { "page": "2", "source": "src:tf-leybold-turbovac-360-manual" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-1500-c", "lifecycleState": "eol_supported", "name": "MAG 1500 C/CT DN 200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:t2-magdigital" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "10", "source": "src:t2-magdigital" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "1", "source": "src:t2-magdigital" } ], "value": "magnetic bearing" }, { "key": "cooling", "sources": [ { "page": "10", "source": "src:t2-magdigital" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "value": "200 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t2-magdigital" } ], "value": "none (magnetic bearing, no grease)" }, { "key": "mass", "sources": [ { "page": "10", "source": "src:t2-magdigital" } ], "unitPrinted": "kg", "value": "32" }, { "key": "max_foreline_pressure", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "mbar", "value": "1.7" }, { "key": "mounting_orientation", "sources": [ { "page": "6", "source": "src:t2-magdigital" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-magdigital" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "l/s", "value": "920" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "l/s", "value": "1100" }, { "key": "rotation_speed", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "min-1", "value": "36000" }, { "key": "startup_time", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "min", "value": "< 6" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "mbar", "value": "< 10-8" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1100", "q": 1100, "rule": "published nitrogen pumping speed", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-1600", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG 1600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bearing_type", "sources": [ { "page": "41", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_n2", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "value": "> 10^8" }, { "key": "cooling", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "DN 40 KF" }, { "key": "inlet_flange", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "DN 200 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "4", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "no grease" }, { "key": "mass", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "kg", "value": "70" }, { "key": "max_foreline_pressure", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "mbar", "value": "1.5" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 1250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "l/s", "value": "1250" }, { "key": "rotation_speed", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "service_interval", "sources": [ { "page": "62", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "min", "value": "< 10" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "mbar", "value": "< 10^-8" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1250", "q": 1250, "rule": "published nitrogen pumping speed", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-2000", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG 2000", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bearing_type", "sources": [ { "page": "41", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_n2", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "value": "> 10^8" }, { "key": "cooling", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "DN 40 KF" }, { "key": "inlet_flange", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "DN 250 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "4", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "no grease" }, { "key": "mass", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "kg", "value": "68" }, { "key": "max_foreline_pressure", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "mbar", "value": "1.5" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 1550, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "l/s", "value": "1550" }, { "key": "rotation_speed", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "service_interval", "sources": [ { "page": "62", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "min", "value": "< 10" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "mbar", "value": "< 10^-8" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1550", "q": 1550, "rule": "published nitrogen pumping speed", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-400", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG 400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:t2-mag400" } ], "unitPrinted": "°C", "value": "≤ 40" }, { "key": "bearing_type", "sources": [ { "page": "22", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "value": "2.5·10^3" }, { "key": "compression_he", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "value": "6.4·10^4" }, { "key": "compression_n2", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "value": "> 10^9" }, { "key": "cooling", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "DN 25 KF" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "10", "source": "src:t2-mag400" } ], "unitPrinted": "mT", "value": "≤ 5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "kg", "value": "16" }, { "key": "max_foreline_pressure", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "mbar", "value": "0.8" }, { "key": "mounting_orientation", "sources": [ { "page": "5", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "10", "source": "src:t2-mag400" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "DN 10 KF" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "min", "value": "3.5" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "mbar", "value": "< 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "DN 10 KF" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-w-2000", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG W 2000", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "°C", "value": "100" }, { "key": "bearing_type", "sources": [ { "page": "1", "source": "src:t2-mag-w2000" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "value": "9.6 × 10^3" }, { "key": "compression_n2", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "value": "3.8 × 10^8" }, { "key": "cooling", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "text", "value": "DN 40 KF" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "text", "value": "DN 250 CF" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "kg", "value": "72" }, { "key": "max_foreline_pressure", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "mbar", "value": "1" }, { "canonical": { "q": 1650, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "l/s", "value": "1650" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "min", "value": "< 8" }, { "canonical": { "q": 2e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "mbar", "value": "2 × 10^-10" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1650", "q": 1650, "rule": "published nitrogen pumping speed", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-w-2010-c", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG W 2010 C", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bearing_type", "sources": [ { "page": "3", "source": "src:t2-mag-w2010c" } ], "value": "magnetic" }, { "key": "compression_n2", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "value": ">10^8" }, { "key": "cooling", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "value": "DN 250 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "3", "source": "src:t2-mag-w2010c" } ], "value": "none (magnetic bearing, no grease)" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "kg", "value": "approx. 65" }, { "key": "max_foreline_pressure", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "mbar", "value": "3.3" }, { "key": "mounting_orientation", "sources": [ { "page": "3", "source": "src:t2-mag-w2010c" } ], "value": "any" }, { "canonical": { "q": 1650, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "l/s", "value": "1650" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "value": "VCR Nut 1/4\"" }, { "key": "rotation_speed", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "min", "value": "<10" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "mbar", "value": "<10^-8" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1650", "q": 1650, "rule": "published nitrogen pumping speed", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-w-2010-ct", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG W 2010 CT", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bearing_type", "sources": [ { "page": "32", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_n2", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "value": "> 10^8" }, { "key": "cooling", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "DN 40 KF" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "DN 250 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "4", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "no grease" }, { "key": "magnetic_field_max", "sources": [ { "page": "14", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "mT", "value": "≤ 5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "kg", "value": "65" }, { "key": "max_foreline_pressure", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "mbar", "value": "3.5" }, { "key": "max_foreline_pressure_ar", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "mbar", "value": "4.3" }, { "key": "max_gas_throughput_ar", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "sccm", "value": "1300" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "14", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 1650, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "l/s", "value": "1650" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "VCR Nut 1/4\"" }, { "key": "rotation_speed", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "service_interval", "sources": [ { "page": "46", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "nearly maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "min", "value": "< 8" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "mbar", "value": "< 10^-8" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1650", "q": 1650, "rule": "published nitrogen pumping speed", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "generation": "iP", "id": "pump:leybold-turbovac-mag-w-300", "lifecycleState": "active", "name": "TURBOVAC MAG W 300 iP", "parameters": [ { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "section 1.3 Technical data (colonnes MAG W 300 P/iP)", "source": "src:tf-leybold-mag-w-300-manual" } ], "unitPrinted": "l · s-1", "value": "300" } ], "series": "TURBOVAC MAG", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l · s-1", "printedValue": "300", "q": 300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "section 1.3 Technical data (colonnes MAG W 300 P/iP)", "source": "src:tf-leybold-mag-w-300-manual" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "23", "source": "src:tf-leybold-mag-w-300-manual" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-w-830-c", "lifecycleState": "eol_supported", "name": "MAG W 830 C", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "°C", "value": "5 – 40" }, { "key": "bearing_type", "sources": [ { "page": "10", "source": "src:t2-magdigital05141" } ], "unitPrinted": "text", "value": "5-axes controlled magnetic bearing" }, { "key": "compression_n2", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "ratio", "value": "> 5·10^7" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "type", "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "flange", "value": "DN 160 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "10", "source": "src:t2-magdigital05141" } ], "unitPrinted": "text", "value": "none (grease-free magnetic bearing)" }, { "key": "magnetic_field_max", "sources": [ { "page": "44", "source": "src:t2-magdigital05141" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "kg", "value": "32" }, { "key": "max_foreline_pressure", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "mbar", "value": "2" }, { "key": "mounting_orientation", "sources": [ { "page": "10", "source": "src:t2-magdigital05141" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "44", "source": "src:t2-magdigital05141" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 700, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "l/s", "value": "700" }, { "key": "purge_flange", "sources": [ { "page": "22", "source": "src:t2-magdigital05141" } ], "unitPrinted": "flange", "value": "DN 10/16" }, { "key": "rotation_speed", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "min-1", "value": "24000" }, { "key": "startup_time", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "min", "value": "< 4" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "mbar", "value": "< 10^-8" } ], "series": "MAG", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "700", "q": 700, "rule": "published nitrogen pumping speed", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-220", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 220", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "°C", "value": "+15 - + 40 °c" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:t2-tw220-400" } ], "value": "lifetime lubricated ceramic ball bearings" }, { "key": "magnetic_field_max", "sources": [ { "page": "16", "source": "src:t2-tw220-400" } ], "unitPrinted": "mT", "value": "5 mT (radial) / 15 mT (axial)" }, { "key": "mass", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "kg", "value": "12" }, { "key": "max_foreline_pressure", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "mbar", "value": "8" }, { "canonical": { "q": 320, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "l/s", "value": "320" }, { "key": "rotation_speed", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "rpm", "value": "45000" }, { "key": "service_interval", "sources": [ { "page": "27", "source": "src:t2-tw220-400" } ], "unitPrinted": "h", "value": "80000" }, { "key": "startup_time", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "min", "value": "8" } ], "series": "TURBOVAC", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "320", "q": 320, "rule": "published nitrogen pumping speed", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-250-s", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 250 S", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "16", "source": "src:t2-tw250s" } ], "unitPrinted": "°C", "value": "40" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t2-tw250s" } ], "value": "ceramic ball bearings" }, { "key": "compression_ar", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "1.0·10^7" }, { "key": "compression_h2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "5.0·10^2" }, { "key": "compression_he", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "3.2·10^3" }, { "key": "compression_n2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "3.0·10^7" }, { "key": "cooling", "sources": [ { "page": "8", "source": "src:t2-tw250s" } ], "value": "air" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "DN 100 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "16", "source": "src:t2-tw250s" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "kg", "value": "5.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar", "value": "3" }, { "key": "max_gas_throughput_ar", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar l/s", "value": "1.6" }, { "key": "max_gas_throughput_h2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar l/s", "value": "1.1" }, { "key": "max_gas_throughput_he", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar l/s", "value": "2.4" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar l/s", "value": "3.7" }, { "key": "noise_level", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "dB(A)", "value": "< 55" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "l/s", "value": "210" }, { "canonical": { "q": 80, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "l/s", "value": "80" }, { "canonical": { "q": 150, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "l/s", "value": "150" }, { "canonical": { "q": 230, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "l/s", "value": "230" }, { "key": "purge_flange", "sources": [ { "page": "17", "source": "src:t2-tw250s" } ], "value": "M5 (port de purge = port de mise a l'air)" }, { "key": "rotation_speed", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "rpm", "value": "51600" }, { "key": "service_interval", "sources": [ { "page": "38", "source": "src:t2-tw250s" } ], "unitPrinted": "h", "value": "20000" }, { "key": "startup_time", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "min", "value": "approx. 3" }, { "canonical": { "bound": "less_than", "q": 2e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar", "value": "< 2·10-8 mbar" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "thread M 5" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "230", "q": 230, "rule": "published nitrogen pumping speed", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-300", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 300", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "°C", "value": "+15 - +30" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "grease" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "kg", "value": "6.0" }, { "key": "max_foreline_pressure", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "mbar", "value": "<1" }, { "key": "noise_level", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "dB(A)", "value": "< 49" }, { "canonical": { "q": 140, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "l/s", "value": "140" }, { "canonical": { "q": 230, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "l/s", "value": "230" }, { "canonical": { "q": 240, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "l/s", "value": "240" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "DN 16 KF" }, { "key": "rotation_speed", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "startup_time", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "min", "value": "ca. 4" }, { "canonical": { "bound": "less_than", "q": 2e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "mbar", "value": "< 2·10-8" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "DN 16 KF" } ], "series": "TURBOVAC", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "240", "q": 240, "rule": "published nitrogen pumping speed", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-400", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "°C", "value": "+15 - + 40 °c" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:t2-tw220-400" } ], "value": "lifetime lubricated ceramic ball bearings" }, { "key": "magnetic_field_max", "sources": [ { "page": "16", "source": "src:t2-tw220-400" } ], "unitPrinted": "mT", "value": "5 mT (radial) / 15 mT (axial)" }, { "key": "mass", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "kg", "value": "12" }, { "key": "max_foreline_pressure", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "mbar", "value": "8" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "l/s", "value": "400" }, { "key": "rotation_speed", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "rpm", "value": "48000" }, { "key": "service_interval", "sources": [ { "page": "27", "source": "src:t2-tw220-400" } ], "unitPrinted": "h", "value": "80000" }, { "key": "startup_time", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "min", "value": "10" } ], "series": "TURBOVAC", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "400", "q": 400, "rule": "published nitrogen pumping speed", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-70-h", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 70 H", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "°C", "value": "+ 15 - + 45" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "value": "DN 63 ISO-K / DN 63 CF" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-tw70h" } ], "unitPrinted": "mT", "value": "5 mT radial / 15 mT axial" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "kg", "value": "2.3" }, { "key": "max_foreline_pressure", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "noise_level", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "dB(A)", "value": "< 46" }, { "canonical": { "q": 55, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "l·s-1", "value": "55" }, { "canonical": { "q": 65, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "l·s-1", "value": "65" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "rpm", "value": "72000" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "min", "value": "1.5" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "mbar", "value": "< 10-9" } ], "series": "TURBOVAC", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l·s-1", "printedValue": "65", "q": 65, "rule": "published nitrogen pumping speed", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-700", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 700", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "°C", "value": "10 - 45" }, { "key": "bearing_type", "sources": [ { "page": "2", "source": "src:t2-tw700" } ], "value": "ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tw700" } ], "value": "air" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "value": "DN 160 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "2", "source": "src:t2-tw700" } ], "value": "grease" }, { "key": "magnetic_field_max", "sources": [ { "page": "9", "source": "src:t2-tw700" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "kg", "value": "16.