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Turbo-Molecular
High-speed rotating blades impart momentum to molecules. Works only in molecular flow. Needs a backing pump (scroll or diaphragm). Compression ratio drops for light gases.
Ion Pump (Gamma / VacIon)
Ionizes gas and buries ions in titanium cathode. Current = pressure measurement. No vibrations, no oil. Must start below ~10−5 Torr. Lifetime limited by cathode erosion.
NEG (CapaciTorr / St707)
Non-Evaporable Getter: ZrVFe alloy absorbs H₂ into the bulk, and getters CO, CO₂, N₂, H₂O on the surface. Must be activated at ~450°C. Finite capacity for CO/CO₂ (surface saturation).
Scroll / Dry Pump
Oil-free roughing pump. Two interleaved scrolls compress gas mechanically. No backstreaming risk. Used as backing for turbos or standalone for rough vacuum.
Cryopump
Condenses gas on surfaces at ~10–20 K. Pumps everything including noble gases. Must be regenerated periodically (warm up, pump out accumulated gas). Risk of pressure burst if cryo fails.
Conductance Limited
The tube between pump and chamber is too narrow. The pump spins at full speed but molecules cannot reach it fast enough. Wider, shorter tubes fix this.
Pump Speed Limited
The pump is too small for the volume and outgassing rate. A bigger pump or adding a NEG will help.
Outgassing Limited
The chamber walls produce more gas than the pump removes. Baking is the solution. This is the normal regime during bake-outs.
Real Leak
A hole to atmosphere. Pmin = Qleak / Seff. No amount of pumping or baking will help. Find and fix the leak.
Kn = λ / d
λ = kBT / (√2 · π · dmol² · P)
dmol ≈ 3.7×10−10 m for N₂. Kn > 1 → molecular, Kn < 0.01 → viscous.
C = 12.1 · D³ / L · √(T / M) [L/s]
D = diameter (cm), L = length (cm), T (K), M (g/mol). Valid for L/D > 10.
C = 11.6 · A · √(T / M) [L/s]
A = aperture area (cm²). This is the maximum conductance for a given opening.
1/Seff = 1/Sp + 1/C
Pult = Qtotal / Seff
Qtotal = sum of all gas loads (outgassing + leaks) in Torr·L/s.
| Pump type | S (N₂) L/s | S (H₂) L/s | S (Ar) L/s | S (CH₄) L/s | Ultimate (Torr) |
|---|---|---|---|---|---|
| Turbo 300 L/s | 300 | 250 | 280 | 290 | ~10−10 |
| Turbo 70 L/s | 70 | 55 | 65 | 68 | ~10−10 |
| Ion pump 60 L/s (diode) | 60 | 50 | 2 | 6 | ~10−11 |
| Ion pump 60 L/s (StarCell) | 60 | 50 | 30 | 10 | ~10−11 |
| NEG (CapaciTorr D400) | 200 | 400 | 0 | 0 | ~10−12 (H₂) |
| NEG (St707 strip, 1m) | 300 | 1500 | 0 | 0 | ~10−12 (H₂) |
| Cryo (1500 L/s) | 1500 | 2500 | 1200 | 1500 | ~10−10 |
| Scroll (dry) | ~5 m³/h (displacement pump) | ~10−2 mbar | |||
I = K · P · S
K ≈ 0.1 A/(Torr·L/s) for N₂. At 10−9 Torr with a 60 L/s pump: I ≈ 6 nA.
| NEG alloy | H₂ capacity (Torr·L/g) | CO capacity (Torr·L/g) | CO₂ capacity (Torr·L/g) | Activation T |
|---|---|---|---|---|
| St707 (ZrVFe) | 1500 | 5 | 3 | 450°C / 45 min |
| St101 (ZrAl) | 600 | 10 | 8 | 750°C / 45 min |
| ZAO (TiZrV thin film) | 0.1 (per cm²) | 0.001 | 0.0005 | 180°C / 24 h |
[2] K. Jousten (ed.), Handbook of Vacuum Technology, 2nd ed., Wiley-VCH, 2016 — Ch. 4: Gas Flow, Ch. 5: Vacuum Pumps.
[3] SAES Getters, "CapaciTorr and St707 Technical Data Sheets."
[4] Agilent (Varian), "Ion Pump Technical Manual," Publication 699908399.
[5] Pfeiffer Vacuum, "Turbopump Selection Guide," 2022.