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "mounting_orientation", "sources": [ { "page": "11", "source": "src:t2-tw700" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "dB(A)", "value": "< 47" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 530, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "l/s", "value": "530" }, { "canonical": { "q": 680, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "l/s", "value": "680" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "value": "DN 16 KF" }, { "key": "rotation_speed", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "r.p.m.", "value": "48000" }, { "key": "service_interval", "sources": [ { "page": "31", "source": "src:t2-tw700" } ], "unitPrinted": "h", "value": "15000" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "mbar", "value": "< 10-9" } ], "series": "TURBOVAC", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "680", "q": 680, "rule": "published nitrogen pumping speed", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t2-tw700" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-701", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 701", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "11", "source": "src:t2-tw701" } ], "unitPrinted": "°C", "value": "10 - 45" }, { "key": "bake_temp_max", "sources": [ { "page": "42", "source": "src:t2-tw701" } ], "unitPrinted": "°C", "value": "100" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "DN 160 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "grease" }, { "key": "magnetic_field_max", "sources": [ { "page": "14", "source": "src:t2-tw701" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "11", "source": "src:t2-tw701" } ], "unitPrinted": "kg", "value": "16.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "mounting_orientation", "sources": [ { "page": "15", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "11", "source": "src:t2-tw701" } ], "unitPrinted": "dB(A)", "value": "< 47" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 530, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "l/s", "value": "530" }, { "canonical": { "q": 680, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "l/s", "value": "680" }, { "key": "purge_flange", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "DN 16 KF" }, { "key": "rotation_speed", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "rpm", "value": "48000" }, { "key": "service_interval", "sources": [ { "page": "43", "source": "src:t2-tw701" } ], "unitPrinted": "h", "value": "15000" }, { "key": "startup_time", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "min", "value": "approx. 5" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "mbar", "value": "< 10-9" } ], "series": "TURBOVAC", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "680", "q": 680, "rule": "published nitrogen pumping speed", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:multistage-roots", "id": "pump:pfeiffer-a-1204", "lifecycleState": "unknown", "name": "A 1204", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "°C", "value": "5-40" }, { "key": "corrosive_variant", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "H" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "hPa", "value": "1200" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "DN 160 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kg", "value": "530" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "< 69 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "m3/h", "value": "1050/1150" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "N2 purge flow 10 to 120 slm" }, { "key": "temperature_controlled", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "yes" }, { "canonical": { "q": 0.004, "restatedInSource": { "count": 1, "spread": 1.818 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "4·10-3 /2.2·10-3 hPa (without N2 purge)" } ], "series": "A4", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3/h", "printedValue": "1050/1150", "q": 319.444, "rule": "published nominal displacement speed, species not stated by the 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null, "source": "src:drypump-pfeiffer-a4-series-matrix" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:multistage-roots", "id": "pump:pfeiffer-a-1504", "lifecycleState": "unknown", "name": "A 1504", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "°C", "value": "5-40" }, { "key": "corrosive_variant", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "H, X" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "hPa", "value": "1200" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "DN 160 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kg", "value": "540" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "< 69 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kW", "value": "5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "m3/h", "value": "1100/1200" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "N2 purge flow 10 to 120 slm" }, { "key": "temperature_controlled", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "yes" }, { "canonical": { "q": 0.008, "restatedInSource": { "count": 1, "spread": 2 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "8 ·10-3 /4·10-3 hPa (without N2 purge)" } ], "series": "A4", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3/h", "printedValue": "1100/1200", "q": 333.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 1200, "unit": "m3/h" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series-matrix" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:multistage-roots", "id": "pump:pfeiffer-a-1804", "lifecycleState": "unknown", "name": "A 1804", "parameters": [ { "key": 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"value": "H, X" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "hPa", "value": "1200" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "DN 50 ISO-KF" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kg", "value": "250" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "< 65 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kW", "value": "3.5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "m3/h", "value": "130/160" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "N2 purge flow 10 to120 slm" }, { "key": "temperature_controlled", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "yes" }, { "canonical": { "q": 0.2, "restatedInSource": { "count": 1, "spread": 9.091 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "2 ·10-1/2.2·10-2 hPa (without N2 purge)" } ], "series": "A4", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3/h", "printedValue": "130/160", "q": 44.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 160, "unit": "m3/h" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "species": 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"ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "-/4·10-3 hPa (without N2 purge)" } ], "series": "A4", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3/h", "printedValue": "2300", "q": 638.889, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 2300, "unit": "m3/h" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:multistage-roots", "id": "pump:pfeiffer-a-2504", "lifecycleState": "unknown", "name": "A 2504", "parameters": [ { "key": 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"value": "8" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "m3/h", "value": "2500" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "N2 purge flow 10 à 120 slm" }, { "key": "temperature_controlled", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "yes" }, { "canonical": { "q": 0.004, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "4·10-3 hPa (without N2 purge)" } ], "series": "A4", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3/h", "printedValue": "2500", "q": 694.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 2500, "unit": "m3/h" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:multistage-roots", "id": "pump:pfeiffer-a-3004", "lifecycleState": "unknown", "name": "A 3004", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "°C", "value": "5-40" }, { "key": "corrosive_variant", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "H, X" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "hPa", "value": "1200" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "DN 160 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kg", "value": "800" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "< 72 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kW", "value": "8" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "m3/h", "value": "3000" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "N2 purge flow 10 à 120 slm" }, { "key": "temperature_controlled", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "yes" }, { "canonical": { "q": 0.004, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "4 ·10-3 hPa (without N2 purge)" } ], "series": "A4", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3/h", "printedValue": "3000", "q": 833.333, "rule": "published nominal displacement speed, species not stated by the manufacturer, single published value, no regime to choose", "selected": { "q": 3000, "unit": "m3/h" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series-matrix" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:multistage-roots", "id": "pump:pfeiffer-a-604", "lifecycleState": "unknown", "name": "A 604", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "°C", "value": "5-40" }, { "key": "corrosive_variant", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "H" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "hPa", "value": "1200" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kg", "value": "370" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "< 68 dB(A)" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "m3/h", "value": "480/560" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "N2 purge flow 10 to 120 slm" }, { "key": "temperature_controlled", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "yes" }, { "canonical": { "q": 0.003, "restatedInSource": { "count": 1, "spread": 1.5 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "3·10-3 /2·10-3 hPa (without N2 purge)" } ], "series": "A4", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3/h", "printedValue": "480/560", "q": 155.556, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 560, "unit": "m3/h" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series-matrix" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:multistage-roots", "id": "pump:pfeiffer-a-804", "lifecycleState": "unknown", "name": "A 804", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "°C", "value": "5-40" }, { "key": "corrosive_variant", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "H, X" }, { "key": "exhaust_pressure_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "hPa", "value": "1200" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "mass", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kg", "value": "380" }, { "key": "noise_level", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "< 68 dB(A)" }, { "key": "power_max", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "kW", "value": "4.5" }, { "key": "pumping_speed_nominal", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "m3/h", "value": "600/700" }, { "key": "purge_gas_required", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "N2 purge flow 10 to 120 slm" }, { "key": "temperature_controlled", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "yes" }, { "canonical": { "q": 0.008, "restatedInSource": { "count": 1, "spread": 2 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "unitPrinted": "text", "value": "8·10-3 /4·10-3 hPa (without N2 purge)" } ], "series": "A4", "servedSpeed": { "conversion": "m3/h to l/s, exact factor 1/3.6", "fromKey": "pumping_speed_nominal", "printedUnit": "m3/h", "printedValue": "600/700", "q": 194.444, "rule": "published nominal displacement speed, species not stated by the manufacturer, multi-regime value, 60 Hz bound selected by export (US mains), the base keeps every regime", "selected": { "q": 700, "unit": "m3/h" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" } ], "species": "Nominal displacement", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series" }, { "page": null, "source": "src:drypump-pfeiffer-a4-series-matrix" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-hipace-10", "lifecycleState": "active", "name": "HiPace 10", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bearing_type", "sources": [ { "page": "10", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "Ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "3 × 10^2" }, { "key": "compression_he", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "3 × 10^3" }, { "key": "compression_n2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "3 × 10^6" }, { "key": "cooling", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "Convection" }, { "key": "inlet_flange", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "DN 25" }, { "key": "magnetic_field_max", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "kg", "value": "1.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "hPa", "value": "25" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "hPa l/s", "value": "0.37" }, { "key": "mounting_orientation", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "dB(A)", "value": "< 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "W", "value": "28.8" }, { "canonical": { "q": 3.7, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "l/s", "value": "3.7" }, { "canonical": { "q": 6, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "l/s", "value": "6" }, { "canonical": { "q": 10, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "l/s", "value": "10" }, { "key": "rotation_speed", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "min-1", "value": "90000" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "3 years" }, { "key": "startup_time", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "min", "value": "0.9" }, { "canonical": { "bound": "less_than", "q": 0.00005, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "hPa", "value": "< 5 × 10^-5" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "10", "q": 10, "rule": "published nitrogen pumping speed", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-1200", "lifecycleState": "active", "name": "HiPace 1200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "Hybrid bearing turbopump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "6 × 10^3" }, { "key": "compression_he", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "2 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "DN 200 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "kg", "value": "27" }, { "key": "max_foreline_pressure", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "hPa", "value": "2" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "hPa l/s", "value": "20" }, { "key": "mounting_orientation", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "Standard (0°-90°)" }, { "key": "noise_level", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "VA", "value": "1350" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "l/s", "value": "1100" }, { "canonical": { "q": 1300, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "l/s", "value": "1300" }, { "canonical": { "q": 1250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "l/s", "value": "1250" }, { "key": "rotation_speed", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "min-1", "value": "37800" }, { "key": "service_interval", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1250", "q": 1250, "rule": "published nitrogen pumping speed", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-1500", "lifecycleState": "active", "name": "HiPace 1500", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "Hybrid bearing turbopump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "6 × 10^3" }, { "key": "compression_he", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "2 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "DN 250 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "kg", "value": "29" }, { "key": "max_foreline_pressure", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "hPa", "value": "2" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "hPa l/s", "value": "20" }, { "key": "mounting_orientation", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "Standard (0°-90°)" }, { "key": "noise_level", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "VA", "value": "1350" }, { "canonical": { "q": 1150, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "l/s", "value": "1150" }, { "canonical": { "q": 1350, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "l/s", "value": "1350" }, { "canonical": { "q": 1400, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "l/s", "value": "1400" }, { "key": "rotation_speed", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "min-1", "value": "37800" }, { "key": "service_interval", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1400", "q": 1400, "rule": "published nitrogen pumping speed", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-1800", "lifecycleState": "active", "name": "HiPace 1800", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "Hybrid bearing turbopump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "2 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "DN 200 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "38", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "kg", "value": "33" }, { "key": "max_foreline_pressure", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "hPa", "value": "1.8" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "hPa l/s", "value": "20" }, { "key": "mounting_orientation", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "Standard (0°-90°)" }, { "key": "noise_level", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "VA", "value": "1350" }, { "canonical": { "q": 1700, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "l/s", "value": "1700" }, { "canonical": { "q": 1650, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "l/s", "value": "1650" }, { "canonical": { "q": 1450, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "l/s", "value": "1450" }, { "key": "rotation_speed", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "min-1", "value": "31500" }, { "key": "service_interval", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "min", "value": "4" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1450", "q": 1450, "rule": "published nitrogen pumping speed", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-2300", "lifecycleState": "active", "name": "HiPace 2300", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "compression_h2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "2 · 10^4" }, { "key": "compression_he", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "3 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "> 1 · 10^8" }, { "key": "cooling", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "DN 250 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "fluide de fonctionnement synthétique (ex. F3)" }, { "key": "magnetic_field_max", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "kg", "value": "34" }, { "key": "max_foreline_pressure", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "hPa", "value": "1.8" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "hPa·l/s", "value": "20" }, { "key": "noise_level", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "dB(A)", "value": "≤ 50" }, { "key": "power_max", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "VA", "value": "1350" }, { "canonical": { "q": 1850, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "l/s", "value": "1850" }, { "canonical": { "q": 2000, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "l/s", "value": "2000" }, { "canonical": { "q": 1900, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "l/s", "value": "1900" }, { "key": "rotation_speed", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "min-1", "value": "31500" }, { "key": "service_interval", "sources": [ { "page": "31", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "years", "value": "4" }, { "key": "startup_time", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "min", "value": "4" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "hPa", "value": "< 1 · 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1900", "q": 1900, "rule": "published nitrogen pumping speed", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-30", "lifecycleState": "active", "name": "HiPace 30", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "°C", "value": "+5 °C to +30 °C" }, { "key": "bearing_type", "sources": [ { "page": "10", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "Hybrid bearing: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "3 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "Convection" }, { "key": "inlet_flange", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "kg", "value": "2" }, { "key": "max_foreline_pressure", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "hPa", "value": "24" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "hPa l/s", "value": "0.66" }, { "key": "mounting_orientation", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "dB(A)", "value": "≤ 48 dB (A)" }, { "key": "power_max", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "W", "value": "80" }, { "canonical": { "q": 20, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "l/s", "value": "20" }, { "canonical": { "q": 24, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "l/s", "value": "24" }, { "canonical": { "q": 32, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "l/s", "value": "32" }, { "key": "rotation_speed", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "min-1", "value": "90000" }, { "key": "service_interval", "sources": [ { "page": "26", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "min", "value": "1.7" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "32", "q": 32, "rule": "published nitrogen pumping speed", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "generation": "TC 400, 24 V DC ou 48 V DC", "id": "pump:pfeiffer-hipace-300", "lifecycleState": "active", "name": "HiPace 300", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "°C", "value": "5 à 35 air, 5 à 40 eau" }, { "key": "compression_h2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603", "viaArtefact": true } ], "unitPrinted": "ratio", "value": "900000" }, { "key": "compression_he", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603", "viaArtefact": true } ], "unitPrinted": "ratio", "value": "> 1e8" }, { "key": "compression_n2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603", "viaArtefact": true } ], "unitPrinted": "ratio", "value": "> 1e11" }, { "key": "gas_mass_max", "sources": [ { "page": "27", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "amu", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": "10", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "text", "value": "DN 100 ISO-K alu, DN 100 ISO-F alu, DN 100 CF-F inox" }, { "key": "lubricant_ref", "sources": [ { "page": "36", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "value": "PM 143 451 -T (reservoir de fluide, tiges Poroplast incluses)" }, { "key": "mass", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "kg", "value": "6.7" }, { "key": "max_foreline_pressure", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "hPa", "value": "20" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "hPa·l/s", "value": "14" }, { "key": "power_max", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "W", "value": "300" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 255, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "l/s", "value": "255" }, { "canonical": { "q": 260, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "l/s", "value": "260" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "W", "value": "2.4" }, { "key": "rotation_speed", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "min-1", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "years", "value": "4" }, { "key": "startup_time", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "min", "value": "1.8" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603", "viaArtefact": true } ], "unitPrinted": "hPa", "value": "< 5e-10" }, { "key": "venting_port", "sources": [ { "page": "23", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "value": "G 1/8\"" }, { "key": "venting_rate_max", "sources": [ { "page": "29", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "hPa/s", "value": "15" } ], "series": "HiPace", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "260", "q": 260, "rule": "published nitrogen pumping speed", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "10", "source": "src:pfeiffer-pt0200-ben-i-1603" }, { "page": "1", "source": "src:tf-pfeiffer-hipace-300-manual" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-400", "lifecycleState": "active", "name": "HiPace 400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "Hybrid bearing TurboDrag pump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "4 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "DN 100 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "kg", "value": "11.6" }, { "key": "max_foreline_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "hPa", "value": "11" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "hPa l/s", "value": "6.5" }, { "key": "mounting_orientation", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "W", "value": "420" }, { "canonical": { "q": 445, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "l/s", "value": "445" }, { "canonical": { "q": 470, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "l/s", "value": "470" }, { "canonical": { "q": 355, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "l/s", "value": "355" }, { "key": "rotation_speed", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "min-1", "value": "49200" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "min", "value": "2" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "355", "q": 355, "rule": "published nitrogen pumping speed", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-60-p", "lifecycleState": "active", "name": "HiPace 60 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "°C", "value": "+5 °C to +30 °C" }, { "key": "bearing_type", "sources": [ { "page": "10", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "Hybrid bearing: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "2 × 10^2" }, { "key": "compression_he", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "3.5 × 10^2" }, { "key": "compression_n2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "1 × 10^6" }, { "key": "cooling", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "Convection" }, { "key": "inlet_flange", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "kg", "value": "2.2" }, { "key": "max_foreline_pressure", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "hPa", "value": "4" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "hPa l/s", "value": "9.2" }, { "key": "mounting_orientation", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "dB(A)", "value": "≤ 48 dB (A)" }, { "key": "power_max", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "W", "value": "110" }, { "canonical": { "q": 28, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "l/s", "value": "28" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 64, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "l/s", "value": "64" }, { "key": "rotation_speed", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "min-1", "value": "90000" }, { "key": "service_interval", "sources": [ { "page": "24", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "min", "value": "1.1" }, { "canonical": { "bound": "less_than", "q": 0.000001, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-6" }, { "key": "venting_flange", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "64", "q": 64, "rule": "published nitrogen pumping speed", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-700", "lifecycleState": "active", "name": "HiPace 700", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "Hybrid bearing TurboDrag pump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "4 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "DN 160 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "kg", "value": "11.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "hPa", "value": "11" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "hPa l/s", "value": "6.5" }, { "key": "mounting_orientation", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "W", "value": "400" }, { "canonical": { "q": 555, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "l/s", "value": "555" }, { "canonical": { "q": 655, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "l/s", "value": "655" }, { "canonical": { "q": 685, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "l/s", "value": "685" }, { "key": "rotation_speed", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "min-1", "value": "49200" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "min", "value": "2" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "685", "q": 685, "rule": "published nitrogen pumping speed", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-80", "lifecycleState": "active", "name": "HiPace 80", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "°C", "value": "+5 °C to +30 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "Hybrid bearing TurboDrag pump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "1.4 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "1.3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "Convection" }, { "key": "inlet_flange", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "mT", "value": "3.3" }, { "key": "mass", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "kg", "value": "2.4" }, { "key": "max_foreline_pressure", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "hPa", "value": "22" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "hPa l/s", "value": "1.3" }, { "key": "mounting_orientation", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "dB(A)", "value": "≤ 48 dB (A)" }, { "key": "power_max", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "W", "value": "110" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 58, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "l/s", "value": "58" }, { "canonical": { "q": 67, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "l/s", "value": "67" }, { "key": "rotation_speed", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "min-1", "value": "90000" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "min", "value": "1.7" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "67", "q": 67, "rule": "published nitrogen pumping speed", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-800", "lifecycleState": "active", "name": "HiPace 800", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "Hybrid bearing TurboDrag pump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "4 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "DN 200 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "kg", "value": "12.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "hPa", "value": "11" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "hPa l/s", "value": "6.5" }, { "key": "mounting_orientation", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "W", "value": "420" }, { "canonical": { "q": 580, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "l/s", "value": "580" }, { "canonical": { "q": 700, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "l/s", "value": "700" }, { "canonical": { "q": 790, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "l/s", "value": "790" }, { "key": "rotation_speed", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "min-1", "value": "49200" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "min", "value": "2" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "790", "q": 790, "rule": "published nitrogen pumping speed", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-064", "lifecycleState": "eol_supported", "name": "TMH 064", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-064-065" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "4·10^3" }, { "key": "compression_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "7·10^4" }, { "key": "compression_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "> 10^9" }, { "key": "cooling", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "convection" }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "DN 40 ISO-KF" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "kg", "value": "3.6" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar l/s", "value": "1.1" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 20, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "20" }, { "canonical": { "q": 40, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "40" }, { "canonical": { "q": 30, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "30" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "W", "value": "4" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t2-tmh-tmu-064-065" } ], "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1·10^-8" }, { "key": "ultimate_pressure_rotary_backing", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 2 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "30", "q": 30, "rule": "published nitrogen pumping speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-065", "lifecycleState": "eol_supported", "name": "TMH 065", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-064-065" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "1·10^5" }, { "key": "compression_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "1·10^7" }, { "key": "compression_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "> 10^10" }, { "key": "cooling", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "convection" }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "DN 40 ISO-KF" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "kg", "value": "4.7" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar l/s", "value": "0.8" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 34, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "34" }, { "canonical": { "q": 40, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "40" }, { "canonical": { "q": 30, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "30" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "W", "value": "4" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t2-tmh-tmu-064-065" } ], "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "min", "value": "3" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1·10^-9" }, { "key": "ultimate_pressure_rotary_backing", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "30", "q": 30, "rule": "published nitrogen pumping speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-071", "lifecycleState": "eol_supported", "name": "TMH 071", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "°C", "value": "0 - 40" }, { "key": "compression_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "> 10 5" }, { "key": "compression_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "6 · 10⁶" }, { "key": "compression_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "> 10 11" }, { "key": "inlet_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "DN 63 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "kg", "value": "3.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar l/s", "value": "1.3" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "dB (A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "W", "value": "110" }, { "canonical": { "q": 42, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "42" }, { "canonical": { "q": 50, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "50" }, { "canonical": { "q": 59, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "59" }, { "key": "rotation_speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "Hz", "value": "1500" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "years", "value": "3" }, { "key": "startup_time", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar", "value": "<.1 · 10⁻⁷" }, { "key": "venting_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "59", "q": 59, "rule": "published nitrogen pumping speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t2-tmh-tmu-071" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-1001", "lifecycleState": "eol_supported", "name": "TMH 1001 P", "parameters": [ { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-1001" } ], "value": "Wear free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "2·10^6" }, { "key": "compression_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "> 1·10^8" }, { "key": "compression_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-1001" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "DN 200 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "kg", "value": "36" }, { "key": "max_foreline_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar l/s", "value": "20" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 720, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "720" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "920" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "920" }, { "key": "rotation_speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "1/min", "value": "39600" }, { "key": "rotor_temp_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "°C", "value": "120" }, { "key": "service_interval", "sources": [ { "page": "22", "source": "src:t2-tmh-tmu-1001" } ], "value": "once a year" }, { "key": "startup_time", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar", "value": "< 1 · 10-7 mbar" }, { "key": "venting_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "920", "q": 920, "rule": "published nitrogen pumping speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-1600", "lifecycleState": "eol_unsupported", "name": "TMH 1600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "High vacuum side: Wear free permanent magnetic bearing. Fore-vacuum side: Oil circulatory lubricated bearings with ceramic balls." }, { "key": "compression_h2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "3 · 10^6" }, { "key": "compression_he", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "> 1 · 10^8" }, { "key": "compression_n2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "heater_power", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "W", "value": "170" }, { "key": "inlet_flange", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "ISO-K" }, { "key": "lubricant", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "TL 011 or F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "mT", "value": "3" }, { "key": "noise_level", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "dB (A)", "value": "< 47" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1050" }, { "canonical": { "q": 1320, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1320" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1100" }, { "key": "rotation_speed", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "1/min", "value": "36000" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "mbar", "value": "< 1 · 10^-8" }, { "key": "venting_flange", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "G 1/8″" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1100", "q": 1100, "rule": "published nitrogen pumping speed", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t3-tmh-tmu-1600" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-1601", "lifecycleState": "eol_unsupported", "name": "TMH 1601 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "°C", "value": "0-35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1601" } ], "value": "Wear free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "2 · 10^5" }, { "key": "compression_he", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "2 · 10^7" }, { "key": "compression_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "10^11" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1601" } ], "value": "water cooling (standard)" }, { "key": "inlet_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "DN 200 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "F3" }, { "key": "lubricant_volume", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "cm3", "value": "65" }, { "key": "magnetic_field_max", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "kg", "value": "49/51" }, { "key": "max_foreline_pressure", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar·l/s", "value": "22" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "dB(A)", "value": "47" }, { "key": "outlet_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "DN 40 ISO-KF" }, { "canonical": { "q": 750, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "750" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "1100" }, { "canonical": { "q": 1000, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "1000" }, { "key": "purge_flange", "sources": [ { "page": "27", "source": "src:t3-tmh1601tmu" } ], "unitPrinted": "text", "value": "DN 10 ISO-KF" }, { "key": "rotation_speed", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "1/min", "value": "36000" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tmh1601tmu" } ], "unitPrinted": "text", "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "min", "value": "6" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar", "value": "< 1 · 10-8" }, { "key": "venting_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "G 1/8″" } ], "series": "TMH/TMU 1601", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1000", "q": 1000, "rule": "published nitrogen pumping speed", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-260", "lifecycleState": "eol_supported", "name": "TMH 260", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "1.3 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "> 1 × 10^9" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "Water cooling (standard)" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mT", "value": "5.5" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "kg", "value": "7.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar l/s", "value": "3.5" }, { "key": "noise_level", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "outlet_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "DN 25 ISO-KF / G 1/4\"" }, { "canonical": { "q": 180, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "180" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "radiated_heat_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "W", "value": "8" }, { "key": "rotation_speed", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "1/min", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "min", "value": "1:45" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar", "value": "< 1 × 10^-8 mbar" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "210", "q": 210, "rule": "published nitrogen pumping speed", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-261", "lifecycleState": "eol_supported", "name": "TMH 261", "parameters": [ { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "33", "source": "src:t2-tmu261p" } ], "unitPrinted": "l/s", "value": "210" } ], "series": "TMH", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "210", "q": 210, "rule": "published nitrogen pumping speed", "sources": [ { "page": "33", "source": "src:t2-tmu261p" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "34", "source": "src:t2-tmu261p" }, { "page": "7", "source": "src:t2-tmu261p" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-262", "lifecycleState": "eol_supported", "name": "TMH 262", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "1.3 · 10^4" }, { "key": "compression_he", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "3 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "> 1 · 10^9" }, { "key": "inlet_flange", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mT", "value": "5.5" }, { "key": "mass", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "kg", "value": "4.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar l/s", "value": "4.7" }, { "key": "noise_level", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "power_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "W", "value": "150" }, { "canonical": { "q": 190, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "190" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "radiated_heat_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "W", "value": "8" }, { "key": "rotation_speed", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "1/min", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "°C", "value": "90" }, { "key": "startup_time", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "min", "value": "3.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar", "value": "< 1 · 10^-8" }, { "key": "venting_flange", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "210", "q": 210, "rule": "published nitrogen pumping speed", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-521", "lifecycleState": "eol_supported", "name": "TMH 521 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-521" } ], "value": "oil circulatory lubricated ball bearing with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "5·10^6" }, { "key": "compression_he", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "5·10^7" }, { "key": "compression_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-521" } ], "value": "Water cooling or air cooling required" }, { "key": "inlet_flange", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "kg", "value": "13" }, { "key": "max_foreline_pressure", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar", "value": "16" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar l/s", "value": "3" }, { "key": "mounting_orientation", "sources": [ { "page": "6", "source": "src:t2-tmh-tmu-521" } ], "value": "vertically (0°) up to an angle of 90° maximum" }, { "key": "noise_level", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "power_max", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "W", "value": "300" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "purge_flange", "sources": [ { "page": "22", "source": "src:t2-tmh-tmu-521" } ], "value": "DN 16 ISO-KF-10" }, { "key": "rotation_speed", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "rpm", "value": "50000" }, { "key": "service_interval", "sources": [ { "page": "17", "source": "src:t2-tmh-tmu-521" } ], "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "min", "value": "5.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar", "value": "< 1·10^-8 mbar" }, { "key": "venting_flange", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "300", "q": 300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-064", "lifecycleState": "eol_supported", "name": "TMU 064", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-064-065" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "4·10^3" }, { "key": "compression_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "7·10^4" }, { "key": "compression_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "> 10^9" }, { "key": "cooling", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "convection" }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "DN 63 CF-F" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "kg", "value": "3.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar l/s", "value": "1.1" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 31, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "31" }, { "canonical": { "q": 42, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "42" }, { "canonical": { "q": 53, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "53" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "W", "value": "4" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t2-tmh-tmu-064-065" } ], "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1·10^-8" }, { "key": "ultimate_pressure_rotary_backing", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 2 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "53", "q": 53, "rule": "published nitrogen pumping speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-065", "lifecycleState": "eol_supported", "name": "TMU 065", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-064-065" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "1·10^5" }, { "key": "compression_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "1·10^7" }, { "key": "compression_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "> 10^10" }, { "key": "cooling", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "convection" }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "DN 63 CF-F" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "kg", "value": "5.1" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar l/s", "value": "0.8" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 36, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "36" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 56, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "56" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "W", "value": "4" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t2-tmh-tmu-064-065" } ], "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "min", "value": "3" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1·10^-9" }, { "key": "ultimate_pressure_rotary_backing", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "56", "q": 56, "rule": "published nitrogen pumping speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-071", "lifecycleState": "eol_supported", "name": "TMU 071", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "°C", "value": "0 - 40" }, { "key": "compression_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "> 10 5" }, { "key": "compression_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "6 · 10⁶" }, { "key": "compression_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "> 10 11" }, { "key": "inlet_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "DN 63 CF-F" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "kg", "value": "3.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar l/s", "value": "1.3" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "dB (A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "W", "value": "110" }, { "canonical": { "q": 42, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "42" }, { "canonical": { "q": 50, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "50" }, { "canonical": { "q": 59, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "59" }, { "key": "rotation_speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "Hz", "value": "1500" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "years", "value": "3" }, { "key": "startup_time", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar", "value": "< 5 · 10⁻¹⁰" }, { "key": "venting_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "59", "q": 59, "rule": "published nitrogen pumping speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t2-tmh-tmu-071" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-1001", "lifecycleState": "eol_supported", "name": "TMU 1001 P", "parameters": [ { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-1001" } ], "value": "Wear free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "2·10^6" }, { "key": "compression_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "> 1·10^8" }, { "key": "compression_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-1001" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "DN 200 CF-F" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "kg", "value": "38" }, { "key": "max_foreline_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar l/s", "value": "20" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 720, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "720" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "920" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "920" }, { "key": "rotation_speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "1/min", "value": "39600" }, { "key": "rotor_temp_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "°C", "value": "120" }, { "key": "service_interval", "sources": [ { "page": "22", "source": "src:t2-tmh-tmu-1001" } ], "value": "once a year" }, { "key": "startup_time", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar", "value": "< 1 · 10-10 mbar" }, { "key": "venting_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "920", "q": 920, "rule": "published nitrogen pumping speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-1600", "lifecycleState": "eol_unsupported", "name": "TMU 1600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "High vacuum side: Wear free permanent magnetic bearing. Fore-vacuum side: Oil circulatory lubricated bearings with ceramic balls." }, { "key": "compression_h2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "3 · 10^6" }, { "key": "compression_he", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "> 1 · 10^8" }, { "key": "compression_n2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "heater_power", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "W", "value": "170" }, { "key": "inlet_flange", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "CF-F" }, { "key": "lubricant", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "TL 011 or F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "mT", "value": "3" }, { "key": "noise_level", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "dB (A)", "value": "< 47" }, { "canonical": { "q": 1150, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1150" }, { "canonical": { "q": 1450, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1450" }, { "canonical": { "q": 1500, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1500" }, { "key": "rotation_speed", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "1/min", "value": "36000" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "mbar", "value": "< 1 · 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "G 1/8″" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1500", "q": 1500, "rule": "published nitrogen pumping speed", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t3-tmh-tmu-1600" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-1601", "lifecycleState": "eol_unsupported", "name": "TMU 1601 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "°C", "value": "0-35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1601" } ], "value": "Wear free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "2 · 10^5" }, { "key": "compression_he", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "2 · 10^7" }, { "key": "compression_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "10^11" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1601" } ], "value": "water cooling (standard)" }, { "key": "inlet_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "DN 200 CF-F" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "F3" }, { "key": "lubricant_volume", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "cm3", "value": "65" }, { "key": "magnetic_field_max", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "kg", "value": "49/51" }, { "key": "max_foreline_pressure", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar·l/s", "value": "22" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "dB(A)", "value": "47" }, { "key": "outlet_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "DN 40 ISO-KF" }, { "canonical": { "q": 750, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "750" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "1100" }, { "canonical": { "q": 1000, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "1000" }, { "key": "purge_flange", "sources": [ { "page": "27", "source": "src:t3-tmh1601tmu" } ], "unitPrinted": "text", "value": "DN 10 ISO-KF" }, { "key": "rotation_speed", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "1/min", "value": "36000" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tmh1601tmu" } ], "unitPrinted": "text", "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "min", "value": "6" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar", "value": "< 1 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "G 1/8″" } ], "series": "TMH/TMU 1601", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1000", "q": 1000, "rule": "published nitrogen pumping speed", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-260", "lifecycleState": "eol_supported", "name": "TMU 260", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "1.3 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "> 1 × 10^9" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "Water cooling (standard)" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mT", "value": "5.5" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "kg", "value": "8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar l/s", "value": "3.5" }, { "key": "noise_level", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "outlet_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "DN 25 ISO-KF / G 1/4\"" }, { "canonical": { "q": 180, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "180" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "radiated_heat_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "W", "value": "8" }, { "key": "rotation_speed", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "1/min", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "min", "value": "1:45" }, { "canonical": { "bound": "less_than", "q": 4.9999999999999995e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar", "value": "< 5 × 10^-11 mbar" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "210", "q": 210, "rule": "published nitrogen pumping speed", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-261", "lifecycleState": "eol_supported", "name": "TMU 261", "parameters": [ { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "33", "source": "src:t2-tmu261p" } ], "unitPrinted": "l/s", "value": "210" } ], "series": "TMU", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "210", "q": 210, "rule": "published nitrogen pumping speed", "sources": [ { "page": "33", "source": "src:t2-tmu261p" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t2-tmu261p" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-262", "lifecycleState": "eol_supported", "name": "TMU 262", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "1.3 · 10^4" }, { "key": "compression_he", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "3 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "> 1 · 10^9" }, { "key": "inlet_flange", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mT", "value": "5.5" }, { "key": "mass", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "kg", "value": "6.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar", "value": "8.5" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar l/s", "value": "3.2" }, { "key": "noise_level", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "power_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "W", "value": "150" }, { "canonical": { "q": 190, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "190" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "radiated_heat_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "W", "value": "8" }, { "key": "rotation_speed", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "1/min", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "°C", "value": "90" }, { "key": "startup_time", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "min", "value": "3.5" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar", "value": "< 5 · 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "210", "q": 210, "rule": "published nitrogen pumping speed", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-521", "lifecycleState": "eol_supported", "name": "TMU 521 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-521" } ], "value": "oil circulatory lubricated ball bearing with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "5·10^6" }, { "key": "compression_he", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "5·10^7" }, { "key": "compression_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-521" } ], "value": "Water cooling or air cooling required" }, { "key": "inlet_flange", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "kg", "value": "13" }, { "key": "max_foreline_pressure", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar", "value": "16" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar l/s", "value": "3" }, { "key": "mounting_orientation", "sources": [ { "page": "6", "source": "src:t2-tmh-tmu-521" } ], "value": "vertically (0°) up to an angle of 90° maximum" }, { "key": "noise_level", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "power_max", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "W", "value": "300" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "purge_flange", "sources": [ { "page": "22", "source": "src:t2-tmh-tmu-521" } ], "value": "DN 16 ISO-KF-10" }, { "key": "rotation_speed", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "rpm", "value": "50000" }, { "key": "service_interval", "sources": [ { "page": "17", "source": "src:t2-tmh-tmu-521" } ], "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "min", "value": "5.5" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar", "value": "< 5·10^-10 mbar" }, { "key": "venting_flange", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "G 1/8”" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "300", "q": 300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-110", "lifecycleState": "eol_unsupported", "name": "TPH 110", "parameters": [ { "key": "bake_temp_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "°C", "value": "160" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "ball bearing (high-precision), wick-lubricated" }, { "key": "compression_h2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "ratio", "value": "500" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "water-cooled (standard); air-cooled variant available" }, { "key": "inlet_flange", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "oil, wick-fed (impregnated wicks)" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "kg", "value": "6" }, { "key": "mounting_orientation", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "horizontal to vertical" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "170" }, { "canonical": { "q": 120, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "120" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "170" }, { "key": "rotation_speed", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "1/min", "value": "43000" }, { "key": "service_interval", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "h", "value": "approx. 5000" }, { "key": "startup_time", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "min", "value": "1" }, { "canonical": { "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "mbar", "value": "10^-11" }, { "key": "venting_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "DN 10 KF" } ], "series": "PFEIFFER TURBO", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "170", "q": 170, "rule": "published nitrogen pumping speed", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "19", "source": "src:t3-tph-tpu-110" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-1201", "lifecycleState": "eol_unsupported", "name": "TPH 1201 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°C", "value": "+5°C to +40°C" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "Wear-free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": "6 · 10^3" }, { "key": "compression_he", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": "2 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": ">1 · 10^8" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "DN 200 ISO-K / DN 200 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "kg", "value": "32 (ISO-K) / 33 (ISO-F)" }, { "key": "max_foreline_pressure", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar", "value": "2" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar l/s", "value": "20" }, { "key": "mounting_orientation", "sources": [ { "page": "9", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°", "value": "0° to 90°" }, { "key": "noise_level", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "dB (A)", "value": "57" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1100" }, { "canonical": { "q": 1300, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1300" }, { "canonical": { "q": 1250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1250" }, { "key": "radiated_heat_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "W", "value": "75" }, { "key": "rotation_speed", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "Hz", "value": "630" }, { "key": "rotor_temp_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°C", "value": "120" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "four years (minimum)" }, { "key": "startup_time", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar", "value": "< 1 · 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1250", "q": 1250, "rule": "published nitrogen pumping speed", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-170", "lifecycleState": "eol_unsupported", "name": "TPH 170", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "°C", "value": "0 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "32", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "ball bearing" }, { "key": "compression_he", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "ratio", "value": "20000" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "water-cooled" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "kg", "value": "7" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "vertical to horizontal" }, { "key": "outlet_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "DN 25 KF" }, { "canonical": { "q": 130, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "l/s", "value": "130" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "l/s", "value": "170" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "1/min", "value": "43000" }, { "key": "service_interval", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "h", "value": "5000" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "min", "value": "1" }, { "canonical": { "q": 5e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "mbar", "value": "5e-8" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "170", "q": 170, "rule": "published nitrogen pumping speed", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t3-tph-tpu-170" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tph-2301", "lifecycleState": "eol_unsupported", "name": "TPH 2301 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "°C", "value": "120" }, { "key": "compression_h2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "2 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "DN 250 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "kg", "value": "41" }, { "key": "max_foreline_pressure", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar", "value": "1.8" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar l/s", "value": "34" }, { "key": "mounting_orientation", "sources": [ { "page": "9", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "Fore-vacuum flange must always point downwards (vertical mounting only)" }, { "key": "noise_level", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "dB (A)", "value": "50" }, { "canonical": { "q": 1850, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1850" }, { "canonical": { "q": 2050, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "2050" }, { "canonical": { "q": 1900, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1900" }, { "key": "rotation_speed", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "Hz (1/min)", "value": "525 (31 500)" }, { "key": "service_interval", "sources": [ { "page": "24", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "min", "value": "8" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1900", "q": 1900, "rule": "published nitrogen pumping speed", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-330", "lifecycleState": "eol_unsupported", "name": "TPH 330", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "°C", "value": "≤35" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "water" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "any" }, { "key": "startup_time", "sources": [ { "page": "18", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "min", "value": "3" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-330-510" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-510", "lifecycleState": "eol_unsupported", "name": "TPH 510", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "°C", "value": "≤35" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "water" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "any" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-330-510" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-110", "lifecycleState": "eol_unsupported", "name": "TPU 110", "parameters": [ { "key": "bake_temp_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "°C", "value": "160" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "ball bearing (high-precision), wick-lubricated" }, { "key": "compression_h2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "ratio", "value": "500" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "water-cooled (standard); air-cooled variant available" }, { "key": "inlet_flange", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "DN 100 CF" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "oil, wick-fed (impregnated wicks)" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "kg", "value": "8" }, { "key": "mounting_orientation", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "horizontal to vertical" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "170" }, { "canonical": { "q": 120, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "120" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "170" }, { "key": "rotation_speed", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "1/min", "value": "43000" }, { "key": "service_interval", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "h", "value": "approx. 5000" }, { "key": "startup_time", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "min", "value": "1" }, { "canonical": { "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "mbar", "value": "10^-11" }, { "key": "venting_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "DN 10 KF" } ], "series": "PFEIFFER TURBO", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "170", "q": 170, "rule": "published nitrogen pumping speed", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "19", "source": "src:t3-tph-tpu-110" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-1201", "lifecycleState": "eol_unsupported", "name": "TPU 1201 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°C", "value": "+5°C to +40°C" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "Wear-free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": "6 · 10^3" }, { "key": "compression_he", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": "2 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": ">1 · 10^8" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "DN 200 CF-F" }, { "key": "lubricant", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "kg", "value": "43" }, { "key": "max_foreline_pressure", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar", "value": "2" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar l/s", "value": "18" }, { "key": "mounting_orientation", "sources": [ { "page": "9", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°", "value": "0° to 90°" }, { "key": "noise_level", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "dB (A)", "value": "57" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1050" }, { "canonical": { "q": 1230, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1230" }, { "canonical": { "q": 1170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1170" }, { "key": "radiated_heat_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "W", "value": "75" }, { "key": "rotation_speed", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "Hz", "value": "630" }, { "key": "rotor_temp_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°C", "value": "120" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "four years (minimum)" }, { "key": "startup_time", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar", "value": "< 5 · 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1170", "q": 1170, "rule": "published nitrogen pumping speed", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-170", "lifecycleState": "eol_unsupported", "name": "TPU 170", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "°C", "value": "0 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "32", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "ball bearing" }, { "key": "compression_he", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "ratio", "value": "20000" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "water-cooled" }, { "key": "heater_power", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "W", "value": "60" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "DN 100 CF" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "kg", "value": "9" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "vertical to horizontal" }, { "key": "outlet_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "DN 25 KF" }, { "canonical": { "q": 130, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "l/s", "value": "130" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "l/s", "value": "170" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "1/min", "value": "43000" }, { "key": "service_interval", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "h", "value": "5000" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "min", "value": "1" }, { "canonical": { "q": 5e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "mbar", "value": "5e-8" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "170", "q": 170, "rule": "published nitrogen pumping speed", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t3-tph-tpu-170" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tpu-2301", "lifecycleState": "eol_unsupported", "name": "TPU 2301 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "°C", "value": "120" }, { "key": "compression_h2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "2 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "DN 250 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "kg", "value": "42" }, { "key": "max_foreline_pressure", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar", "value": "1.6" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar l/s", "value": "30" }, { "key": "mounting_orientation", "sources": [ { "page": "9", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "Fore-vacuum flange must always point downwards (vertical mounting only)" }, { "key": "noise_level", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "dB (A)", "value": "50" }, { "canonical": { "q": 1770, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1770" }, { "canonical": { "q": 1880, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1880" }, { "canonical": { "q": 1800, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1800" }, { "key": "rotation_speed", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "Hz (1/min)", "value": "525 (31 500)" }, { "key": "service_interval", "sources": [ { "page": "24", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "min", "value": "8" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar", "value": "< 5 × 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "G 1/8\"" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1800", "q": 1800, "rule": "published nitrogen pumping speed", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-330", "lifecycleState": "eol_unsupported", "name": "TPU 330", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "°C", "value": "≤35" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "water" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "any" }, { "key": "startup_time", "sources": [ { "page": "18", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "min", "value": "3" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-330-510" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-510", "lifecycleState": "eol_unsupported", "name": "TPU 510", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "°C", "value": "≤35" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "water" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "any" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-330-510" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsh-064", "lifecycleState": "eol_unsupported", "name": "TSH 064 D", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "air" }, { "key": "electrical_connection_load", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kW", "value": "0.3" }, { "key": "inlet_flange", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mT", "value": "≤ 7.0" }, { "key": "mass", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kg", "value": "25" }, { "key": "mounting_orientation", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "horizontal" }, { "canonical": { "q": 31, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "31" }, { "canonical": { "q": 42, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "10", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "42" }, { "canonical": { "q": 53, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "53" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mbar", "value": "< 1 · 10-9" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "53", "q": 53, "rule": "published nitrogen pumping speed", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsh-065", "lifecycleState": "eol_unsupported", "name": "TSH 065 D", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "air" }, { "key": "electrical_connection_load", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kW", "value": "0.3" }, { "key": "inlet_flange", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mT", "value": "≤ 7.0" }, { "key": "mass", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kg", "value": "26" }, { "key": "mounting_orientation", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "horizontal" }, { "canonical": { "q": 36, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "36" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "10", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 56, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "56" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mbar", "value": "< 1 · 10-9" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "56", "q": 56, "rule": "published nitrogen pumping speed", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsh-071", "lifecycleState": "eol_unsupported", "name": "TSH 071", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "4", 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"unitPrinted": "text", "value": "magnetic bearings with solid-lubricated touch-down (backup) bearings" }, { "key": "compression_h2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "ratio", "value": "2.5×10^4" }, { "key": "compression_n2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "ratio", "value": ">10^8" }, { "key": "cooling", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "VG250/ISO250F/ICF305" }, { "key": "lubricant", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "27", "source": "src:t2-stp-a2203" } ], "unitPrinted": "mT", "value": "15" }, { "key": "mass", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "kg", "value": "61" }, { "key": "max_foreline_pressure", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "Pa (Torr)", "value": "400 (3)" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "Pa・m3/s (SCCM)", "value": "2.5 (1500)" }, { "key": "mounting_orientation", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 1700, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "L/s", "value": "1700" }, { "canonical": { "q": 2200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "L/s", "value": "2200" }, { "key": "purge_flange", "sources": [ { "page": "24", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "KF10" }, { "key": "rotation_speed", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "rpm", "value": "27,000" }, { "key": "service_interval", "sources": [ { "page": "102", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "three to six months" }, { "key": "startup_time", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "min", "value": "7" }, { "key": "ultimate_pressure", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "Pa (Torr)", "value": "10-６(10-８) order (after baking)" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "L/s", "printedValue": "2200", "q": 2200, "rule": "published nitrogen pumping speed", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-a2503", "lifecycleState": "eol_supported", "name": "STP-A2503", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "9", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "6×10^3" }, { "key": "compression_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": ">10^8" }, { "key": "cooling", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "VG250/ISO250F/ICF305" }, { "key": "lubricant", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "kg", "value": "72" }, { "key": "max_foreline_pressure", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "333 (2.5)" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "3.0 (1800)" }, { "key": "mounting_orientation", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "<50" }, { "canonical": { "q": 1600, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "l/s", "value": "1600" }, { "canonical": { "q": 2500, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "l/s", "value": "2500" }, { "key": "purge_flange", "sources": [ { "page": "13", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "KF10" }, { "key": "rotation_speed", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "startup_time", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "min", "value": "9" }, { "canonical": { "q": 1e-8, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "10^-6 Pa (10^-8 Torr)" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "2500", "q": 2500, "rule": "published nitrogen pumping speed", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-a3003", "lifecycleState": "eol_supported", "name": "STP-A3003", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "9", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "6×10^3" }, { "key": "compression_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": ">10^8" }, { "key": "cooling", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "VG300/VG350/ISO320F" }, { "key": "lubricant", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "kg", "value": "72" }, { "key": "max_foreline_pressure", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "333 (2.5)" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "3.0 (1800)" }, { "key": "mounting_orientation", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "<50" }, { "canonical": { "q": 1800, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "l/s", "value": "1800" }, { "canonical": { "q": 3000, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "l/s", "value": "3000" }, { "key": "purge_flange", "sources": [ { "page": "13", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "KF10" }, { "key": "rotation_speed", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "startup_time", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "min", "value": "9" }, { "canonical": { "q": 1e-8, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "10^-6 Pa (10^-8 Torr)" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "3000", "q": 3000, "rule": "published nitrogen pumping speed", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-h1303", "lifecycleState": "legacy_in_service", "name": "STP-H1303", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "°C", "value": "< 120" }, { "key": "cooling", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "VG200/ISO200" }, { "key": "lubricant", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "kg", "value": "39" }, { "key": "max_foreline_pressure", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "Pa", "value": "270" }, { "key": "mounting_orientation", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 1000, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "L/s", "value": "1000" }, { "canonical": { "q": 1300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "L/s", "value": "1300" }, { "key": "rotation_speed", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "rpm", "value": "32500" }, { "key": "startup_time", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "min", "value": "7" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "Pa", "value": "10-7" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "L/s", "printedValue": "1300", "q": 1300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-h803", "lifecycleState": "legacy_in_service", "name": "STP-H803", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "°C", "value": "< 120" }, { "key": "cooling", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "VG150/ISO160" }, { "key": "lubricant", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "kg", "value": "39" }, { "key": "max_foreline_pressure", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "Pa", "value": "270" }, { "key": "mounting_orientation", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 600, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "L/s", "value": "600" }, { "canonical": { "q": 800, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "L/s", "value": "800" }, { "key": "rotation_speed", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "rpm", "value": "32500" }, { "key": "startup_time", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "min", "value": "7" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "Pa", "value": "10-7" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "L/s", "printedValue": "800", "q": 800, "rule": "published nitrogen pumping speed", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-ixa2205", "lifecycleState": "active", "name": "STP-iXA2205", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "°C", "value": "< 120" }, { "key": "bearing_type", "sources": [ { "page": "19", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "magnetic bearing, 5 pairs of active magnetic bearings" }, { "key": "compression_h2", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "1×104" }, { "key": "cooling", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "ISO250F/VG250/ICF305" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "kg", "value": "61" }, { "key": "max_foreline_pressure", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "Pa", "value": "266" }, { "key": "mounting_orientation", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "dB", "value": "<55" }, { "canonical": { "q": 1700, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "L/s", "value": "1700" }, { "canonical": { "q": 2200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "L/s", "value": "2200" }, { "key": "purge_flange", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "Pa·m3/s", "value": "8.4×10-2" }, { "key": "rotation_speed", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "startup_time", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "min", "value": "≤8" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "Pa", "value": "10-7" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "L/s", "printedValue": "2200", "q": 2200, "rule": "published nitrogen pumping speed", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-1303", "lifecycleState": "active", "name": "TMP-1303", "parameters": [ { "key": "bake_temp_max", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "29", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "1 × 103" }, { "key": "compression_he", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "1 × 104" }, { "key": "compression_n2", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "6 × 108" }, { "key": "cooling", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "air (cooling fan)" }, { "key": "inlet_flange", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "ICF253 (Note 4)" }, { "key": "lubricant", "sources": [ { "page": "29", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "kg", "value": "34" }, { "key": "mounting_orientation", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "In any desired direction (Note 3)" }, { "canonical": { "q": 750, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "750" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "1050" }, { "canonical": { "q": 1300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "1300" }, { "key": "rotation_speed", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "rpm", "value": "30300" }, { "key": "service_interval", "sources": [ { "page": "59", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "min", "value": "7 minutes or less" }, { "canonical": { "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "Pa", "value": "10-8 Pa order" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1300", "q": 1300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-3203", "lifecycleState": "active", "name": "TMP-3203", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "°C", "value": "Operation : 0 to 40 °C / Storage : -25 to 70 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "23", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "1 × 104" }, { "key": "compression_he", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "3 × 105" }, { "key": "compression_n2", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "1 × 109 or more" }, { "key": "cooling", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "air (cooling fan)" }, { "key": "inlet_flange", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "VG350 (Note 5)" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "kg", "value": "70" }, { "key": "mounting_orientation", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "In any desired direction (Note 4)" }, { "canonical": { "q": 2400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "2400" }, { "canonical": { "q": 3000, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "3000" }, { "canonical": { "q": 3200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "3200" }, { "key": "rotation_speed", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "rpm", "value": "21000" }, { "key": "service_interval", "sources": [ { "page": "53", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "min", "value": "13 minutes" }, { "canonical": { "q": 1.0000000000000001e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "Pa", "value": "10-9 Pa order" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "3200", "q": 3200, "rule": "published nitrogen pumping speed", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "generation": "LM", "id": "pump:shimadzu-tmp-3203lm", "lifecycleState": "active", "name": "TMP-3203LM", "parameters": [ { "canonical": { "q": 3200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": null, "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "L/s", "value": "3200" } ], "series": "TMP", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "L/s", "printedValue": "3200", "q": 3200, "rule": "published nitrogen pumping speed", "sources": [ { "page": null, "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:ptb-shimadzu-tmp-3203-3403" } ] }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-3403", "lifecycleState": "active", "name": "TMP-3403", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "°C", "value": "Operation : 0 to 40 °C / Storage : -25 to 70 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "23", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "6 × 104" }, { "key": "compression_he", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "1 × 105" }, { "key": "compression_n2", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "1 × 109" }, { "key": "cooling", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "VG350 (Note 4)" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "kg", "value": "70" }, { "key": "mounting_orientation", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "In any desired direction (Note 3)" }, { "canonical": { "q": 2400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "2400" }, { "canonical": { "q": 3100, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "3100" }, { "canonical": { "q": 3300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "3300" }, { "key": "rotation_speed", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "rpm", "value": "22020" }, { "key": "service_interval", "sources": [ { "page": "53", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "min", "value": "15 minutes" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "Pa", "value": "10-7 Pa order" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "3300", "q": 3300, "rule": "published nitrogen pumping speed", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-403", "lifecycleState": "active", "name": "TMP-403", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "°C", "value": "Operation : 10 to 40 °C / Storage : -25 to 70 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "1 × 104" }, { "key": "compression_he", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "8 × 104" }, { "key": "compression_n2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "1 × 109" }, { "key": "cooling", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "air (cooling fan)" }, { "key": "inlet_flange", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "ICF203 (Note 6)" }, { "key": "lubricant", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "kg", "value": "14" }, { "key": "mounting_orientation", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "In any desired direction (Note 7)" }, { "canonical": { "q": 340, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "l/s", "value": "340" }, { "canonical": { "q": 360, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "l/s", "value": "360" }, { "canonical": { "q": 420, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "l/s", "value": "420" }, { "key": "rotation_speed", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "rpm", "value": "45000" }, { "key": "service_interval", "sources": [ { "page": "55", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "min", "value": "5 minutes or less" }, { "canonical": { "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "Pa", "value": "10-8 Pa order" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "420", "q": 420, "rule": "published nitrogen pumping speed", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-803", "lifecycleState": "active", "name": "TMP-803", "parameters": [ { "key": "bake_temp_max", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "29", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "4 × 103" }, { "key": "compression_he", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "8 × 104" }, { "key": "compression_n2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "1 × 109 or more" }, { "key": "cooling", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "air (cooling fan)" }, { "key": "inlet_flange", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "ICF203 (Note 4)" }, { "key": "lubricant", "sources": [ { "page": "29", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "kg", "value": "32 kg or less" }, { "key": "mounting_orientation", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "In any desired direction (Note 3)" }, { "canonical": { "q": 700, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "700" }, { "canonical": { "q": 800, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "800" }, { "canonical": { "q": 800, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "800" }, { "key": "rotation_speed", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "rpm", "value": "35000" }, { "key": "service_interval", "sources": [ { "page": "59", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "min", "value": "5 minutes or less" }, { "canonical": { "q": 1.0000000000000001e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "Pa", "value": "10-9 Pa order" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "800", "q": 800, "rule": "published nitrogen pumping speed", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Sumitomo Heavy Industries", "brandId": "brand:sumitomo", "family": "fam:cryo-gm", "id": "pump:sumitomo-marathon-cp-20", "lifecycleState": "unknown", "name": "Marathon CP-20 Cryopump", "parameters": [ { "key": "capacity_ar", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "std l", "value": "6000" }, { "key": "capacity_h2", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "std l", "value": "33" }, { "key": "cooldown_time", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "min", "value": "190" }, { "key": "crossover_value", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "torr-l", "value": "400" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "value": "ISO 500, claw type" }, { "key": "mass", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "kg", "value": "76" }, { "canonical": { "q": 8300, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "l/s", "value": "8300" }, { "canonical": { "q": 14000, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "l/s", "value": "14000" }, { "canonical": { "q": 29100, "unit": "l/s" }, "key": "pumping_speed_h2o", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "l/s", "value": "29100" }, { "canonical": { "q": 9900, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "l/s", "value": "9900" }, { "key": "refrigerator_type", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "value": "CH-210" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "h", "value": "13000" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "9900", "q": 9900, "rule": "published nitrogen pumping speed", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "generation": "E-series", "id": "pump:varian-turbo-v-1000-ice", "lifecycleState": "eol_unsupported", "name": "Turbo-V 1000 ICE", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "degC", "value": "+5°C to +35°C" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "degC", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "value": "2 x 10^5" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "value": "8 x 10^6" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "value": "5 x 10^9" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "KF 40 NW" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "ISO 200" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "kg", "value": "19" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "dB(A)", "value": "≤ 45" }, { "canonical": { "q": 900, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "l/s", "value": "900" }, { "canonical": { "q": 870, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "l/s", "value": "870" }, { "canonical": { "q": 950, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "l/s", "value": "950" }, { "key": "purge_gas_flow_max", "sources": [ { "page": "37", "source": "src:t3-v1000e" } ], "unitPrinted": "sccm", "value": "20" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "RPM", "value": "38000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "min", "value": "< 4" }, { "key": "storage_temp_range", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "degC", "value": "-20°C to +70°C" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "41", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "NW 10 KF (M8)" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "950", "q": 950, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "2", "source": "src:t3-v1000e" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-1001-navigator", "lifecycleState": "eol_supported", "name": "Turbo-V 1001 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "°C", "value": "120 °C" }, { "key": "bearing_type", "sources": [ { "page": "50", "source": "src:t2-tv1001nav" } ], "value": "ceramic ball bearings (forevacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "1 x 10^6" }, { "key": "compression_he", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "1 x 10^7" }, { "key": "compression_n2", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "1 x 10^9" }, { "key": "cooling", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "Forced air or water" }, { "key": "inlet_flange", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "ISO 160, ISO 200, ISO 250, CF 10\"" }, { "key": "lubricant", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "53", "source": "src:t2-tv1001nav" } ], "unitPrinted": "kg", "value": "21.2" }, { "key": "mounting_orientation", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "dB(A)", "value": "<45 dB(A) at 1 meter" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "l/s", "value": "920" }, { "canonical": { "q": 900, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "l/s", "value": "900" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "l/s", "value": "1050" }, { "key": "rotation_speed", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "rpm", "value": "38000" }, { "key": "startup_time", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "minutes", "value": "4 minutes" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-10 mbar" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1050", "q": 1050, "rule": "published nitrogen pumping speed", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-1001-sem", "lifecycleState": "eol_supported", "name": "Turbo-V 1001 SEM", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t2-tv1001sem" } ], "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "value": "ISO 200K, ISO 200F" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "kg", "value": "19" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "value": "Any" }, { "canonical": { "q": 900, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "l/s", "value": "900" }, { "canonical": { "q": 870, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "l/s", "value": "870" }, { "canonical": { "q": 950, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "l/s", "value": "950" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "rpm", "value": "38000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t2-tv1001sem" } ], "value": "does not require any maintenance" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "min", "value": "< 4" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "950", "q": 950, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-141-navigator", "lifecycleState": "eol_supported", "name": "TV 141 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "28", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "permanently lubricated high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "8 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "8 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "3 x 10^8" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "integrated fan" }, { "key": "foreline_flange", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "KF 16 NW" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "ISO 100, ISO 63, CFF 6\"" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "32", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "kg", "value": "3.5" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "Any" }, { "canonical": { "q": 100, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "l/s", "value": "100" }, { "canonical": { "q": 120, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "l/s", "value": "120" }, { "canonical": { "q": 125, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "l/s", "value": "125" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "rpm", "value": "62000" }, { "key": "standby_power", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "W", "value": "15" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "seconds", "value": "< 90" }, { "canonical": { "bound": "less_than", "q": 2e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "mbar", "value": "< 2 x 10^-10" }, { "key": "vibration_level", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "µm", "value": "< 0.01" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "125", "q": 125, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-150ht", "lifecycleState": "eol_unsupported", "name": "Turbo-V 150HT", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "°C", "value": "+ 5° C to + 35° C" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "°C", "value": "120° C max." }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v150ht" } ], "value": "high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "8 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "8 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "3 x 10^8" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "Forced air or water" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "ISO 100, ISO 63, CFF 6\", CFF 4.5”" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "kg", "value": "5.6" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "Any" }, { "canonical": { "q": 110, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "l/s", "value": "110" }, { "canonical": { "q": 120, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "l/s", "value": "120" }, { "canonical": { "q": 130, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "l/s", "value": "130" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "rpm", "value": "62000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "seconds", "value": "< 90 seconds" }, { "canonical": { "bound": "less_than", "q": 2e-10, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "mbar", "value": "< 2 x 10^-10 mbar (< 1.5 x 10^-10 Torr)" }, { "key": "venting_flange", "sources": [ { "page": "40", "source": "src:t3-v150ht" } ], "value": "NW 10 KF (M8)" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "130", "q": 130, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-1800a", "lifecycleState": "eol_unsupported", "name": "Turbo-V 1800A", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "°C", "value": "+5°C to +35°C" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v1800a" } ], "value": "ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "ratio", "value": "6000" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "ratio", "value": "250000" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "ratio", "value": ">1 x 10^10" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "ISO 250" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "kg", "value": "62" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "Vertical/inverted" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "dB(A)", "value": "≤52" }, { "canonical": { "q": 1750, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "l/s", "value": "1750" }, { "canonical": { "q": 1850, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "l/s", "value": "1850" }, { "canonical": { "q": 1600, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "l/s", "value": "1600" }, { "key": "purge_flange", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "KF 10 NW" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t3-v1800a" } ], "value": "no maintenance required" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "min", "value": "10" }, { "canonical": { "q": 9.999177631578947e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "Torr", "value": "7.5e-11" }, { "key": "venting_flange", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "KF 10 NW" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1600", "q": 1600, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-2000-ice", "lifecycleState": "eol_unsupported", "name": "Turbo-V 2000 ICE", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "29", "source": "src:t3-v2000ice" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v2000ice" } ], "value": "high precision ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "value": "CFF 12\" O.D." }, { "key": "mass", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "kg", "value": "55" }, { "key": "mounting_orientation", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "value": "Any" }, { "canonical": { "q": 1500, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "l/s", "value": "1500" }, { "canonical": { "q": 2000, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "l/s", "value": "2000" }, { "canonical": { "q": 1950, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "l/s", "value": "1950" }, { "key": "rotation_speed", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "rpm", "value": "33000" }, { "key": "rotor_temp_max", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "°C", "value": "120" }, { "key": "startup_time", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "minutes", "value": "12" }, { "key": "venting_flange", "sources": [ { "page": "41", "source": "src:t3-v2000ice" } ], "value": "NW 10 KF (M8)" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1950", "q": 1950, "rule": "published nitrogen pumping speed", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-250", "lifecycleState": "eol_unsupported", "name": "Turbo-V 250", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v250" } ], "value": "high precision ceramic ball bearings, permanently lubricated" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "ratio", "value": "1 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "ratio", "value": "1 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "ratio", "value": "2 x 10^8" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "value": "Natural air convection; forced air or water cooling optional" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "value": "DN 100 CFF (6\" O.D.)" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "kg", "value": "11.4" }, { "key": "mounting_orientation", "sources": [ { "page": "28", "source": "src:t3-v250" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "dB(A)", "value": "45" }, { "canonical": { "q": 200, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "l/s", "value": "200" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "l/s", "value": "250" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "rpm", "value": "56000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "minutes", "value": "< 3" }, { "canonical": { "q": 2e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "mbar", "value": "2 x 10^-10" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "250", "q": 250, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "2", "source": "src:t3-v250" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-250sf", "lifecycleState": "eol_unsupported", "name": "Turbo-V 250SF", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "permanently lubricated high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "value": "2 x 10^3" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "value": "7 x 10^3" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "value": "1 x 10^7" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "Natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "CFF 6\" O.D., ISO 100" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "kg", "value": "5.5" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "dB(A)", "value": "45" }, { "canonical": { "q": 200, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "l/s", "value": "200" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "l/s", "value": "250" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "RPM", "value": "56000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "min", "value": "< 3" }, { "canonical": { "q": 2e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "mbar", "value": "2 x 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "41", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "NW 10 KF" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "250", "q": 250, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-2k-g", "lifecycleState": "eol_unsupported", "name": "Turbo-V 2K-G", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "°C", "value": "+5 to +40" }, { "key": "bearing_type", "sources": [ { "page": "74", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "ISO 250 F" }, { "key": "lubricant", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "kg", "value": "35" }, { "key": "mounting_orientation", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "dB(A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "W", "value": "400" }, { "canonical": { "q": 1400, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "l/s", "value": "1400" }, { "canonical": { "q": 1600, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "l/s", "value": "1600" }, { "key": "purge_flange", "sources": [ { "page": "99", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "1/8 NPT thread or Swagelok connector" }, { "key": "rotation_speed", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "rpm", "value": "33000" }, { "key": "rotor_temp_max", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "°C", "value": "120" }, { "key": "standby_power", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "W", "value": "30 to 35" }, { "key": "startup_time", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "minutes", "value": "< 7" }, { "key": "venting_flange", "sources": [ { "page": "99", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "1/8 NPT thread or Swagelok connector" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "1600", "q": 1600, "rule": "published nitrogen pumping speed", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "generation": "Navigator", "id": "pump:varian-turbo-v-301", "lifecycleState": "eol_supported", "name": "Turbo-V 301 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "°C", "value": "+5° C to +35° C" }, { "key": "bake_temp_max", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "°C", "value": "120° C" }, { "key": "bearing_type", "sources": [ { "page": "74", "source": "src:t2-tv301nav" } ], "value": "high precision ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "value": "Natural air convection / Forced air or water optional" }, { "key": "inlet_flange", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "value": "CFF 8\" O.D. / ISO 160" }, { "key": "lubricant", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "kg", "value": "8" }, { "key": "mounting_orientation", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "dB(A)", "value": "≤ 45 dB (A) at 1 meter" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "l/s", "value": "210" }, { "canonical": { "q": 230, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "l/s", "value": "230" }, { "canonical": { "q": 280, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "l/s", "value": "280" }, { "key": "purge_flange", "sources": [ { "page": "95", "source": "src:t2-tv301nav" } ], "value": "KF16" }, { "key": "rotation_speed", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "rpm", "value": "56000" }, { "key": "startup_time", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "minutes", "value": "< 3 minutes" }, { "key": "venting_flange", "sources": [ { "page": "95", "source": "src:t2-tv301nav" } ], "value": "NW 10 KF / M8" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "280", "q": 280, "rule": "published nitrogen pumping speed", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "2", "source": "src:tf-varian-turbo-v-301-manual" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-401-301-ms", "lifecycleState": "eol_supported", "name": "TV 401/301 MS", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "208", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "permanently lubricated ceramic ball bearings" }, { "key": "compression_h2_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "6 x 10^4" }, { "key": "compression_h2_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "7 x 10^3" }, { "key": "compression_he_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "1.4 x 10^5" }, { "key": "compression_he_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "1.4 x 10^4" }, { "key": "compression_n2_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "> 3 x 10^8" }, { "key": "compression_n2_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "1 x 10^6" }, { "key": "cooling", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "Natural air convection; forced air or water optional" }, { "key": "inlet_flange", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "DN 100" }, { "key": "lubricant", "sources": [ { "page": "211", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "211", "source": "src:t2-tv401-301" } ], "unitPrinted": "kg", "value": "5.8" }, { "key": "mounting_orientation", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "dB (A)", "value": "≤ 45" }, { "key": "power_max", "sources": [ { "page": "211", "source": "src:t2-tv401-301" } ], "unitPrinted": "W", "value": "150" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_h2_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "210" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_he_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 380, "unit": "l/s" }, "key": "pumping_speed_he_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "380" }, { "canonical": { "q": 310, "unit": "l/s" }, "key": "pumping_speed_n2_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "310" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_n2_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "400" }, { "key": "rotation_speed", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "203", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "no maintenance required" }, { "key": "startup_time", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "min", "value": "< 3" }, { "canonical": { "bound": "less_than", "q": 7.000000000000001e-10, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "< 7 x 10^-10 mbar (< 5.25 x 10^-10 Torr)" } ], "servedSpeed": { "fromKey": "pumping_speed_n2_main_port", "printedUnit": "l/s", "printedValue": "310", "q": 310, "rule": "nitrogen pumping speed at the main port, the inlet a system connects to. The base also publishes a side port speed.", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-550", "lifecycleState": "eol_unsupported", "name": "Turbo-V 550", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v550" } ], "value": "ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "value": "Natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "value": "CFF 8\" O.D." }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "kg", "value": "18" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "dB(A)", "value": "≤45" }, { "canonical": { "q": 510, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "l/s", "value": "510" }, { "canonical": { "q": 600, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "l/s", "value": "600" }, { "canonical": { "q": 550, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "l/s", "value": "550" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "RPM", "value": "42000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "min", "value": "<3" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "550", "q": 550, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "28", "source": "src:t3-v550" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-551-navigator", "lifecycleState": "eol_supported", "name": "TV 551 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "31", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "ISO 160" }, { "key": "lubricant", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "kg", "value": "19.4" }, { "key": "mounting_orientation", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "dB(A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "W", "value": "325" }, { "canonical": { "q": 510, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "510" }, { "canonical": { "q": 600, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "600" }, { "canonical": { "q": 550, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "550" }, { "key": "rotation_speed", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "rpm", "value": "42000" }, { "key": "rotor_temp_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "120" }, { "key": "startup_time", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "minutes", "value": "< 5" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "550", "q": 550, "rule": "published nitrogen pumping speed", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-6000", "lifecycleState": "eol_unsupported", "name": "Turbo-V 6000", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "upper: double ceramic ball bearing; lower: double stainless steel ball bearing (oil lubricated)" }, { "key": "cooling", "sources": [ { "page": "30", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "ISO 500 / 20” I.D. Wheeler" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "Varian T.A. oil" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "kg", "value": "250" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "Vertical (max slope 10°)" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "dB(A)", "value": "≤ 55" }, { "canonical": { "q": 6500, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "l/s", "value": "6500" }, { "canonical": { "q": 7000, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "l/s", "value": "7000" }, { "canonical": { "q": 6000, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "l/s", "value": "6000" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "rpm", "value": "14000" }, { "key": "service_interval", "sources": [ { "page": "37", "source": "src:t3-v6000" } ], "unitPrinted": "months", "value": "6" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "minutes", "value": "30" }, { "key": "venting_flange", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "KF 10 NW" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "6000", "q": 6000, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "30", "source": "src:t3-v6000" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-70", "lifecycleState": "eol_unsupported", "name": "Turbo-V 70", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "high precision ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "Natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "CF 4.5\" O.D." }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "kg", "value": "1.6" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "dB(A)", "value": "45" }, { "canonical": { "q": 45, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "l/s", "value": "45" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "l/s", "value": "60" }, { "canonical": { "q": 68, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "l/s", "value": "68" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "RPM", "value": "75000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "seconds", "value": "< 60" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "68", "q": 68, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-700ht", "lifecycleState": "eol_unsupported", "name": "Turbo-V 700HT", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "permanently lubricated high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "2 x 10^6" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "1 x 10^7" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": ">1 x 10^9" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "Natural air convection" }, { "key": "foreline_flange", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "KF 25 NW" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "CFF 10\" O.D. / ISO 200" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "kg", "value": "14 (ISO) / 20.1 (CFF)" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "dB(A)", "value": "≤ 45" }, { "canonical": { "q": 510, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "l/s", "value": "510" }, { "canonical": { "q": 620, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "l/s", "value": "620" }, { "canonical": { "q": 690, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "l/s", "value": "690" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": 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"lifecycleState": "eol_supported", "name": "TV 701 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "31", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "ISO 200" }, { "key": "lubricant", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "kg", "value": "19.4" }, { "key": "mounting_orientation", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "dB(A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "W", "value": "350" }, { "canonical": { "q": 510, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "510" }, { "canonical": { "q": 620, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "620" }, { "canonical": { "q": 690, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "690" }, { "key": "rotation_speed", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "rpm", "value": "42000" }, { "key": "rotor_temp_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "120" }, { "key": "startup_time", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "minutes", "value": "< 5" } ], "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "690", "q": 690, "rule": "published nitrogen pumping speed", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-70d", "lifecycleState": "eol_unsupported", "name": "Turbo-V 70D", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "high precision ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "Natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "CF 4.5\" O.D." }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "kg", "value": "1.6" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "dB (A)", "value": "45" }, { "canonical": { "q": 20, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "l/s", "value": "20" }, { "canonical": { "q": 30, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "l/s", "value": "30" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "l/s", "value": "60" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "rpm", "value": "75000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "does not require any maintenance" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "s", "value": "< 60" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "60", "q": 60, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-70lp", "lifecycleState": "eol_unsupported", "name": "Turbo-V 70LP", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "28", "source": "src:t3-v70lp" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "°C", "value": "120" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "value": "natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "value": "CF 4.5\" O.D." }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "kg", "value": "2.5" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "dB(A)", "value": "45" }, { "canonical": { "q": 45, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "l/s", "value": "45" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "l/s", "value": "60" }, { "canonical": { "q": 68, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "l/s", "value": "68" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "RPM", "value": "75000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t3-v70lp" } ], "value": "maintenance-free (no maintenance required)" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "seconds", "value": "< 60" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "68", "q": 68, "rule": "published nitrogen pumping speed", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "2", "source": "src:t3-v70lp" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-801-navigator", "lifecycleState": "eol_supported", "name": "TV 801 Navigator Bolted Flange", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "°C", "value": "+10 to +45" }, { "key": "bake_temp_max", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "210", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "permanently lubricated high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "2 x 10^6" }, { "key": "compression_he", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "5 x 10^7" }, { "key": "compression_n2", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": ">1 x 10^9" }, { "key": "cooling", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "Forced air" }, { "key": "foreline_flange", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "KF 25" }, { "key": "inlet_flange", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "ISO 160 F" }, { "key": "lubricant", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "213", "source": "src:t2-tv801nav" } ], "unitPrinted": "kg", "value": "27" }, { "key": "mounting_orientation", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "dB(A)", "value": "< 55" }, { "canonical": { "q": 850, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "l/s", "value": "850" }, { "canonical": { "q": 810, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "l/s", "value": "810" }, { "canonical": { "q": 680, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "l/s", "value": "680" }, { "key": "rotation_speed", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "rpm", "value": "38000" }, { "key": "startup_time", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "minutes", "value": "< 4" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-10" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "680", "q": 680, "rule": "published nitrogen pumping speed", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "species": "N2", "unit": "l/s" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-81", "lifecycleState": "eol_unsupported", "name": "Turbo-V 81", "parameters": [], "sources": [ { "page": "75", "source": "src:t3-v81ag" }, { "page": "94", "source": "src:t3-v81ag" } ], "speedGap": { "reason": "no pumping speed published under any key" } }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "generation": "M", "id": "pump:varian-turbo-v-81-m", "lifecycleState": "eol_unsupported", "name": "Turbo-V 81-M", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "°C", "value": "+5°C to +25°C" }, { "key": "bake_temp_max", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "196", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "permanently lubricated, high precision ceramic ball bearings (forevacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "value": "7 x 10^3" }, { "key": "compression_he", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "value": "8 x 10^4" }, { "key": "compression_n2", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "value": "3 x 10^8" }, { "key": "cooling", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "natural air convection (forced air or water optional)" }, { "key": "inlet_flange", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "ISO 63" }, { "key": "lubricant", "sources": [ { "page": "199", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "199", "source": "src:t3-v81m" } ], "unitPrinted": "kg", "value": "1.99" }, { "key": "mounting_orientation", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "dB(A)", "value": "≤ 45" }, { "key": "power_max", "sources": [ { "page": "199", "source": "src:t3-v81m" } ], "unitPrinted": "W", "value": "50" }, { "canonical": { "q": 50, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "l/s", "value": "50" }, { "canonical": { "q": 65, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "l/s", "value": "65" }, { "canonical": { "q": 77, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "l/s", "value": "77" }, { "key": "rotation_speed", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "Hz", "value": "1350" }, { "key": "startup_time", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "s", "value": "< 60" }, { "canonical": { "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "mbar", "value": "5 x 10^-10" } ], "series": "Turbo-V", "servedSpeed": { "fromKey": "pumping_speed_n2", "printedUnit": "l/s", "printedValue": "77", "q": 77, "rule": "published nitrogen pumping speed", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "species": "N2", "unit": "l/s" }, "sources": [ { "page": "1", "source": "src:t3-v81m" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-81-t", "lifecycleState": "eol_unsupported", "name": "Turbo-V 81-T", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "°C", "value": "+5 to +25" }, { "key": "bake_temp_max", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "196", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "permanently lubricated ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "ratio", "value": "3 x 10^2" }, { "key": "compression_he", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "ratio", "value": "5 x 10^3" }, { "key": "compression_n2", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "ratio", "value": "> 7 x 10^6" }, { "key": "cooling", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "ISO 63" }, { "key": "lubricant", "sources": [ { "page": "199", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "199", "source": "src:t3-v81t" } ], "unitPrinted": "kg", "value": "1.83" }, { "key": "mounting_orientation", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", 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